ES2093618T3 - Sistema de capa protectora revelable en seco. - Google Patents

Sistema de capa protectora revelable en seco.

Info

Publication number
ES2093618T3
ES2093618T3 ES90106831T ES90106831T ES2093618T3 ES 2093618 T3 ES2093618 T3 ES 2093618T3 ES 90106831 T ES90106831 T ES 90106831T ES 90106831 T ES90106831 T ES 90106831T ES 2093618 T3 ES2093618 T3 ES 2093618T3
Authority
ES
Spain
Prior art keywords
dry
revelable
protective coat
coat system
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90106831T
Other languages
English (en)
Inventor
Recai Dr-Ing Sezi
Rainer Dr Rer Nat Leuschner
Michael Dr Rer Nat Sebald
Siegfried Dr Rer Nat Birkle
Hellmut Dr Ahne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of ES2093618T3 publication Critical patent/ES2093618T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/265—Selective reaction with inorganic or organometallic reagents after image-wise exposure, e.g. silylation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Silicon Polymers (AREA)

Abstract

SE PROPONE UN SISTEMA RESISTENTE ESTRUCTURABLE PARA UN PROCEDIMIENTO DE REVELADO EN SECO EN EL QUE UNA CAPA FOTOSENSIBLE GENERA UN IMAGEN LATENTE, QUE SE REFUERZA CON UN TRATAMIENTO, POR EJEMPLO, CON UN COMPUESTO ORGANICO DE SILICIO, AL MISMO TIEMPO QUE SE INCREMENTA SU RESISTENCIA A UN PLASMA DE OXIGENO. LA CAPA FOTOSENSIBLE POSEE CON PREFERENCIA GRUPOS ANHIDRIDO O EPOXIDO, QUE SE PRESTEN PARA REACCIONAR CON LOS GRUPOS FUNCIONALES DE LOS COMPUESTOS ORGANICOS DE SILICIO. EL TRATAMIENTO SE PUEDE REALIZAR CON UNA SOLUCION O EMULSION EN APARATOS SENCILLOS O EN FASE GASEOSA.
ES90106831T 1989-04-24 1990-04-10 Sistema de capa protectora revelable en seco. Expired - Lifetime ES2093618T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3913434A DE3913434A1 (de) 1989-04-24 1989-04-24 Trockenwickelbares resistsystem

Publications (1)

Publication Number Publication Date
ES2093618T3 true ES2093618T3 (es) 1997-01-01

Family

ID=6379328

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90106831T Expired - Lifetime ES2093618T3 (es) 1989-04-24 1990-04-10 Sistema de capa protectora revelable en seco.

Country Status (4)

Country Link
EP (1) EP0394740B1 (es)
JP (1) JP2954274B2 (es)
DE (2) DE3913434A1 (es)
ES (1) ES2093618T3 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0451311B1 (de) * 1990-04-12 1999-03-10 Siemens Aktiengesellschaft Verfahren zur Erzeugung einer Resiststruktur
EP0453610B1 (de) * 1990-04-27 1996-06-26 Siemens Aktiengesellschaft Verfahren zur Erzeugung einer Resiststruktur
JP2603148B2 (ja) * 1990-06-08 1997-04-23 三菱電機株式会社 パターン形成方法
DE4040117C2 (de) * 1990-12-13 1994-02-17 Fotochem Werke Gmbh Stahlenempfindliches Material für die Elektronenstrahl- und Röntgenstrahllithographie und Verfahren zur Trockenentwicklung des Materials
ES2076450T3 (es) * 1990-12-20 1995-11-01 Siemens Ag Polimeros mixtos.
EP0492253B1 (de) * 1990-12-20 1997-04-23 Siemens Aktiengesellschaft Photostrukturierungsverfahren
EP0492256B1 (de) * 1990-12-20 1996-08-14 Siemens Aktiengesellschaft Photolithographische Strukturerzeugung
JP3467372B2 (ja) * 1997-02-25 2003-11-17 松下電器産業株式会社 パターン形成方法及び半導体処理方法
EP0957399B1 (de) * 1998-04-24 2004-02-18 Infineon Technologies AG Strahlungsempfindliches Gemisch und dessen Verwendung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2726813C2 (de) * 1976-06-17 1984-02-23 Motorola, Inc., 60196 Schaumburg, Ill. Verfahren zur Herstellung eines mit einem Muster versehenen Substrats
GB2121197A (en) * 1982-05-26 1983-12-14 Philips Electronic Associated Plasma-etch resistant mask formation
CA1248402A (en) * 1983-09-16 1989-01-10 Larry E. Stillwagon Method of making articles using gas functionalized plasma developed layer
US4613398A (en) * 1985-06-06 1986-09-23 International Business Machines Corporation Formation of etch-resistant resists through preferential permeation
US4751170A (en) * 1985-07-26 1988-06-14 Nippon Telegraph And Telephone Corporation Silylation method onto surface of polymer membrane and pattern formation process by the utilization of silylation method
US4737425A (en) * 1986-06-10 1988-04-12 International Business Machines Corporation Patterned resist and process

Also Published As

Publication number Publication date
EP0394740B1 (de) 1996-11-13
EP0394740A3 (de) 1991-10-09
EP0394740A2 (de) 1990-10-31
DE3913434A1 (de) 1990-10-25
DE59010562D1 (de) 1996-12-19
JPH02309360A (ja) 1990-12-25
JP2954274B2 (ja) 1999-09-27

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