ES2111302T3 - Elemento de memoria biestable. - Google Patents

Elemento de memoria biestable.

Info

Publication number
ES2111302T3
ES2111302T3 ES94914474T ES94914474T ES2111302T3 ES 2111302 T3 ES2111302 T3 ES 2111302T3 ES 94914474 T ES94914474 T ES 94914474T ES 94914474 T ES94914474 T ES 94914474T ES 2111302 T3 ES2111302 T3 ES 2111302T3
Authority
ES
Spain
Prior art keywords
contact
switch bridge
memory element
bistable memory
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94914474T
Other languages
English (en)
Inventor
Charles Gordon Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cavendish Kinetics Ltd
Original Assignee
Cavendish Kinetics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cavendish Kinetics Ltd filed Critical Cavendish Kinetics Ltd
Application granted granted Critical
Publication of ES2111302T3 publication Critical patent/ES2111302T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/50Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using actuation of electric contacts to store the information
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C23/00Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/12Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20Bridging contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/64Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00Contacts
    • H01H1/0036Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0036Movable armature with higher resonant frequency for faster switching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Memories (AREA)

Abstract

ELEMENTO DE MEMORIA BI-ESTABLE (1) COMPUESTO DE UN CONTACTO BASE (3), Y UN CONTACTO DE PUENTE DE INTERRUPTOR (8), AMBOS HECHOS DE UN MATERIAL CONDUCTOR ELECTRICO. EL CONTACTO DE PUENTE DE INTERRUPTOR (8) ESTA DIMENSIONADO DE MODO QUE TENGA DOS POSICIONES ESTABLES, EN UNA DE LA CUALES EL CONTACTO DE PUENTE DE INTERRUPTOR (8) ESTA EN CONTACTO CON EL CONTACTO BASE (3), Y EN LA OTRA EL CONTACTO DE PUENTE DE INTERRUPTOR (8) ESTA SEPARADO DEL CONTACTO BASE (3). UNOS DISPOSITIVOS DEFLECTORES (5) DESVIAN EL CONTACTO DE PUENTE DE INTERRUPTOR (8) DE UNA POSICION ESTABLE A LA OTRA.
ES94914474T 1993-05-06 1994-05-06 Elemento de memoria biestable. Expired - Lifetime ES2111302T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB939309327A GB9309327D0 (en) 1993-05-06 1993-05-06 Bi-stable memory element

Publications (1)

Publication Number Publication Date
ES2111302T3 true ES2111302T3 (es) 1998-03-01

Family

ID=10735025

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94914474T Expired - Lifetime ES2111302T3 (es) 1993-05-06 1994-05-06 Elemento de memoria biestable.

Country Status (9)

Country Link
US (1) US5677823A (es)
EP (1) EP0698279B1 (es)
JP (1) JP3627108B2 (es)
AT (1) ATE160645T1 (es)
CA (1) CA2161340A1 (es)
DE (1) DE69407040T2 (es)
ES (1) ES2111302T3 (es)
GB (1) GB9309327D0 (es)
WO (1) WO1994027308A1 (es)

