ES2080867T3 - Suministro de gas reactivo desde un tampon de gas hasta una herramienta de proceso. - Google Patents

Suministro de gas reactivo desde un tampon de gas hasta una herramienta de proceso.

Info

Publication number
ES2080867T3
ES2080867T3 ES91113871T ES91113871T ES2080867T3 ES 2080867 T3 ES2080867 T3 ES 2080867T3 ES 91113871 T ES91113871 T ES 91113871T ES 91113871 T ES91113871 T ES 91113871T ES 2080867 T3 ES2080867 T3 ES 2080867T3
Authority
ES
Spain
Prior art keywords
process tool
gas supply
buffer
gas
reactive gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91113871T
Other languages
English (en)
Inventor
Mark Allen George
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Products and Chemicals Inc
Original Assignee
Air Products and Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Application granted granted Critical
Publication of ES2080867T3 publication Critical patent/ES2080867T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0119—Shape cylindrical with flat end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0114—Propulsion of the fluid with vacuum injectors, e.g. venturi
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

SE DESCRIBE UN SISTEMA ENVIO POR CONTROL REMOTO PARA UN GAS DE PROCESO, SENSIBLE A LA HUMEDAD Y POTENCIALMENTE TOXICO AL PUNTO DE UTILIZACION (POR EJEMPLO UN SISTEMA CVD).
ES91113871T 1990-08-24 1991-08-19 Suministro de gas reactivo desde un tampon de gas hasta una herramienta de proceso. Expired - Lifetime ES2080867T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/572,834 US5137047A (en) 1990-08-24 1990-08-24 Delivery of reactive gas from gas pad to process tool

Publications (1)

Publication Number Publication Date
ES2080867T3 true ES2080867T3 (es) 1996-02-16

Family

ID=24289556

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91113871T Expired - Lifetime ES2080867T3 (es) 1990-08-24 1991-08-19 Suministro de gas reactivo desde un tampon de gas hasta una herramienta de proceso.

Country Status (4)

