ES2075459T3 - Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula. - Google Patents

Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula.

Info

Publication number
ES2075459T3
ES2075459T3 ES91914373T ES91914373T ES2075459T3 ES 2075459 T3 ES2075459 T3 ES 2075459T3 ES 91914373 T ES91914373 T ES 91914373T ES 91914373 T ES91914373 T ES 91914373T ES 2075459 T3 ES2075459 T3 ES 2075459T3
Authority
ES
Spain
Prior art keywords
valve
pct
position detector
micropump
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91914373T
Other languages
English (en)
Inventor
Lintel Harald T G Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westonbridge International Ltd
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH2833/90A external-priority patent/CH683793A5/fr
Priority claimed from CH360/91A external-priority patent/CH684286A5/fr
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Application granted granted Critical
Publication of ES2075459T3 publication Critical patent/ES2075459T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/145—Pressure infusion, e.g. using pumps using pressurised reservoirs, e.g. pressurised by means of pistons
    • A61M5/1452—Pressure infusion, e.g. using pumps using pressurised reservoirs, e.g. pressurised by means of pistons pressurised by means of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0086—Medical applications
    • F16K2099/0088—Implanted devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8242—Electrical

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Fluid Mechanics (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Check Valves (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Fluid-Driven Valves (AREA)
  • Infusion, Injection, And Reservoir Apparatuses (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

UNA VALVULA HECHA DE UNA OBLEA DE SILICIO (20). UN DETECTOR DE LA POSICION QUE TIENE UN PRIMER CONTACTO ELECTRICO (54) FORMADO EN UN SOPORTE DE VIDRIO (32) MONTADO EN LA CARA POSTERIOR DE LA OBLEA (20), UN SEGUNDO CONTACTO FIJADO A LA OBLEA (20) Y UN CIRCUITO MEDIDOR DE LA IMPEDANCIA ELECTRICO (RESISTENCIA O CAPACITANCIA SEGUN LA PUESTA EN PRACTICA DE LA INVENCION) COLORADO ENTRE LOS DOS CONTACTOS ELECTRICOS PARA DETECTAR MEDIANTE CONTACTO LA POSICION DE LA VALVULA Y ASI REVELAR CUALQUIER FUNCIONAMIENTO DEFECTUOSO. ES UTIL PARA UTILIZARLO CON MICROBOMBAS PARA LA INYECCION DE MEDICAMENTOS.
ES91914373T 1990-08-31 1991-08-21 Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula. Expired - Lifetime ES2075459T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH2833/90A CH683793A5 (fr) 1990-08-31 1990-08-31 Clapet muni d'un détecteur de position par contact et micropompe comportant un tel clapet.
CH360/91A CH684286A5 (fr) 1991-02-06 1991-02-06 Clapet muni d'un détecteur de position par contact et micropompe comportant un tel clapet.

Publications (1)

Publication Number Publication Date
ES2075459T3 true ES2075459T3 (es) 1995-10-01

Family

ID=25684344

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91914373T Expired - Lifetime ES2075459T3 (es) 1990-08-31 1991-08-21 Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula.

Country Status (9)

Country Link
US (1) US5271724A (es)
EP (1) EP0498863B1 (es)
JP (1) JP3111319B2 (es)
AT (1) ATE125605T1 (es)
AU (1) AU645841B2 (es)
CA (1) CA2069894C (es)
DE (1) DE69111591T2 (es)
ES (1) ES2075459T3 (es)
WO (1) WO1992004569A1 (es)