Families Citing this family (158)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5835336A (en) * 1996-02-29 1998-11-10 Texas Instruments Incorporated Complemetary reset scheme for micromechanical devices
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
US6188301B1 (en) * 1998-11-13 2001-02-13 General Electric Company Switching structure and method of fabrication
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch
US6211580B1 (en) * 1998-12-29 2001-04-03 Honeywell International Inc. Twin configuration for increased life time in touch mode electrostatic actuators
US6054745A (en) * 1999-01-04 2000-04-25 International Business Machines Corporation Nonvolatile memory cell using microelectromechanical device
JP2000200533A (ja) * 1999-01-07 2000-07-18 Nec Corp マイクロマシンスイッチ
US6593195B1 (en) 1999-02-01 2003-07-15 Agere Systems Inc Stable memory device that utilizes ion positioning to control state of the memory device
IT1307128B1 (it) * 1999-02-02 2001-10-29 Fiat Ricerche Dispositivo di specchio oscillante a controllo elettrostatico.
US6160230A (en) * 1999-03-01 2000-12-12 Raytheon Company Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
AU2565800A (en) * 1999-03-18 2000-10-04 Cavendish Kinetics Limited Flash memory cell having a flexible element
US6143997A (en) * 1999-06-04 2000-11-07 The Board Of Trustees Of The University Of Illinois Low actuation voltage microelectromechanical device and method of manufacture
US6229683B1 (en) 1999-06-30 2001-05-08 Mcnc High voltage micromachined electrostatic switch
US6057520A (en) * 1999-06-30 2000-05-02 Mcnc Arc resistant high voltage micromachined electrostatic switch
WO2001003208A1 (en) * 1999-07-02 2001-01-11 President And Fellows Of Harvard College Nanoscopic wire-based devices, arrays, and methods of their manufacture
US6215644B1 (en) 1999-09-09 2001-04-10 Jds Uniphase Inc. High frequency tunable capacitors
US6359374B1 (en) 1999-11-23 2002-03-19 Mcnc Miniature electrical relays using a piezoelectric thin film as an actuating element
US6373682B1 (en) 1999-12-15 2002-04-16 Mcnc Electrostatically controlled variable capacitor
US6496351B2 (en) 1999-12-15 2002-12-17 Jds Uniphase Inc. MEMS device members having portions that contact a substrate and associated methods of operating
US6229684B1 (en) 1999-12-15 2001-05-08 Jds Uniphase Inc. Variable capacitor and associated fabrication method
US6689976B1 (en) * 2002-10-08 2004-02-10 Agilent Technologies, Inc. Electrically isolated liquid metal micro-switches for integrally shielded microcircuits
WO2002001584A1 (en) 2000-06-28 2002-01-03 The Regents Of The University Of California Capacitive microelectromechanical switches
AU2001275979A1 (en) * 2000-07-18 2002-01-30 Brigham Young University Compliant apparatus and method
DE10040867A1 (de) 2000-08-21 2002-05-23 Abb Research Ltd Mikroschalter
US6485273B1 (en) 2000-09-01 2002-11-26 Mcnc Distributed MEMS electrostatic pumping devices
US6590267B1 (en) 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en) 2000-10-23 2002-04-23 Mcnc Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US6396620B1 (en) 2000-10-30 2002-05-28 Mcnc Electrostatically actuated electromagnetic radiation shutter
GB0100751D0 (en) * 2001-01-11 2001-02-21 Scient Generics Ltd Programmable tags
US6593666B1 (en) * 2001-06-20 2003-07-15 Ambient Systems, Inc. Energy conversion systems using nanometer scale assemblies and methods for using same
US6911682B2 (en) * 2001-12-28 2005-06-28 Nantero, Inc. Electromechanical three-trace junction devices
JP2003062798A (ja) * 2001-08-21 2003-03-05 Advantest Corp アクチュエータ及びスイッチ
US6919784B2 (en) 2001-10-18 2005-07-19 The Board Of Trustees Of The University Of Illinois High cycle MEMS device
US7078849B2 (en) * 2001-10-31 2006-07-18 Agilent Technologies, Inc. Longitudinal piezoelectric optical latching relay
US6717496B2 (en) 2001-11-13 2004-04-06 The Board Of Trustees Of The University Of Illinois Electromagnetic energy controlled low actuation voltage microelectromechanical switch
US6784028B2 (en) 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
EP1357571A1 (de) * 2002-04-24 2003-10-29 Abb Research Ltd. Mikro-elektromechanisches System und Verfahren zu dessen Herstellung
