ES2075751T3 - Aparato para suministrar fluido de alta pureza. - Google Patents

Aparato para suministrar fluido de alta pureza.

Info

Publication number
ES2075751T3
ES2075751T3 ES93115785T ES93115785T ES2075751T3 ES 2075751 T3 ES2075751 T3 ES 2075751T3 ES 93115785 T ES93115785 T ES 93115785T ES 93115785 T ES93115785 T ES 93115785T ES 2075751 T3 ES2075751 T3 ES 2075751T3
Authority
ES
Spain
Prior art keywords
cylinder
debugger
high purity
macroparticles
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93115785T
Other languages
English (en)
Inventor
Dao-Hong Zheng
Alan John Francis Paterson
John Irven
Daniel Carl Tregear
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of ES2075751T3 publication Critical patent/ES2075751T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0415—Beds in cartridges
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/002—Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/45—Gas separation or purification devices adapted for specific applications
    • B01D2259/4525—Gas separation or purification devices adapted for specific applications for storage and dispensing systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0119—Shape cylindrical with flat end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/032—Orientation with substantially vertical main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/058—Size portable (<30 l)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0329—Valves manually actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0335—Check-valves or non-return valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0382—Constructional details of valves, regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Gas Separation By Absorption (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

UN APARATO PARA SUMINISTRAR GAS DE GRAN PUREZA COMPRENDE UN CILINDRO (101), QUE TIENE UNA VALVULA (102) CON DOS LUMBRERAS INTERNAS (107, 114). UNA LUMBRERA INTERNA (114) SE USA PARA LLENAR EL CILINDRO (101), MIENTRAS QUE LA OTRA (107) SE AJUSTA CON UNA UNIDAD (108) QUE EXTRAE MACROPARTICULAS E IMPUREZAS DEL GAS, A MEDIDA QUE ESTE SALE DEL CILINDRO (101). LA UNIDAD (108) COMPRENDE UNA ENTRADA (109), UN PRIMER FILTRO (110) PARA EXTRAER MACROPARTICULAS GRUESAS, CAPAS DE ABSORBENTES Y ABSORBENTE (111) PARA EXTRAER IMPUREZAS, Y UN SEGUNDO FILTRO (112) PARA EXTRAER PARTICULAS FINAS. EL GAS DEPURADO SALE DEL CILINDRO POR UNA VALVULA (102) Y, DESPUES DE PASAR POR UN REGULADOR, UN DISPOSITIVO DE CONTROL DE FLUJO Y VARIAS LONGITUDES DE TUBERIA, PASA POR UN DEPURADOR CONVENCIONAL, INMEDIATAMENTE HACIA ARRIBA DEL PUNTO DE USO. EL APARATO REDUCE LA CARGA SOBRE EL DEPURADOR Y POR ELLO DISMINUYE LA FRECUENCIA EN LA QUE EL DEPURADOR TIENE QUE SER RECARGADO. EL APARATO TIENE TAMBIEN POTENCIAL SUFICIENTE PARA OBVIAR LA NECESIDAD DEL DEPURADOR.
ES93115785T 1992-10-06 1993-09-30 Aparato para suministrar fluido de alta pureza. Expired - Lifetime ES2075751T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB929220975A GB9220975D0 (en) 1992-10-06 1992-10-06 Apparatus for supplying high purity gas

Publications (1)

Publication Number Publication Date
ES2075751T3 true ES2075751T3 (es) 1995-10-01

Family

ID=10723025

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93115785T Expired - Lifetime ES2075751T3 (es) 1992-10-06 1993-09-30 Aparato para suministrar fluido de alta pureza.

Country Status (6)

