ES2099991T3 - Procedimiento de fabricacion de una microbomba. - Google Patents

Procedimiento de fabricacion de una microbomba.

Info

Publication number
ES2099991T3
ES2099991T3 ES94107419T ES94107419T ES2099991T3 ES 2099991 T3 ES2099991 T3 ES 2099991T3 ES 94107419 T ES94107419 T ES 94107419T ES 94107419 T ES94107419 T ES 94107419T ES 2099991 T3 ES2099991 T3 ES 2099991T3
Authority
ES
Spain
Prior art keywords
micropump
oxidize
platelet
manufacturing procedure
protective coat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94107419T
Other languages
English (en)
Inventor
Rooij Nicolaas Frans De
Sylvain Jeanneret
Volker Gass
Der Schoot Bart Van
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FONDATION POUR LE SOUTIEN A LA
Original Assignee
FONDATION POUR LE SOUTIEN A LA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FONDATION POUR LE SOUTIEN A LA filed Critical FONDATION POUR LE SOUTIEN A LA
Application granted granted Critical
Publication of ES2099991T3 publication Critical patent/ES2099991T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Micromachines (AREA)
  • External Artificial Organs (AREA)
  • Weting (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Lubricants (AREA)

Abstract

ESTE PROCEDIMIENTO CONSISTE EN FABRICAR POR OPERACIONES DE OXIDACION SELECTIVA Y DE FOTOLITOGRAFIA UNA PLAQUETA DE SILICIO (4) PARA FORMAR EN ELLA AL MENOS UNA CAVIDAD (7, 12) DESTINADA A CONTENER O A TRANSPORTAR EL FLUIDO Y A OXIDAR LA PARED DE LA CAVIDAD PARA HACERLA HIDROFILA. SE TERMINA EL DISPOSITIVO SUJETANDO PLACAS DE CIERRE (1, 5) CONTRA EL CUERPO ASI FORMADO. PREVIAMENTE A LAS OPERACIONES DE MECANIZADO, SE RECUBREN LAS SUPERFICIES DE LA PLAQUETA (4) QUE SE PONDRAN EN CONTACTO CON LAS PLACAS DE CIERRE (1, 5) CON UNA CAPA PROTECTORA RESISTENTE A ESTAS OPERACIONES DE MECANIZADO. A CONTINUACION, SE ELIMINA LA CAPA PROTECTORA Y SE FIJAN LAS PLACAS DE CIERRE CONTRA LA PLAQUETA. SE APLICA PRINCIPALMENTE EN LAS MICROBOMBAS.
ES94107419T 1993-05-24 1994-05-13 Procedimiento de fabricacion de una microbomba. Expired - Lifetime ES2099991T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Publications (1)

Publication Number Publication Date
ES2099991T3 true ES2099991T3 (es) 1997-06-01

Family

ID=9447460

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94107419T Expired - Lifetime ES2099991T3 (es) 1993-05-24 1994-05-13 Procedimiento de fabricacion de una microbomba.

Country Status (9)

Country Link
US (1) US5462839A (es)
EP (1) EP0641934B1 (es)
JP (1) JP3651809B2 (es)
AT (1) ATE146853T1 (es)
DE (1) DE69401250T2 (es)
DK (1) DK0641934T3 (es)
ES (1) ES2099991T3 (es)
FR (1) FR2705693B1 (es)
SG (1) SG47036A1 (es)

Families Citing this family (35)