Families Citing this family (129)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4119955C2 (de) * 1991-06-18 2000-05-31 Danfoss As Miniatur-Betätigungselement
DE4223067C2 (de) * 1992-07-14 1997-08-07 Univ Dresden Tech Mikromechanischer Durchflußbegrenzer in Mehrschichtenstruktur
SG44800A1 (en) * 1993-12-28 1997-12-19 Westonbridge Int Ltd A micropump
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
US20050100946A1 (en) * 1995-06-29 2005-05-12 Affymetrix, Inc. Integrated nucleic acid diagnostic device and method for in-situ confocal microscopy
US5856174A (en) 1995-06-29 1999-01-05 Affymetrix, Inc. Integrated nucleic acid diagnostic device
US6168948B1 (en) 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
US20020022261A1 (en) * 1995-06-29 2002-02-21 Anderson Rolfe C. Miniaturized genetic analysis systems and methods
US20020068357A1 (en) * 1995-09-28 2002-06-06 Mathies Richard A. Miniaturized integrated nucleic acid processing and analysis device and method
US5942443A (en) * 1996-06-28 1999-08-24 Caliper Technologies Corporation High throughput screening assay systems in microscale fluidic devices
US20060000722A1 (en) * 1996-06-28 2006-01-05 Caliper Life Sciences, Inc. High throughput screening assay systems in microscale fluidic devices
BR9710054A (pt) 1996-06-28 2000-01-11 Caliper Techn Corp Aparelhos para separar compostos de teste para um efeito sobre um sistema bioquìmico e para detectar ummefeito de um composto de teste sobre um sistema bioquìmico, processos de determinação de se uma amostra contém um composto capaz de afetar um sistema bioquìmico, de separação de uma pluralidade de compostos de teste para um efeito sobre um sistema bioquìmico e usos de um sistema microfluido e de um substrato de ensaio.
US5699157A (en) * 1996-07-16 1997-12-16 Caliper Technologies Corp. Fourier detection of species migrating in a microchannel
US6221654B1 (en) * 1996-09-25 2001-04-24 California Institute Of Technology Method and apparatus for analysis and sorting of polynucleotides based on size
WO1998032616A1 (en) * 1997-01-24 1998-07-30 California Institute Of Technology Mems valve
DE19802367C1 (de) * 1997-02-19 1999-09-23 Hahn Schickard Ges Mikrodosiervorrichtungsarray und Verfahren zum Betreiben desselben
EP0972082A4 (en) 1997-04-04 2007-04-25 Caliper Life Sciences Inc BIOCHEMICAL ANALYZERS OPERATING IN CLOSED LOOP
DE19720482C5 (de) * 1997-05-16 2006-01-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Mikromembranpumpe
AU9739898A (en) * 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
US7485263B2 (en) * 1997-08-26 2009-02-03 Eppendorf Ag Microproportioning system
US6540895B1 (en) 1997-09-23 2003-04-01 California Institute Of Technology Microfabricated cell sorter for chemical and biological materials
US7214298B2 (en) 1997-09-23 2007-05-08 California Institute Of Technology Microfabricated cell sorter
US6833242B2 (en) 1997-09-23 2004-12-21 California Institute Of Technology Methods for detecting and sorting polynucleotides based on size
US6074725A (en) * 1997-12-10 2000-06-13 Caliper Technologies Corp. Fabrication of microfluidic circuits by printing techniques
US6203523B1 (en) 1998-02-02 2001-03-20 Medtronic Inc Implantable drug infusion device having a flow regulator
US6164933A (en) * 1998-04-27 2000-12-26 Matsushita Electric Works, Ltd. Method of measuring a pressure of a pressurized fluid fed through a diaphragm pump and accumulated in a vessel, and miniature pump system effecting the measurement
KR20010043451A (ko) * 1998-05-08 2001-05-25 인피니언 테크놀로지스 아게 마이크로밸브
DE19821638C2 (de) * 1998-05-14 2000-07-06 Festo Ag & Co Mikroventil
US6132685A (en) 1998-08-10 2000-10-17 Caliper Technologies Corporation High throughput microfluidic systems and methods
US6308723B1 (en) 1998-11-18 2001-10-30 Alliedsignal, Inc. Piezo-resistive position indicator
US6303343B1 (en) 1999-04-06 2001-10-16 Caliper Technologies Corp. Inefficient fast PCR
AU5291600A (en) 1999-06-01 2000-12-18 Caliper Technologies Corporation Microscale assays and microfluidic devices for transporter, gradient induced, and binding activities
CN1082625C (zh) * 1999-07-07 2002-04-10 张建辉 一种带有三通式出入口的压电陶瓷泵
US6247678B1 (en) * 1999-11-01 2001-06-19 Swagelok Company Shape memory alloy actuated fluid control valve
EP1128075A3 (de) * 2000-02-24 2003-10-29 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Mikropumpe und/oder Mikromischer mit integriertem Sensor und Verfahren zu dessen Herstellung
AU2001240040A1 (en) * 2000-03-03 2001-09-17 California Institute Of Technology Combinatorial array for nucleic acid analysis
US7351376B1 (en) 2000-06-05 2008-04-01 California Institute Of Technology Integrated active flux microfluidic devices and methods
US6589229B1 (en) 2000-07-31 2003-07-08 Becton, Dickinson And Company Wearable, self-contained drug infusion device
WO2002022358A1 (en) * 2000-09-18 2002-03-21 Par Technologies, Llc. Piezoelectric actuator and pump using same
US7198250B2 (en) * 2000-09-18 2007-04-03 Par Technologies, Llc Piezoelectric actuator and pump using same