US7109560B2 (en) * 2002-01-18 2006-09-19 Abb Research Ltd Micro-electromechanical system and method for production thereof
US6608268B1 (en) * 2002-02-05 2003-08-19 Memtronics, A Division Of Cogent Solutions, Inc. Proximity micro-electro-mechanical system
EP1335398A1 (de) * 2002-02-11 2003-08-13 TELEFONAKTIEBOLAGET LM ERICSSON (publ) Mikroschalter
US6741767B2 (en) * 2002-03-28 2004-05-25 Agilent Technologies, Inc. Piezoelectric optical relay
US20030194170A1 (en) * 2002-04-10 2003-10-16 Wong Marvin Glenn Piezoelectric optical demultiplexing switch
US6927529B2 (en) 2002-05-02 2005-08-09 Agilent Technologies, Inc. Solid slug longitudinal piezoelectric latching relay
US6756551B2 (en) * 2002-05-09 2004-06-29 Agilent Technologies, Inc. Piezoelectrically actuated liquid metal switch
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
JP3952902B2 (ja) * 2002-08-09 2007-08-01 住友電気工業株式会社 光スイッチ、光分岐挿入装置、光伝送システム及び光スイッチの製造方法
US6850133B2 (en) * 2002-08-14 2005-02-01 Intel Corporation Electrode configuration in a MEMS switch
EP1535297B1 (en) * 2002-08-26 2008-03-05 International Business Machines Corporation Diaphragm activated micro-electromechanical switch
US6621022B1 (en) * 2002-08-29 2003-09-16 Intel Corporation Reliable opposing contact structure
US20040050674A1 (en) * 2002-09-14 2004-03-18 Rubel Paul John Mechanically bi-stable mems relay device
US6998946B2 (en) 2002-09-17 2006-02-14 The Board Of Trustees Of The University Of Illinois High cycle deflection beam MEMS devices
FR2848020B1 (fr) 2002-11-28 2005-01-07 Commissariat Energie Atomique Micro-commutateur electrostatique pour composants a faible tension d'actionnement
US7022926B2 (en) * 2002-12-12 2006-04-04 Agilent Technologies, Inc. Ultrasonically milled channel plate for a switch
US6855898B2 (en) * 2002-12-12 2005-02-15 Agilent Technologies, Inc. Ceramic channel plate for a switch
US6774324B2 (en) 2002-12-12 2004-08-10 Agilent Technologies, Inc. Switch and production thereof
US6787719B2 (en) * 2002-12-12 2004-09-07 Agilent Technologies, Inc. Switch and method for producing the same
US20040112727A1 (en) * 2002-12-12 2004-06-17 Wong Marvin Glenn Laser cut channel plate for a switch
US6743990B1 (en) 2002-12-12 2004-06-01 Agilent Technologies, Inc. Volume adjustment apparatus and method for use
US7019235B2 (en) 2003-01-13 2006-03-28 Agilent Technologies, Inc. Photoimaged channel plate for a switch
US6809277B2 (en) * 2003-01-22 2004-10-26 Agilent Technologies, Inc. Method for registering a deposited material with channel plate channels, and switch produced using same
US6747222B1 (en) 2003-02-04 2004-06-08 Agilent Technologies, Inc. Feature formation in a nonphotoimagable material and switch incorporating same
US6825429B2 (en) * 2003-03-31 2004-11-30 Agilent Technologies, Inc. Hermetic seal and controlled impedance RF connections for a liquid metal micro switch
US6876131B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay with face contact
US6740829B1 (en) 2003-04-14 2004-05-25 Agilent Technologies, Inc. Insertion-type liquid metal latching relay
US6891315B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Shear mode liquid metal switch
US6882088B2 (en) * 2003-04-14 2005-04-19 Agilent Technologies, Inc. Bending-mode latching relay
US6879088B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Insertion-type liquid metal latching relay array
US6831532B2 (en) * 2003-04-14 2004-12-14 Agilent Technologies, Inc. Push-mode latching relay
US6946776B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and apparatus for maintaining a liquid metal switch in a ready-to-switch condition
US6818844B2 (en) * 2003-04-14 2004-11-16 Agilent Technologies, Inc. Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch
US6885133B2 (en) * 2003-04-14 2005-04-26 Agilent Technologies, Inc. High frequency bending-mode latching relay
US7012354B2 (en) * 2003-04-14 2006-03-14 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch
US6798937B1 (en) 2003-04-14 2004-09-28 Agilent Technologies, Inc. Pressure actuated solid slug optical latching relay
US6903493B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Inserting-finger liquid metal relay
