ES2104681T3 - Procedimiento y dispositivo de interconexion de circuitos integrados en tres dimensiones. - Google Patents

Procedimiento y dispositivo de interconexion de circuitos integrados en tres dimensiones.

Info

Publication number
ES2104681T3
ES2104681T3 ES91403307T ES91403307T ES2104681T3 ES 2104681 T3 ES2104681 T3 ES 2104681T3 ES 91403307 T ES91403307 T ES 91403307T ES 91403307 T ES91403307 T ES 91403307T ES 2104681 T3 ES2104681 T3 ES 2104681T3
Authority
ES
Spain
Prior art keywords
interconnection
plates
dimensions
procedure
integrated circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91403307T
Other languages
English (en)
Inventor
Michel Leroy
Christian Val
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Application granted granted Critical
Publication of ES2104681T3 publication Critical patent/ES2104681T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/834Interconnections on sidewalls of chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • H10W90/22Configurations of stacked chips the stacked chips being on both top and bottom sides of a package substrate, interposer or RDL

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Turning (AREA)
  • Numerical Control (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Wire Bonding (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

LA PRESENTE INVENCION SE REFIERE A UN PROCESO Y UN DISPOSITIVO PARA LA INTERCONEXION DE PLACAS SEMICONDUCTORAS APILADAS, CONTENIENDO CADA UNA DE LAS PLACAS UN CIRCUITO INTEGRADO. POR ESTE PROPOSITO, LAS PLACAS SEMICONDUCTORAS (P) ESTAN APILADAS Y HECHAS SOLIDARIAS UNAS DE OTRAS. EN UN MODO DE REALIZACION, SUS BORNES DE CONEXION ESTAN CADA UNO CONECTADOS MEDIANTE UN HILO (F) A UNA CARA CUALQUIERA DEL APILAMIENTO SALVO UNA (B), DESTINADA A ESTAR EN CONTACTO CON UN CIRCUITO IMPRESO. LA CONEXION DE LAS PLACAS ENTRE SI Y DE ESTAS ULTIMAS CON EL CIRCUITO IMPRESO, SE REALIZA SOBRE LAS CARAS (F SUB V, F SUB S, F SUB L) DEL APILAMIENTO.
ES91403307T 1990-12-11 1991-12-06 Procedimiento y dispositivo de interconexion de circuitos integrados en tres dimensiones. Expired - Lifetime ES2104681T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9015473A FR2670323B1 (fr) 1990-12-11 1990-12-11 Procede et dispositif d'interconnexion de circuits integres en trois dimensions.

Publications (1)

Publication Number Publication Date
ES2104681T3 true ES2104681T3 (es) 1997-10-16

Family

ID=9403101

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91403307T Expired - Lifetime ES2104681T3 (es) 1990-12-11 1991-12-06 Procedimiento y dispositivo de interconexion de circuitos integrados en tres dimensiones.

Country Status (7)