DE10048376C2 (de) * 2000-09-29 2002-09-19 Fraunhofer Ges Forschung Mikroventil mit einem normalerweise geschlossenen Zustand
US20090118139A1 (en) 2000-11-07 2009-05-07 Caliper Life Sciences, Inc. Microfluidic method and system for enzyme inhibition activity screening
US20050202470A1 (en) * 2000-11-16 2005-09-15 Caliper Life Sciences, Inc. Binding assays using molecular melt curves
US8900811B2 (en) 2000-11-16 2014-12-02 Caliper Life Sciences, Inc. Method and apparatus for generating thermal melting curves in a microfluidic device
US20050143789A1 (en) * 2001-01-30 2005-06-30 Whitehurst Todd K. Methods and systems for stimulating a peripheral nerve to treat chronic pain
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
US20050196785A1 (en) * 2001-03-05 2005-09-08 California Institute Of Technology Combinational array for nucleic acid analysis
WO2002081729A2 (en) 2001-04-06 2002-10-17 California Institute Of Technology Nucleic acid amplification utilizing microfluidic devices
US7723123B1 (en) 2001-06-05 2010-05-25 Caliper Life Sciences, Inc. Western blot by incorporating an affinity purification zone
US20020187564A1 (en) * 2001-06-08 2002-12-12 Caliper Technologies Corp. Microfluidic library analysis
US20060062696A1 (en) * 2001-07-27 2006-03-23 Caliper Life Sciences, Inc. Optimized high throughput analytical systems
US6852492B2 (en) * 2001-09-24 2005-02-08 Intel Corporation Nucleic acid sequencing by raman monitoring of uptake of precursors during molecular replication
US7247274B1 (en) 2001-11-13 2007-07-24 Caliper Technologies Corp. Prevention of precipitate blockage in microfluidic channels
US7691333B2 (en) 2001-11-30 2010-04-06 Fluidigm Corporation Microfluidic device and methods of using same
CA2467587A1 (en) 2001-11-30 2003-06-12 Fluidigm Corporation Microfluidic device and methods of using same
US6561224B1 (en) * 2002-02-14 2003-05-13 Abbott Laboratories Microfluidic valve and system therefor
EP2581739B1 (en) 2002-03-05 2015-11-04 Caliper Life Sciences, Inc. Microfluidic separation method with combined pressure and voltage control
US7303727B1 (en) 2002-03-06 2007-12-04 Caliper Life Sciences, Inc Microfluidic sample delivery devices, systems, and methods
US7312085B2 (en) 2002-04-01 2007-12-25 Fluidigm Corporation Microfluidic particle-analysis systems
EP1499706A4 (en) 2002-04-01 2010-11-03 Fluidigm Corp MICROFLUIDIC PARTICLE ANALYSIS SYSTEMS
US6976590B2 (en) 2002-06-24 2005-12-20 Cytonome, Inc. Method and apparatus for sorting particles
US6808075B2 (en) 2002-04-17 2004-10-26 Cytonome, Inc. Method and apparatus for sorting particles
US9943847B2 (en) 2002-04-17 2018-04-17 Cytonome/St, Llc Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
US8241883B2 (en) 2002-04-24 2012-08-14 Caliper Life Sciences, Inc. High throughput mobility shift
US20030226987A1 (en) * 2002-06-06 2003-12-11 Gallmeyer Christopher F. Method and apparatus for seat detection and soft seating in a piezoelectric device actuated valve system
EP2298448A3 (en) 2002-09-25 2012-05-30 California Institute of Technology Microfluidic large scale integration
US8871446B2 (en) 2002-10-02 2014-10-28 California Institute Of Technology Microfluidic nucleic acid analysis
US8275554B2 (en) * 2002-12-20 2012-09-25 Caliper Life Sciences, Inc. System for differentiating the lengths of nucleic acids of interest in a sample
JP4395133B2 (ja) 2002-12-20 2010-01-06 カリパー・ライフ・サイエンシズ・インク． Ｄｎａの単一分子増幅および検出
US20050042639A1 (en) * 2002-12-20 2005-02-24 Caliper Life Sciences, Inc. Single molecule amplification and detection of DNA length
US7476363B2 (en) 2003-04-03 2009-01-13 Fluidigm Corporation Microfluidic devices and methods of using same
US8828663B2 (en) 2005-03-18 2014-09-09 Fluidigm Corporation Thermal reaction device and method for using the same
US20050145496A1 (en) 2003-04-03 2005-07-07 Federico Goodsaid Thermal reaction device and method for using the same
US7604965B2 (en) 2003-04-03 2009-10-20 Fluidigm Corporation Thermal reaction device and method for using the same
US20050214197A1 (en) * 2003-09-17 2005-09-29 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
US7235159B2 (en) * 2003-09-17 2007-06-26 Molecular Nanosystems, Inc. Methods for producing and using catalytic substrates for carbon nanotube growth
US20050098750A1 (en) * 2003-11-06 2005-05-12 Daniel Sobek Electrostatic sealing device and method of use thereof
US20050147979A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Nucleic acid sequencing by Raman monitoring of uptake of nucleotides during molecular replication
US20050147980A1 (en) * 2003-12-30 2005-07-07 Intel Corporation Nucleic acid sequencing by Raman monitoring of uptake of nucleotides during molecular replication
US7287965B2 (en) * 2004-04-02 2007-10-30 Adaptiv Energy Llc Piezoelectric devices and methods and circuits for driving same
US20050225201A1 (en) * 2004-04-02 2005-10-13 Par Technologies, Llc Piezoelectric devices and methods and circuits for driving same