Country Link
US (1) US5409526A (es)
EP (1) EP0591840B1 (es)
JP (1) JP3492734B2 (es)
DE (1) DE69300280T2 (es)
ES (1) ES2075751T3 (es)
GB (1) GB9220975D0 (es)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5456740A (en) * 1994-06-22 1995-10-10 Millipore Corporation High-efficiency metal membrane getter element and process for making
US6204180B1 (en) 1997-05-16 2001-03-20 Advanced Technology Materials, Inc. Apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing sorbent-based fluid storage and dispensing system for reagent delivery
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6083298A (en) * 1994-10-13 2000-07-04 Advanced Technology Materials, Inc. Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment
US5707424A (en) * 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US5704967A (en) * 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US6315934B1 (en) * 1995-05-08 2001-11-13 Shell Oil Company Process for preparing poly(thimethylene therephthalate) carpet yarn
FR2735209B1 (fr) † 1995-06-08 1997-07-25 Air Liquide Ensemble robinet/detendeur pour bouteille de gaz et bouteille de gaz equipee d'un tel ensemble
US5916245A (en) * 1996-05-20 1999-06-29 Advanced Technology Materials, Inc. High capacity gas storage and dispensing system
US5676735A (en) * 1996-10-31 1997-10-14 Advanced Technology Materials, Inc. Reclaiming system for gas recovery from decommissioned gas storage and dispensing vessels and recycle of recovered gas
US6027547A (en) * 1997-05-16 2000-02-22 Advanced Technology Materials, Inc. Fluid storage and dispensing vessel with modified high surface area solid as fluid storage medium
US6019823A (en) * 1997-05-16 2000-02-01 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with replaceable sorbent cartridge members
US5985008A (en) * 1997-05-20 1999-11-16 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing system with high efficiency sorbent medium
US5851270A (en) * 1997-05-20 1998-12-22 Advanced Technology Materials, Inc. Low pressure gas source and dispensing apparatus with enhanced diffusive/extractive means
US7013916B1 (en) 1997-11-14 2006-03-21 Air Products And Chemicals, Inc. Sub-atmospheric gas delivery method and apparatus
GB9724168D0 (en) 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
US5980608A (en) * 1998-01-07 1999-11-09 Advanced Technology Materials, Inc. Throughflow gas storage and dispensing system
US6406519B1 (en) * 1998-03-27 2002-06-18 Advanced Technology Materials, Inc. Gas cabinet assembly comprising sorbent-based gas storage and delivery system
US6660063B2 (en) 1998-03-27 2003-12-09 Advanced Technology Materials, Inc Sorbent-based gas storage and delivery system
US5980599A (en) * 1998-03-27 1999-11-09 Uop Llc In-tank purifier with bypass for filling
US6343476B1 (en) 1998-04-28 2002-02-05 Advanced Technology Materials, Inc. Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
US6101816A (en) * 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6620256B1 (en) 1998-04-28 2003-09-16 Advanced Technology Materials, Inc. Non-plasma in-situ cleaning of processing chambers using static flow methods
JPH11342823A (ja) * 1998-06-01 1999-12-14 Daicel Chem Ind Ltd モジュールへの取付け性の向上したハイブリッドインフレータ
US6070576A (en) * 1998-06-02 2000-06-06 Advanced Technology Materials, Inc. Adsorbent-based storage and dispensing system
EP1887276B1 (en) * 1999-07-31 2018-11-28 Praxair Technology, Inc. Fail-safe delivery valve for pressurized tanks
RU2171765C1 (ru) * 2000-02-29 2001-08-10 Центр КОРТЭС Капсула для хранения газа и способ ее заправки
SE515575C2 (sv) * 2000-05-25 2001-09-03 Volvo Lastvagnar Ab Anordning för avluftning av ett transmissionshus
US6436170B1 (en) 2000-06-23 2002-08-20 Air Products And Chemical, Inc. Process and apparatus for removing particles from high purity gas systems
US6360546B1 (en) 2000-08-10 2002-03-26 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
US6395050B1 (en) * 2000-10-05 2002-05-28 Nuclear Filter Technology, Inc. Vent filter with direct sample capability
GB0103762D0 (en) * 2001-02-15 2001-04-04 Air Prod & Chem A gas purification unit
US6447565B1 (en) * 2001-05-03 2002-09-10 General Motors Corporation Transmission vent assembly
US6932945B2 (en) * 2001-06-19 2005-08-23 Air Products And Chemicals, Inc. Adsorbent based gas delivery system with integrated purifier
US6805848B2 (en) * 2001-07-17 2004-10-19 Air Products And Chemicals, Inc. Built-in purifier for horizontal liquefied gas cylinders
US6557591B2 (en) * 2001-07-17 2003-05-06 Air Products And Chemicals, Inc. Bulk gas built-in purifier with dual valve bulk container
US6857447B2 (en) 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US7105037B2 (en) 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
USD545393S1 (en) 2002-12-09 2007-06-26 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US7494530B2 (en) * 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
RU2225246C1 (ru) * 2002-12-15 2004-03-10 Павлов Николай Владимирович Устройство для хранения, транспортировки и выдачи газов
US6911065B2 (en) * 2002-12-26 2005-06-28 Matheson Tri-Gas, Inc. Method and system for supplying high purity fluid
US6868869B2 (en) * 2003-02-19 2005-03-22 Advanced Technology Materials, Inc. Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases
US20040206239A1 (en) * 2003-02-20 2004-10-21 Laubacher Daniel B. Method for reducing gaseous contamination in a pressure vessel
FR2855860B1 (fr) 2003-06-05 2006-08-25 Philippe Legoit Clapet de remplissage et de vidage et outillage de nettoyage d'une bouteille de fluide pressurise.
US6909839B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Delivery systems for efficient vaporization of precursor source material
US20050111995A1 (en) * 2003-11-25 2005-05-26 Everson Rodney W. Carbon dioxide power system and method
FR2863500B1 (fr) * 2003-12-11 2007-03-30 Air Liquide Stockage de gaz destine a fournir un gaz decontamine
US7160359B2 (en) * 2004-07-02 2007-01-09 Air Products And Chemicals, Inc. Built in purifier for reactive gases
US7396381B2 (en) * 2004-07-08 2008-07-08 Air Products And Chemicals, Inc. Storage and delivery systems for gases held in liquid medium
US7811532B2 (en) * 2005-04-18 2010-10-12 Air Products And Chemicals, Inc. Dual-flow valve and internal processing vessel isolation system
TW200708537A (en) * 2005-08-23 2007-03-01 Nippon Catalytic Chem Ind Method for producing a purified borazine compound, method for filling a container with a borazine compound and container for preserving a borazine compound
US7481074B2 (en) * 2006-03-01 2009-01-27 Air Products And Chemicals, Inc. Self-contained distillation purifier/superheater for liquid-fill product container and delivery systems
US7708028B2 (en) * 2006-12-08 2010-05-04 Praxair Technology, Inc. Fail-safe vacuum actuated valve for high pressure delivery systems
US8171950B2 (en) * 2007-01-30 2012-05-08 Ysn Imports, Inc. Compressed air regulator apparatus situated in canister and method for regulating compressed air thereof
DE102007063630B4 (de) * 2007-06-27 2010-02-04 BLüCHER GMBH Speicherbehälter für gasförmige Kraftstoffe und dessen Anwendung
KR101004747B1 (ko) * 2007-12-21 2011-01-04 송기용 대구경 기둥의 상하 적층식 시공방법 및 이를 적용한구조물의 골조시공방법
US7905247B2 (en) * 2008-06-20 2011-03-15 Praxair Technology, Inc. Vacuum actuated valve for high capacity storage and delivery systems
BRPI0916466A2 (pt) * 2008-12-09 2016-02-16 Du Pont método de remoção da cauda e dispositivo de remoção da cauda
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
US8449654B2 (en) 2011-08-22 2013-05-28 Air Products And Chemicals, Inc. Method and apparatus for the supply of dry gases
US8529657B2 (en) * 2011-08-31 2013-09-10 American Axle & Manufacturing, Inc. Porous vent breather
EP2855009A4 (en) 2012-05-29 2016-04-13 Entegris Inc CARBON ADSORBENT FOR THE REMOVAL OF HYDROGEN SULFIDE FROM GAS, AND REGENERATION OF ADSORBENT
FR3014168B1 (fr) * 2013-12-04 2016-05-06 Marcello Aghilone Cartouche de stockage de fluide comprime
CN106536377B (zh) * 2014-06-13 2021-01-29 恩特格里斯公司 压力调节式流体储存与施配容器的基于吸附剂的压力稳定
KR101724886B1 (ko) * 2015-08-10 2017-04-07 현대자동차주식회사 가스저장용기의 필터장치 및 이의 설치방법
US10837603B2 (en) * 2018-03-06 2020-11-17 Entegris, Inc. Gas supply vessel
WO2022140085A1 (en) * 2020-12-23 2022-06-30 Entegris, Inc. Gas storage systems and method thereof
FR3130933B1 (fr) * 2021-12-22 2024-06-28 Faurecia Systemes Dechappement Unité de stockage de fluide cryogénique