Country Link
EP (1) EP0490739B1 (es)
JP (1) JP3415621B2 (es)
KR (1) KR920704344A (es)
DE (1) DE69126599T2 (es)
ES (1) ES2104681T3 (es)
FR (1) FR2670323B1 (es)
WO (1) WO1992010853A1 (es)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5847448A (en) * 1990-12-11 1998-12-08 Thomson-Csf Method and device for interconnecting integrated circuits in three dimensions
FR2688629A1 (fr) * 1992-03-10 1993-09-17 Thomson Csf Procede et dispositif d'encapsulation en trois dimensions de pastilles semi-conductrices.
FR2688630B1 (fr) * 1992-03-13 2001-08-10 Thomson Csf Procede et dispositif d'interconnexion en trois dimensions de boitiers de composants electroniques.
HUT73312A (en) * 1992-09-14 1996-07-29 Badehi Method and apparatus for producing integrated circuit devices, and integrated circuit device
FR2696871B1 (fr) * 1992-10-13 1994-11-18 Thomson Csf Procédé d'interconnexion 3D de boîtiers de composants électroniques, et composants 3D en résultant.
IL106892A0 (en) * 1993-09-02 1993-12-28 Pierre Badehi Methods and apparatus for producing integrated circuit devices
IL108359A (en) * 1994-01-17 2001-04-30 Shellcase Ltd Method and apparatus for producing integrated circuit devices
US5675180A (en) 1994-06-23 1997-10-07 Cubic Memory, Inc. Vertical interconnect process for silicon segments
US6255726B1 (en) 1994-06-23 2001-07-03 Cubic Memory, Inc. Vertical interconnect process for silicon segments with dielectric isolation
US6124633A (en) * 1994-06-23 2000-09-26 Cubic Memory Vertical interconnect process for silicon segments with thermally conductive epoxy preform
US6080596A (en) * 1994-06-23 2000-06-27 Cubic Memory Inc. Method for forming vertical interconnect process for silicon segments with dielectric isolation
US5891761A (en) * 1994-06-23 1999-04-06 Cubic Memory, Inc. Method for forming vertical interconnect process for silicon segments with thermally conductive epoxy preform
US6486528B1 (en) 1994-06-23 2002-11-26 Vertical Circuits, Inc. Silicon segment programming apparatus and three terminal fuse configuration
US6117707A (en) * 1994-07-13 2000-09-12 Shellcase Ltd. Methods of producing integrated circuit devices
US6624505B2 (en) 1998-02-06 2003-09-23 Shellcase, Ltd. Packaged integrated circuits and methods of producing thereof
IL123207A0 (en) 1998-02-06 1998-09-24 Shellcase Ltd Integrated circuit device
FR2785452B1 (fr) * 1998-11-03 2003-06-13 Tda Armements Sas Procede de realisation de recepteurs d'ondes radioelectriques par interconnexion de circuits integres en trois dimensions
FR2802706B1 (fr) 1999-12-15 2002-03-01 3D Plus Sa Procede et dispositif d'interconnexion en trois dimensions de composants electroniques
AU2002216352A1 (en) 2000-12-21 2002-07-01 Shellcase Ltd. Packaged integrated circuits and methods of producing thereof
US7033664B2 (en) 2002-10-22 2006-04-25 Tessera Technologies Hungary Kft Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby
US7566853B2 (en) 2005-08-12 2009-07-28 Tessera, Inc. Image sensor employing a plurality of photodetector arrays and/or rear-illuminated architecture
RU2336595C2 (ru) * 2006-09-01 2008-10-20 Александр Иванович Завадский Способ изготовления объемных мини-модулей для радиоэлектронной аппаратуры
WO2010026527A2 (en) 2008-09-08 2010-03-11 Koninklijke Philips Electronics N.V. Radiation detector with a stack of converter plates and interconnect layers
FR2940521B1 (fr) 2008-12-19 2011-11-11 3D Plus Procede de fabrication collective de modules electroniques pour montage en surface
EP2202789A1 (en) * 2008-12-24 2010-06-30 Nxp B.V. Stack of molded integrated circuit dies with side surface contact tracks
JP5264640B2 (ja) * 2009-07-24 2013-08-14 新光電気工業株式会社 積層型半導体装置及びその製造方法
RU2460171C2 (ru) * 2010-08-23 2012-08-27 Федеральное государственное унитарное предприятие Омский научно-исследовательский институт приборостроения (ФГУП ОНИИП) Объемный модуль для радиоэлектронной аппаратуры
DE102016104626A1 (de) 2015-03-16 2016-09-22 Jtekt Corporation Spindelvorrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3746934A (en) * 1971-05-06 1973-07-17 Siemens Ag Stack arrangement of semiconductor chips
DE2919998A1 (de) * 1979-05-17 1980-11-27 Siemens Ag Befestigen der anschlussdraehte von halbleitersystemen auf den traegerelementen
FR2645681B1 (fr) * 1989-04-07 1994-04-08 Thomson Csf Dispositif d'interconnexion verticale de pastilles de circuits integres et son procede de fabrication

Also Published As

Publication number Publication date
FR2670323A1 (fr) 1992-06-12
DE69126599T2 (de) 1997-10-02
EP0490739B1 (fr) 1997-06-18
JPH05505067A (ja) 1993-07-29
KR920704344A (ko) 1992-12-19
WO1992010853A1 (fr) 1992-06-25
DE69126599D1 (de) 1997-07-24
FR2670323B1 (fr) 1997-12-12
JP3415621B2 (ja) 2003-06-09
EP0490739A1 (fr) 1992-06-17

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