US7312554B2 (en) 2004-04-02 2007-12-25 Adaptivenergy, Llc Piezoelectric devices and methods and circuits for driving same
US7290993B2 (en) * 2004-04-02 2007-11-06 Adaptivenergy Llc Piezoelectric devices and methods and circuits for driving same
WO2006012509A2 (en) 2004-07-23 2006-02-02 Afa Controls, Llc Methods of operating microvalve assemblies and related structures and related devices
US20060081294A1 (en) * 2004-10-15 2006-04-20 Festo Corporation Pressure regulator with integrated flow switch
US9260693B2 (en) 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
US7258533B2 (en) * 2004-12-30 2007-08-21 Adaptivenergy, Llc Method and apparatus for scavenging energy during pump operation
US20060147329A1 (en) * 2004-12-30 2006-07-06 Tanner Edward T Active valve and active valving for pump
US20060194724A1 (en) * 2005-02-25 2006-08-31 Whitehurst Todd K Methods and systems for nerve regeneration
US20060232166A1 (en) * 2005-04-13 2006-10-19 Par Technologies Llc Stacked piezoelectric diaphragm members
US20060232171A1 (en) * 2005-04-13 2006-10-19 Par Technologies, Llc Piezoelectric diaphragm assembly with conductors on flexible film
DE102005038483B3 (de) * 2005-08-13 2006-12-14 Albert-Ludwigs-Universität Freiburg Mikropumpe
US20070075286A1 (en) * 2005-10-04 2007-04-05 Par Technologies, Llc Piezoelectric valves drive
US20070129681A1 (en) * 2005-11-01 2007-06-07 Par Technologies, Llc Piezoelectric actuation of piston within dispensing chamber
US8075852B2 (en) 2005-11-02 2011-12-13 Affymetrix, Inc. System and method for bubble removal
US8007267B2 (en) 2005-11-02 2011-08-30 Affymetrix, Inc. System and method for making lab card by embossing
US7345407B2 (en) * 2005-11-18 2008-03-18 Adaptivenergy, Llc. Human powered piezoelectric power generating device
JP2009522550A (ja) * 2005-12-31 2009-06-11 コーニング インコーポレイテッド マイクロリアクターガラスダイヤフラムセンサ
US7909928B2 (en) * 2006-03-24 2011-03-22 The Regents Of The University Of Michigan Reactive coatings for regioselective surface modification
US20080124726A1 (en) 2006-05-26 2008-05-29 Althea Technologies, Inc. Biochemical analysis of partitioned cells
US7947148B2 (en) * 2006-06-01 2011-05-24 The Regents Of The University Of Michigan Dry adhesion bonding
EP2054525A1 (en) * 2006-07-27 2009-05-06 Koninklijke Philips Electronics N.V. Device for molecular diagnosis
US8202267B2 (en) 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US20080246367A1 (en) * 2006-12-29 2008-10-09 Adaptivenergy, Llc Tuned laminated piezoelectric elements and methods of tuning same
US8399047B2 (en) * 2007-03-22 2013-03-19 The Regents Of The Univeristy Of Michigan Multifunctional CVD coatings
US20090020463A1 (en) * 2007-07-18 2009-01-22 Horn-Jiunn Sheen Triple-channel particle separation device
US8016260B2 (en) * 2007-07-19 2011-09-13 Formulatrix, Inc. Metering assembly and method of dispensing fluid
US20090186344A1 (en) * 2008-01-23 2009-07-23 Caliper Life Sciences, Inc. Devices and methods for detecting and quantitating nucleic acids using size separation of amplicons
US8986253B2 (en) 2008-01-25 2015-03-24 Tandem Diabetes Care, Inc. Two chamber pumps and related methods
US8708961B2 (en) 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
CN101550926B (zh) * 2008-03-31 2014-03-12 研能科技股份有限公司 双腔流体输送装置
US8408421B2 (en) 2008-09-16 2013-04-02 Tandem Diabetes Care, Inc. Flow regulating stopcocks and related methods
CA2737461A1 (en) 2008-09-19 2010-03-25 Tandem Diabetes Care, Inc. Solute concentration measurement device and related methods
US8230744B2 (en) 2009-05-06 2012-07-31 Cequr Sa Low-dead volume microfluidic circuit and methods
US20100282766A1 (en) * 2009-05-06 2010-11-11 Heiko Arndt Low-Dead Volume Microfluidic Component and Method
WO2010141131A1 (en) 2009-06-04 2010-12-09 Lockheed Martin Corporation Multiple-sample microfluidic chip for dna analysis
US8926561B2 (en) 2009-07-30 2015-01-06 Tandem Diabetes Care, Inc. Infusion pump system with disposable cartridge having pressure venting and pressure feedback
US8961764B2 (en) 2010-10-15 2015-02-24 Lockheed Martin Corporation Micro fluidic optic design
EP2469089A1 (en) * 2010-12-23 2012-06-27 Debiotech S.A. Electronic control method and system for a piezo-electric pump
JP5533823B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
JP5900155B2 (ja) * 2011-09-06 2016-04-06 株式会社村田製作所 流体制御装置
US9322054B2 (en) 2012-02-22 2016-04-26 Lockheed Martin Corporation Microfluidic cartridge
US9180242B2 (en) 2012-05-17 2015-11-10 Tandem Diabetes Care, Inc. Methods and devices for multiple fluid transfer
US9173998B2 (en) 2013-03-14 2015-11-03 Tandem Diabetes Care, Inc. System and method for detecting occlusions in an infusion pump
CN107438891B (zh) 2015-02-10 2019-11-08 诺威量测设备公司 用于使用二次离子质谱的半导体计量和表面分析的系统和方法
CN107784660B (zh) * 2017-11-02 2020-12-04 武汉新芯集成电路制造有限公司 图像处理方法、图像处理系统及缺陷检测装置
JP7226221B2 (ja) * 2019-09-24 2023-02-21 株式会社島津製作所 マイクロバルブ
CN111779656B (zh) * 2020-06-17 2022-05-10 长春大学 一种双摆式压电风机
WO2025166247A1 (en) * 2024-02-02 2025-08-07 Parallel Fluidics, Inc. Embedded valve for microfluidic devices