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE129169C (es) *
US1821549A (en) * 1927-01-15 1931-09-01 E K Medical Gas Lab Inc Apparatus for dehydrating and purifying gases
US2031164A (en) * 1935-03-28 1936-02-18 Heywood Paper Box & Mfg Compan Air purifying device
US2284147A (en) * 1939-01-28 1942-05-26 Standard Oil Co California Method and apparatus for soil gas analysis
US2548335A (en) * 1947-04-24 1951-04-10 Weatherhead Co Refrigeration accumulator and dehydrator
US2722105A (en) * 1952-10-13 1955-11-01 Little Inc A Delivery tube for liquefied gases
US3169112A (en) * 1961-06-30 1965-02-09 Roy A Nelson Disposable filters
DE2323013A1 (de) * 1973-05-08 1974-11-28 Draegerwerk Ag Gasflaschenventil mit wasserschutzrohr fuer druckgasflaschen
US3976050A (en) * 1974-11-18 1976-08-24 Nuclear Associates, Inc. Device for adsorbing exhaled radioactive gases and process
US4032311A (en) * 1976-06-01 1977-06-28 Dacor Corporation Tank filter
US4146277A (en) * 1978-06-29 1979-03-27 Santoro Dario S Desiccant cap
JPS5539208A (en) * 1978-09-11 1980-03-19 Taiyo Sanso Kk Gas purifying cylinder
GB2078128B (en) * 1980-06-24 1984-09-12 Nat Res Dev Monitoring gases
JPS5838238Y2 (ja) * 1980-12-25 1983-08-29 日本コイン株式会社 溶解アセチレン容器の逆火防止器
FR2583302B1 (fr) * 1985-06-18 1987-08-28 Analyseurs Epurateurs Sarl Ste Procede industriel pour la fabrication d'epurateurs destines a l'elaboration de gaz de haute purete.
JPS62161095A (ja) * 1986-01-10 1987-07-17 三菱重工業株式会社 高温ゲツタ容器
SU1360736A1 (ru) * 1986-07-29 1987-12-23 Предприятие П/Я Р-6453 Баллон дл транспортировани и хранени высокотоксичных и пожароопасных газов
JPS6351918A (ja) * 1986-08-22 1988-03-05 Tadahiro Omi 半導体製造装置用ガス精製器
FR2615270B1 (fr) * 1987-05-15 1989-07-13 Air Liquide Detendeur pour gaz purs
US5041147A (en) * 1989-07-14 1991-08-20 The United States Of America As Represented By The United States Department Of Energy Hydrogen isotope separation utilizing bulk getters
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas

Also Published As

Publication number Publication date
JPH06233926A (ja) 1994-08-23
GB9220975D0 (en) 1992-11-18
JP3492734B2 (ja) 2004-02-03
US5409526A (en) 1995-04-25
EP0591840B1 (en) 1995-07-19
EP0591840A1 (en) 1994-04-13
DE69300280D1 (de) 1995-08-24
DE69300280T2 (de) 1996-01-11

Similar Documents

Publication Publication Date Title
ES2075751T3 (es) Aparato para suministrar fluido de alta pureza.
MX169202B (es) Filtro para refrigerante, inhibidor de corrosion
ES2074910T3 (es) Un aparato para filtrar particulas solidas de un fluido.
BR0008463A (pt) Elemento de filtro compreendendo elemento de filtro inserido em estrutura rìgida e métodos para utilização do mesmo
CA2242916A1 (en) Continuous high pressure solids pump system
RU95107691A (ru) Обрабатывающее устройство
ATE64183T1 (de) Automatisches ansaug-durchfluss-ventil und mit diesem ventil ausgeruestetes strahlreinigungsgeraet.
ES2072195B1 (es) Un metodo y un aparato para eliminar, en aviacion, componentes de mezclas de fluido.
ES2050358T3 (es) Absorbedor de martillo de agua.
ATE141822T1 (de) Schlauchfilter
ATE129060T1 (de) Absperrvorrichung für gasrohrleitungen.
ES2025847T3 (es) Pistola de suministro de combustible.
JPS5713213A (en) Exhaust gas purifier for internal combustion engine
IT8553418V0 (it) Sistema di collettore per contenitori di gas
DK16689A (da) Ledningstrykfaldsventil.
JPS5612011A (en) Exhaust gas purifier for engine
DE3562030D1 (en) Protecting device for drinking-water conduit pipes
SU1250713A1 (ru) Устройство дл защиты поршневого компрессора от перегрева
KR920019392A (ko) 기체상 유체의 분진 제거 방법과 장치
FI942047A0 (fi) Nestesäiliö
KR920019391A (ko) 기체상 유체의 액상분무를 이용한 분진 제거 방법과 장치
SU1201558A1 (ru) Вибрационный насос
SE8103048L (sv) Med aktivt tryck verkande tillblandningsanordning
GB879733A (en) Improvements in or relating to cleaning devices
SE8104861L (sv) Sterilluftanordning for lagertankar

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 591840

Country of ref document: ES