Country Link
US (1) US5137047A (es)
EP (1) EP0473040B1 (es)
DE (1) DE69113929T2 (es)
ES (1) ES2080867T3 (es)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5220517A (en) * 1990-08-31 1993-06-15 Sci Systems, Inc. Process gas distribution system and method with supervisory control
US5368062A (en) * 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
US5449294A (en) * 1993-03-26 1995-09-12 Texas Instruments Incorporated Multiple valve assembly and process
EP0619450A1 (en) * 1993-04-09 1994-10-12 The Boc Group, Inc. Zero Dead-Leg Gas Cabinet
US5359787A (en) * 1993-04-16 1994-11-01 Air Products And Chemicals, Inc. High purity bulk chemical delivery system
US5398712A (en) * 1993-05-27 1995-03-21 American Air Liquide Purgeable connection for gas cylinders
JP3361162B2 (ja) * 1993-10-27 2003-01-07 清原 まさ子 タンク室付ブロックバルブ
JP2813856B2 (ja) * 1993-11-29 1998-10-22 日本エア・リキード株式会社 シリンダ付ガス供給装置
US5660201A (en) * 1993-12-21 1997-08-26 Lockheed Martin Idaho Technologies Company Multiple source/multiple target fluid transfer apparatus
US5749389A (en) * 1993-12-22 1998-05-12 Liquid Air Corporation Purgeable connection for gas supply cabinet
US5601108A (en) * 1995-12-20 1997-02-11 Scott M. Perry Gas line safety evacuation apparatus and method
JP3208062B2 (ja) 1996-07-15 2001-09-10 シーケーディ株式会社 パージシステム及びパージ継手
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
DE19632015C1 (de) * 1996-08-08 1998-01-15 Sauerstoffwerk Guttroff F Gmbh Versorgungsanlage, insbesondere für toxische und brennbare Gase
PT946272E (pt) * 1996-11-28 2002-12-31 Solvay Fluor & Derivate Preparacao de misturas de gases homogenea com sf6
US6536460B1 (en) * 1997-03-21 2003-03-25 Advanced Micro Devices, Inc. Process line purge system and method
US6142169A (en) * 1997-03-28 2000-11-07 Tetra Laval Holdings & Finance, Sa Sterile tank venting system for a filling machine
JP2002511133A (ja) * 1997-04-22 2002-04-09 日本エア・リキード株式会社 ガス供給設備
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
JP4235759B2 (ja) 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
US7013916B1 (en) 1997-11-14 2006-03-21 Air Products And Chemicals, Inc. Sub-atmospheric gas delivery method and apparatus
GB9724168D0 (en) * 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
US6158454A (en) * 1998-04-14 2000-12-12 Insync Systems, Inc. Sieve like structure for fluid flow through structural arrangement
US6345642B1 (en) * 1999-02-19 2002-02-12 Applied Materials, Inc. Method and apparatus for removing processing liquid from a processing liquid path
JP2000271471A (ja) * 1999-03-24 2000-10-03 Nippon M K S Kk 液体ソース供給システム及びその洗浄方法、気化器
FR2794844B1 (fr) * 1999-06-08 2001-08-03 Air Liquide Procede et dispositif de mise en gaz d'une ligne de distribution de gaz corrosif
US6302139B1 (en) * 1999-07-16 2001-10-16 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6691728B2 (en) 2000-10-10 2004-02-17 Sempra Fiber Links Methods and systems for installing a pipeline within a pipeline
US6691734B2 (en) 2000-10-10 2004-02-17 Sempra Fiber Links Methods and systems for installing cable and conduit in pipelines
US6736156B2 (en) * 2000-10-10 2004-05-18 Sempra Fiber Links Method and system for installing cable in pressurized pipelines
JP2003014193A (ja) * 2001-06-27 2003-01-15 Nec Corp シリンダキャビネット及びその配管内の残留ガスのパージ方法
US20090001524A1 (en) * 2001-11-26 2009-01-01 Siegele Stephen H Generation and distribution of a fluorine gas
US20040037768A1 (en) * 2001-11-26 2004-02-26 Robert Jackson Method and system for on-site generation and distribution of a process gas
US7051749B2 (en) * 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
US7044147B2 (en) * 2004-03-15 2006-05-16 Atmel Corporation System, apparatus and method for contaminant reduction in semiconductor device fabrication equipment components
US7163036B2 (en) * 2004-12-22 2007-01-16 The Boc Group Plc Method of supplying fluorine
US7264013B2 (en) * 2005-05-13 2007-09-04 Air Products And Chemicals, Inc. Enhanced purge effect in gas conduit
US7439558B2 (en) 2005-11-04 2008-10-21 Atmel Corporation Method and system for controlled oxygen incorporation in compound semiconductor films for device performance enhancement
US7651919B2 (en) * 2005-11-04 2010-01-26 Atmel Corporation Bandgap and recombination engineered emitter layers for SiGe HBT performance optimization
US20070102729A1 (en) * 2005-11-04 2007-05-10 Enicks Darwin G Method and system for providing a heterojunction bipolar transistor having SiGe extensions
US7300849B2 (en) * 2005-11-04 2007-11-27 Atmel Corporation Bandgap engineered mono-crystalline silicon cap layers for SiGe HBT performance enhancement
EP1979041A4 (en) 2006-01-12 2013-03-27 St Jude Medical IMPLANTABLE SENSOR CABLE
US7789961B2 (en) 2007-01-08 2010-09-07 Eastman Kodak Company Delivery device comprising gas diffuser for thin film deposition
CN102747338A (zh) * 2011-04-18 2012-10-24 北大方正集团有限公司 一种气体传输管路和二氧化硅沉积装置
CN111189965A (zh) * 2018-11-14 2020-05-22 中国石油化工股份有限公司 快速评价硫化氢清除剂性能的装置
CA3159830A1 (en) 2020-09-02 2022-03-10 Douglas A. Sahm Vacuum-enabled fluid apparatus and methods