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4543457A (en) * 1984-01-25 1985-09-24 Transensory Devices, Inc. Microminiature force-sensitive switch
US4562741A (en) * 1984-04-20 1986-01-07 Craig Hosterman Pressure relief valve with pressure indicating means
US4579001A (en) * 1984-04-20 1986-04-01 Craig Hosterman Pressure relief valve with pressure indicating means
US4737660A (en) * 1986-11-13 1988-04-12 Transensory Device, Inc. Trimmable microminiature force-sensitive switch
US4838887A (en) * 1987-12-15 1989-06-13 Shiley Infusaid Inc. Programmable valve pump
GB2215914B (en) * 1988-03-17 1991-07-03 Emi Plc Thorn A microengineered diaphragm pressure switch and a method of manufacture thereof
DE3814150A1 (de) * 1988-04-27 1989-11-09 Draegerwerk Ag Ventilanordnung aus mikrostrukturierten komponenten
US4855544A (en) * 1988-09-01 1989-08-08 Honeywell Inc. Multiple level miniature electromechanical accelerometer switch
FR2639085B1 (fr) * 1988-11-15 1991-04-19 Neuchatel Universite Microvanne electrostatique integree et procede de fabrication d'une telle microvanne
CH679555A5 (es) * 1989-04-11 1992-03-13 Westonbridge Int Ltd