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US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US6281560B1 (en) 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5879632A (en) * 1996-04-09 1999-03-09 Sarnoff Corporation Apportioning system
US6331275B1 (en) 1996-07-08 2001-12-18 Burstein Technologies, Inc. Spatially addressable, cleavable reflective signal elements, assay device and method
US6342349B1 (en) 1996-07-08 2002-01-29 Burstein Technologies, Inc. Optical disk-based assay devices and methods
US20050214827A1 (en) * 1996-07-08 2005-09-29 Burstein Technologies, Inc. Assay device and method
WO1998001533A1 (en) 1996-07-08 1998-01-15 Burstein Laboratories, Inc. Cleavable signal element device and method
DE19705910C1 (de) * 1997-02-15 1998-06-18 Inst Physikalische Hochtech Ev Mikrokammerarray mit hoher Kammerdichte
DE19719861A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DK0923957T3 (da) 1997-11-19 2002-02-18 Microflow Eng Sa Dyseemne og væskedråbesprøjteindretning til en inhalator egnet til respirationsterapi
CA2338401A1 (en) * 1998-07-21 2000-02-03 Burstein Laboratories, Inc Optical disc-based assay devices and methods
ATE344108T1 (de) 1998-12-01 2006-11-15 Microflow Eng Sa Inhalator mit ultraschallzerstäuber dessen sprühöffnungen den maximalamplituden eines stehenden wellenmusters überlagert sind
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6827866B1 (en) * 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
AU2002227181A1 (en) * 2000-11-16 2002-05-27 Burstein Technologies, Inc. Optical biodiscs with reflective layers
WO2002044695A1 (en) * 2000-11-16 2002-06-06 Burstein Technologies, Inc. Methods and apparatus for detecting and quantifying lymphocytes with optical biodiscs
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
EP1236517A1 (en) * 2001-02-23 2002-09-04 Microflow Engineering SA Method of manufacturing a liquid droplet spray device and such spray device
US7141416B2 (en) * 2001-07-12 2006-11-28 Burstein Technologies, Inc. Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith
WO2003021222A2 (en) * 2001-08-31 2003-03-13 Burstein Technologies, Inc. Capture layer assemblies for cellular assays including related optical analysis discs and methods
EP1423699A4 (en) * 2001-09-07 2006-01-18 Burstein Technologies Inc CELLULAR MORPHOLOGY BASED IDENTIFICATION AND QUANTIFICATION OF WHITE BLOOD CELL TYPES USING OPTICAL BIO-DISC SYSTEMS
US20050003459A1 (en) * 2002-01-30 2005-01-06 Krutzik Siegfried Richard Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents
US20050023765A1 (en) * 2002-01-31 2005-02-03 Coombs James Howard Bio-safety features for optical analysis disc and disc system including same
US20040241381A1 (en) * 2002-01-31 2004-12-02 Chen Yihfar Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs
US20070274863A1 (en) * 2003-07-25 2007-11-29 Horacio Kido Fluidic circuits for sample preparation including bio-discs and methods relating thereto
US7723899B2 (en) 2004-02-03 2010-05-25 S.C. Johnson & Son, Inc. Active material and light emitting device
US7538473B2 (en) * 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
EP1792662A1 (en) 2005-11-30 2007-06-06 Microflow Engineering SA Volatile liquid droplet dispenser device
TWI580878B (zh) * 2016-07-19 2017-05-01 科際精密股份有限公司 單向閥組件
CN112016805B (zh) * 2020-07-23 2023-06-06 上海工程技术大学 一种磁流变液性能评价方法及系统
WO2025242139A1 (zh) * 2024-05-22 2025-11-27 苏州原位芯片科技有限责任公司 一种mems微阀及微泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
US5224843A (en) * 1989-06-14 1993-07-06 Westonbridge International Ltd. Two valve micropump with improved outlet
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
KR910012538A (ko) * 1989-12-27 1991-08-08 야마무라 가쯔미 마이크로 펌프 및 그 제조 방법
EP0465229B1 (en) * 1990-07-02 1994-12-28 Seiko Epson Corporation Micropump and process for manufacturing a micropump

Also Published As

Publication number Publication date
DE69401250D1 (de) 1997-02-06
DE69401250T2 (de) 1997-07-10
EP0641934A1 (fr) 1995-03-08
FR2705693B1 (fr) 1995-07-28
ATE146853T1 (de) 1997-01-15
SG47036A1 (en) 1998-03-20
HK1006739A1 (en) 1999-03-12
US5462839A (en) 1995-10-31
JP3651809B2 (ja) 2005-05-25
EP0641934B1 (fr) 1996-12-27
FR2705693A1 (fr) 1994-12-02
DK0641934T3 (da) 1997-10-13
JPH0719170A (ja) 1995-01-20

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