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2872397A (en) * 1955-01-10 1959-02-03 Union Carbide Corp Method and apparatus for producing ozone-carrier gas mixture
US3029575A (en) * 1958-11-03 1962-04-17 Exxon Research Engineering Co Chlorine separation process
US3226914A (en) * 1962-09-04 1966-01-04 Union Carbide Corp Pressure cycle for molecular sieve separation of normal paraffins from hydrocarbon mixtures
US3279153A (en) * 1963-07-08 1966-10-18 Chemical Projects Ltd Process for the separation of gases by adsorption
US4169486A (en) * 1977-05-06 1979-10-02 Gray William M Gas supply system with purge means
US4305734A (en) * 1979-09-19 1981-12-15 Mcgill Incorporated Recovery of hydrocarbon components from a hydrocarbon-carrier gas mixture
US4383547A (en) * 1981-03-27 1983-05-17 Valin Corporation Purging apparatus
US4539020A (en) * 1983-07-10 1985-09-03 Kawasaki Steel Corporation Methods for obtaining high-purity carbon monoxide
US4640221A (en) * 1985-10-30 1987-02-03 International Business Machines Corporation Vacuum deposition system with improved mass flow control
US4699805A (en) * 1986-07-03 1987-10-13 Motorola Inc. Process and apparatus for the low pressure chemical vapor deposition of thin films
IT1198290B (it) * 1986-12-02 1988-12-21 Sgs Microelettronica Spa Metodo di decontaminazione di una camera utilizzata nei processi sotto vuoto di deposizione,attacco o crescita di films di elevata purezza,di particolare applicazione nella tecnologia dei semiconduttori
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
DE3725358A1 (de) * 1987-07-30 1989-02-09 Telog Systems Gmbh Vorrichtung und verfahren zur oberflaechenbehandlung von materialien
JP2602880B2 (ja) * 1988-03-05 1997-04-23 忠弘 大見 シリンダーキャビネット配管装置
JPH0644986B2 (ja) * 1988-05-08 1994-06-15 忠弘 大見 プロセスガス供給配管装置
DE68918365T2 (de) * 1988-07-20 1995-05-04 Hashimoto Chemical Ind Co Metallischer Werkstoff mit durch Fluorierung passiviertem Film und aus dem metallischen Werkstoff bestehende Anlage.
EP0382985A1 (en) * 1989-02-13 1990-08-22 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Gas purge system

Also Published As

Publication number Publication date
EP0473040A1 (en) 1992-03-04
DE69113929D1 (de) 1995-11-23
EP0473040B1 (en) 1995-10-18
DE69113929T2 (de) 1996-04-11
US5137047A (en) 1992-08-11

Similar Documents

Publication Publication Date Title
ES2080867T3 (es) Suministro de gas reactivo desde un tampon de gas hasta una herramienta de proceso.
YU126291A (sh) Substituisani azoli, postopek za njihovo pripravo i njihova uporaba
NO20034931L (no) Substituerte 2-pyridin-cykloheksan-1,4-diaminderivater
DE69006143D1 (de) Hochdruckgaszufuhrsystem.
MX9800819A (es) Aparato para acoplar un transmisor al fluido del proceso.
NO922566L (no) Implantasjonsmateriale som gir naer vaskularisering
FI943550A0 (fi) Suihkujäädytetty nabumetoni
ES2097802T3 (es) Solucion tampon de histidina para dialisis peritoneal.
AR240758A1 (es) Un dispositivo para empalme rapido,estanco,de tubos
NO934628L (no) Retrovirus-protease-inhibitorer
AU661583B2 (en) Alkyl hydroxyalkyl cellulose ethers containing sulfoalkyl groups
AU613228B2 (en) A new antibiotic, mersacidin, a process for the preparation thereof and the use thereof as a pharmaceutical
FR2652426B1 (fr) Detendeur de bouteille de gaz.
EP0255003A3 (en) Automatic gas distributing device, for supplying a pipe with gas from an alternative gas source, controlled by the direct application of high gas pressure of the source
FI982720A0 (fi) Menetelmä ja laitteisto näytteen siirtämiseksi näyteastiaan
DK0605483T3 (da) Drivmiddel for aerosoler og doseringsaerosoler
AU1887692A (en) Process for immobilizing heavy metals in the soil
IT1231495B (it) Regolatore di pressione per gas operante pneumaticamente.
SE8002414L (sv) Tandlekarpulpet
FR2651563B1 (fr) Dispositif d'aspiration de gaz.
FI912928L (fi) Gasledningssystem.
ES2013025A6 (es) Un metodo para preparar 24r-escimnol.
FI905887A0 (fi) Putki maanalaisten putkijohtojen uudelleenvuoraamiseksi
JPS57130158A (en) Device for generating list of operation state of information processing device group
ATE144233T1 (de) Verformbare deponiemasse

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 473040

Country of ref document: ES