Also Published As

Publication number Publication date
CA2069894A1 (en) 1992-03-01
EP0498863A1 (en) 1992-08-19
US5271724A (en) 1993-12-21
WO1992004569A1 (en) 1992-03-19
DE69111591T2 (de) 1996-02-29
AU8422891A (en) 1992-03-30
AU645841B2 (en) 1994-01-27
ATE125605T1 (de) 1995-08-15
JP3111319B2 (ja) 2000-11-20
CA2069894C (en) 2001-04-24
EP0498863B1 (en) 1995-07-26
DE69111591D1 (de) 1995-08-31
JPH05502090A (ja) 1993-04-15

Similar Documents

Publication Publication Date Title
ES2075459T3 (es) Valvula equipada con detector de posicion y microbomba que incorpora dicha valvula.
ES2059663T3 (es) Cerradura.
MY102712A (en) A semiconductor component incorporated a power-mosfet and a control circuit
ATE9516T1 (de) Ausweiskarte mit ic-baustein.
EP0654830A3 (en) Integrated semiconductor circuit component.
SE8106889L (sv) Berelement for komponenter i form av integrerade kretsar
IT8321641A0 (it) Complesso circuitale ad alta frequenza e dispositivo semiconduttore per l'impiego in tale complesso.
ATE47505T1 (de) Monolithisch integrierte halbleiterschaltung.
SE8901104L (sv) Skyddsmodul foer en kontakteringselektromagnet
FR2674404B1 (fr) Dispositif a carte a circuit integre.
ES2119381T3 (es) Metalizacion de mini-encendedores por serigrafia con metales activos.
DE69128226D1 (de) Halbleiteranordnung vom Druckkontakttyp
KR890005859A (ko) 집적회로 칩 조립품
SE9000245L (sv) Halvledarkomponent och foerfarande foer dess framstaellning
DE3765259D1 (de) Integrierte halbleiterschaltung mit erkennungsschaltung fuer adressensignal-wechsel.
DE69219716D1 (de) Integrierte Schaltungsanordnung mit verbesserter kapazitiver Isolierung des Substrates
IT8619174A0 (it) Densita'.!circuito integrato a semiconduttore, in particolare del tipo comprendente dispositivi ad alta tensione e dispositivi di elaborazione di segnale ad alta
KR900011093A (ko) 집적 회로형 반도체 소자
DE69014940D1 (de) Integrierte Halbleitervorrichtung mit einer aktiven Isolatorschaltung.
KR920018794A (ko) 키 어셈블리와 이것을 이용한 기구
DE69315806D1 (de) Elektronisches Etikett
DE3581632D1 (de) Integrierte halbleiter-schaltungsvorrichtung mit mehrschichtverdrahtung.
IT8223345A0 (it) Dispositivo circuitale integrato a semiconduttore e relativo procedimento di fabbricazione.
ES2130640T3 (es) Chupete musical para bebe, y procedimiento de fabricacion.
KR900019267A (ko) 고감도 트라이액

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 498863

Country of ref document: ES