ES2067410B1 - Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa. - Google Patents

Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa.

Info

Publication number
ES2067410B1
ES2067410B1 ES9301284A ES9301284A ES2067410B1 ES 2067410 B1 ES2067410 B1 ES 2067410B1 ES 9301284 A ES9301284 A ES 9301284A ES 9301284 A ES9301284 A ES 9301284A ES 2067410 B1 ES2067410 B1 ES 2067410B1
Authority
ES
Spain
Prior art keywords
lamp
silicon nitride
excimera
nitride coatings
silent discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES9301284A
Other languages
English (en)
Other versions
ES2067410A1 (es
Inventor
Fernandez Pio Manuel Gonzalez
Parada Eduardo Garcia
Saracho Juan Maria Pou
Fernandez Maria Dolo Fernandez
Rodriguez Julia Serra
Fong Betty Mireya Leon
Y Perez-Amor Ma Perez-Martinez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universidade de Vigo
Original Assignee
Universidade de Vigo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universidade de Vigo filed Critical Universidade de Vigo
Priority to ES9301284A priority Critical patent/ES2067410B1/es
Priority to PCT/ES1994/000058 priority patent/WO1994029493A2/es
Publication of ES2067410A1 publication Critical patent/ES2067410A1/es
Application granted granted Critical
Publication of ES2067410B1 publication Critical patent/ES2067410B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
    • C23C16/482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using incoherent light, UV to IR, e.g. lamps

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

RECUBRIMIENTOS DE NITRURO DE SILICIO PRODUCIDOS MEDIANTE LAMPARA EXCIMERA DE DESCARGA SILENCIOSA. RECUBRIMIENTOS DE NITRURO DE SILICIO PUEDEN SER APLICADOS SOBRE DIFERENTES MATERIALES Y COMPONENTES POR MEDIO DE UN METODO BASADO EN LA DEPOSICION QUIMICA A PARTIR DE VAPOR INDUCIDA POR LAMPARA (LAMP-CVD). LA FLEXIBILIDAD DE ESTE METODO PERMITE CONTROLAR LAS PROPIEDADES FISICO-QUIMICAS DE LOS RECUBRIMIENTOS, SIENDO DE ESPECIAL APLICACION EN LOS CAMPOS DE LA MICROELECTRONICA, OPTOELECTRONICA, CELULAS SOLARES Y PROTECCION DE MATERIALES.
ES9301284A 1993-06-10 1993-06-10 Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa. Expired - Fee Related ES2067410B1 (es)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ES9301284A ES2067410B1 (es) 1993-06-10 1993-06-10 Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa.
PCT/ES1994/000058 WO1994029493A2 (es) 1993-06-10 1994-06-09 Recubrimientos ceramicos producidos mediante lampara excimera de descarga silenciosa

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9301284A ES2067410B1 (es) 1993-06-10 1993-06-10 Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa.

Publications (2)

Publication Number Publication Date
ES2067410A1 ES2067410A1 (es) 1995-03-16
ES2067410B1 true ES2067410B1 (es) 1995-11-01

Family

ID=8282143

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9301284A Expired - Fee Related ES2067410B1 (es) 1993-06-10 1993-06-10 Recubrimientos de nitruro de silicio producidos mediante lampara excimera de descarga silenciosa.

Country Status (2)

Country Link
ES (1) ES2067410B1 (es)
WO (1) WO1994029493A2 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200424343A (en) * 2002-09-05 2004-11-16 Asml Us Inc Low temperature deposition of silicon based thin films by single-wafer hot-wall rapid thermal chemical vapor deposition

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0174743A3 (en) * 1984-09-05 1988-06-08 Morton Thiokol, Inc. Process for transition metal nitrides thin film deposition
US4631199A (en) * 1985-07-22 1986-12-23 Hughes Aircraft Company Photochemical vapor deposition process for depositing oxide layers
JPS6274084A (ja) * 1985-09-27 1987-04-04 Sanyo Electric Co Ltd 周期構造膜の製造方法
US4910043A (en) * 1987-07-16 1990-03-20 Texas Instruments Incorporated Processing apparatus and method
DE3919538A1 (de) * 1989-06-15 1990-12-20 Asea Brown Boveri Beschichtungsvorrichtung
FR2651782B1 (fr) * 1989-09-14 1993-03-19 Air Liquide Procede pour la realisation d'un depot d'un revetement protecteur inorganique et amorphe sur un substrat polymerique organique.
JP2637265B2 (ja) * 1990-06-28 1997-08-06 株式会社東芝 窒化珪素膜の形成方法

Also Published As

Publication number Publication date
WO1994029493A3 (es) 1995-02-09
ES2067410A1 (es) 1995-03-16
WO1994029493A2 (es) 1994-12-22

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