ES2030799T3 - Eliminacion de arsina y fosfina a partir de silano. - Google Patents

Eliminacion de arsina y fosfina a partir de silano.

Info

Publication number
ES2030799T3
ES2030799T3 ES88111346T ES88111346T ES2030799T3 ES 2030799 T3 ES2030799 T3 ES 2030799T3 ES 88111346 T ES88111346 T ES 88111346T ES 88111346 T ES88111346 T ES 88111346T ES 2030799 T3 ES2030799 T3 ES 2030799T3
Authority
ES
Spain
Prior art keywords
silano
arsine
phosphine
elimination
macroreticulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES88111346T
Other languages
English (en)
Inventor
Glenn Mcpherson Tom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hercules LLC
Original Assignee
Hercules LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hercules LLC filed Critical Hercules LLC
Application granted granted Critical
Publication of ES2030799T3 publication Critical patent/ES2030799T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)

Abstract

SE EMPLEA UN POLIMERO MACRORRETICULADO METALADO QUE TIENE UNA VARIEDAD DE GRUPOS FUNCIONALES COLGANTES PARA SEPARAR IMPUREZAS DE ARSINA Y FOSFINA DE GAS SILANO.
ES88111346T 1987-07-15 1988-07-14 Eliminacion de arsina y fosfina a partir de silano. Expired - Lifetime ES2030799T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US7353687A 1987-07-15 1987-07-15

Publications (1)

Publication Number Publication Date
ES2030799T3 true ES2030799T3 (es) 1992-11-16

Family

ID=22114279

Family Applications (1)

Application Number Title Priority Date Filing Date
ES88111346T Expired - Lifetime ES2030799T3 (es) 1987-07-15 1988-07-14 Eliminacion de arsina y fosfina a partir de silano.

Country Status (2)

Country Link
EP (1) EP0299488B1 (es)
ES (1) ES2030799T3 (es)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260585A (en) * 1992-06-12 1993-11-09 Novapure Corporation Endpoint and/or back diffusion gas impurity detector, and method of using the same
US6709487B1 (en) * 2002-10-22 2004-03-23 Air Products And Chemicals, Inc. Adsorbent for moisture removal from fluorine-containing fluids
CN101987730B (zh) * 2009-07-30 2012-08-01 比亚迪股份有限公司 一种硅烷中微量杂质的去除方法
US8866044B2 (en) * 2011-05-04 2014-10-21 GM Global Technology Operations LLC System and method for manufacturing magnesium body panels with improved corrosion resistance
US9868902B2 (en) 2014-07-17 2018-01-16 Soulbrain Co., Ltd. Composition for etching

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4537759A (en) * 1981-08-24 1985-08-27 Eagle-Picher Industries, Inc. Production of elemental silicon from impure silane feed
US4603148A (en) * 1983-05-12 1986-07-29 Hercules Incorporated Macroreticulate polymer scavengers for the removal of impurities from inert fluids
US4604270A (en) * 1984-09-28 1986-08-05 Hercules Incorporated Scavengers for the removal of impurities from inert fluids

Also Published As

Publication number Publication date
EP0299488A2 (en) 1989-01-18
EP0299488A3 (en) 1989-03-08
EP0299488B1 (en) 1992-03-18

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