ES2036454A2 - Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion. - Google Patents

Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.

Info

Publication number
ES2036454A2
ES2036454A2 ES919101512A ES9101512A ES2036454A2 ES 2036454 A2 ES2036454 A2 ES 2036454A2 ES 919101512 A ES919101512 A ES 919101512A ES 9101512 A ES9101512 A ES 9101512A ES 2036454 A2 ES2036454 A2 ES 2036454A2
Authority
ES
Spain
Prior art keywords
magnetic
layer
nucleus
conductor layers
manufacturing process
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES919101512A
Other languages
English (en)
Other versions
ES2036454B1 (es
ES2036454R (es
Inventor
Moreno Ines Vincueria
Hernandez Claudio Aroca
Reyes Javier Triana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telettra Espanola SA
Original Assignee
Telettra Espanola SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telettra Espanola SA filed Critical Telettra Espanola SA
Priority to ES09101512A priority Critical patent/ES2036454B1/es
Publication of ES2036454A2 publication Critical patent/ES2036454A2/es
Publication of ES2036454R publication Critical patent/ES2036454R/es
Application granted granted Critical
Publication of ES2036454B1 publication Critical patent/ES2036454B1/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Hall/Mr Elements (AREA)
  • Magnetic Heads (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

DISPOSITIVO MAGNETOMETRICO DE TECNOLOGIA PLANAR Y PROCESO DE FABRICACION. APLICABLE PARA OBTENER SENSORES MAGNETOMETRICOS DE TIPO NUCLEO-SATURADO (FLUX-GATE), TENIENDO POR OBJETO REDUCIR EL TAMAÑO DE LOS SENSORES Y PERMITIR LA INCLUSION EN SU ESTRUCTURA DE LA ELECTRONICA ASOCIADA. EL SENSOR CUENTA CON UNA CAPA O SUSTRATO (1) SOBRE EL QUE ESTAN SUPERPUESTAS POR SUS DOS CARAS SENDAS CAPAS CONDUCTORAS (2), QUE CONSTITUYEN BOBINAS PLANAS ESPIRALES, QUE A SU VEZ ESTAN CUBIERTAS POR UNA CAPA AISLANTE (3) A LA QUE SIGUE UNA CAPA CONDUCTORA (4), QUE CONSTITUYE LAS PISTAS DE CONEXIONADO, SOBRE LAS QUE SE SUPERPONE UNA CAPA AISLANTE (5) QUE VA SEGUIDA DE UNA CAPA MAGNETICA (6), A CONTINUACION DE LAS CUALES SE REPITEN LAS CAPAS EN ORDEN INVERSO, DE MANERA QUE AL HACER CIRCULAR POR LAS CAPAS CONDUCTORAS (4), ENTRE LAS QUE QUEDA UBICADO UN NUCLEO MAGNETICO (6), CORRIENTES ALTERNAS IGUALES Y EN SENTIDOS OPUESTOS, SE ANULA DICHO CAMPO MAGNETICO EN LA ZONA EXTERNA A LOS NUCLEOS MAGNETICOS, CON LO QUE LAS CAPAS CONDUCTORAS ALEJADAS DEL NUCLEO MAGNETICO (6) CONSTITUYEN BOBINAS DETECTORAS DEL CAMPO MAGNETICO EXTERIOR.
ES09101512A 1991-06-26 1991-06-26 Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion. Expired - Lifetime ES2036454B1 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES09101512A ES2036454B1 (es) 1991-06-26 1991-06-26 Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES09101512A ES2036454B1 (es) 1991-06-26 1991-06-26 Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.

Publications (3)

Publication Number Publication Date
ES2036454A2 true ES2036454A2 (es) 1993-05-16
ES2036454R ES2036454R (es) 1995-05-16
ES2036454B1 ES2036454B1 (es) 1995-12-16

Family

ID=8272820

Family Applications (1)

Application Number Title Priority Date Filing Date
ES09101512A Expired - Lifetime ES2036454B1 (es) 1991-06-26 1991-06-26 Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.

Country Status (1)

Country Link
ES (1) ES2036454B1 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003014757A1 (en) * 2001-08-09 2003-02-20 Fast Technology Ag Magnetic field sensor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2917388A1 (de) * 1979-04-28 1980-11-06 Bosch Gmbh Robert Spulenanordnung mit mindestens einer spule und einem kern
US4703383A (en) * 1984-10-05 1987-10-27 Fuji Photo Film Co., Ltd. Coil conductor structure in thin-film magnetic head
EP0284196A2 (en) * 1987-03-06 1988-09-28 THE GENERAL ELECTRIC COMPANY, p.l.c. Magnetometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2917388A1 (de) * 1979-04-28 1980-11-06 Bosch Gmbh Robert Spulenanordnung mit mindestens einer spule und einem kern
US4703383A (en) * 1984-10-05 1987-10-27 Fuji Photo Film Co., Ltd. Coil conductor structure in thin-film magnetic head
EP0284196A2 (en) * 1987-03-06 1988-09-28 THE GENERAL ELECTRIC COMPANY, p.l.c. Magnetometer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DAVID J. ELLIOT: Integrated Circuit Fabrication Technology, 1989, Mc Graw Hill (EEUU) * Pßginas 13,42,62-65,79,154-175,221 * *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003014757A1 (en) * 2001-08-09 2003-02-20 Fast Technology Ag Magnetic field sensor

Also Published As

Publication number Publication date
ES2036454B1 (es) 1995-12-16
ES2036454R (es) 1995-05-16

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