US6888977B2 (en) * 2003-04-14 2005-05-03 Agilent Technologies, Inc. Polymeric liquid metal optical switch
US6765161B1 (en) 2003-04-14 2004-07-20 Agilent Technologies, Inc. Method and structure for a slug caterpillar piezoelectric latching reflective optical relay
US6924443B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6891116B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Substrate with liquid electrode
US6903287B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Liquid metal optical relay
US6906271B2 (en) * 2003-04-14 2005-06-14 Agilent Technologies, Inc. Fluid-based switch
US6774325B1 (en) 2003-04-14 2004-08-10 Agilent Technologies, Inc. Reducing oxides on a switching fluid in a fluid-based switch
US6770827B1 (en) 2003-04-14 2004-08-03 Agilent Technologies, Inc. Electrical isolation of fluid-based switches
US6920259B2 (en) * 2003-04-14 2005-07-19 Agilent Technologies, Inc. Longitudinal electromagnetic latching optical relay
US6903490B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Longitudinal mode optical latching relay
US6768068B1 (en) 2003-04-14 2004-07-27 Agilent Technologies, Inc. Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch
US6925223B2 (en) * 2003-04-14 2005-08-02 Agilent Technologies, Inc. Pressure actuated optical latching relay
US6841746B2 (en) * 2003-04-14 2005-01-11 Agilent Technologies, Inc. Bent switching fluid cavity
US6903492B2 (en) * 2003-04-14 2005-06-07 Agilent Technologies, Inc. Wetting finger latching piezoelectric relay
US6876132B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric relay
US6762378B1 (en) 2003-04-14 2004-07-13 Agilent Technologies, Inc. Liquid metal, latching relay with face contact
US20040201447A1 (en) * 2003-04-14 2004-10-14 Wong Marvin Glenn Thin-film resistor device
US6870111B2 (en) * 2003-04-14 2005-03-22 Agilent Technologies, Inc. Bending mode liquid metal switch
US6956990B2 (en) * 2003-04-14 2005-10-18 Agilent Technologies, Inc. Reflecting wedge optical wavelength multiplexer/demultiplexer
US6879089B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Damped longitudinal mode optical latching relay
US6730866B1 (en) 2003-04-14 2004-05-04 Agilent Technologies, Inc. High-frequency, liquid metal, latching relay array
US7070908B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Feature formation in thick-film inks
US6838959B2 (en) * 2003-04-14 2005-01-04 Agilent Technologies, Inc. Longitudinal electromagnetic latching relay
US6794591B1 (en) 2003-04-14 2004-09-21 Agilent Technologies, Inc. Fluid-based switches
US6961487B2 (en) * 2003-04-14 2005-11-01 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal optical switch
US6876133B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Latching relay with switch bar
US6803842B1 (en) 2003-04-14 2004-10-12 Agilent Technologies, Inc. Longitudinal mode solid slug optical latching relay
US6876130B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Damped longitudinal mode latching relay
US6816641B2 (en) * 2003-04-14 2004-11-09 Agilent Technologies, Inc. Method and structure for a solid slug caterpillar piezoelectric optical relay
US6894237B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. Formation of signal paths to increase maximum signal-carrying frequency of a fluid-based switch
US7071432B2 (en) * 2003-04-14 2006-07-04 Agilent Technologies, Inc. Reduction of oxides in a fluid-based switch
US6946775B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch
US6894424B2 (en) * 2003-04-14 2005-05-17 Agilent Technologies, Inc. High frequency push-mode latching relay
US6900578B2 (en) * 2003-04-14 2005-05-31 Agilent Technologies, Inc. High frequency latching relay with bending switch bar
US7048519B2 (en) * 2003-04-14 2006-05-23 Agilent Technologies, Inc. Closed-loop piezoelectric pump
NL1023275C2 (nl) * 2003-04-25 2004-10-27 Cavendish Kinetics Ltd Werkwijze voor het vervaardigen van een micro-mechanisch element.
US6750413B1 (en) 2003-04-25 2004-06-15 Agilent Technologies, Inc. Liquid metal micro switches using patterned thick film dielectric as channels and a thin ceramic or glass cover plate
US6777630B1 (en) 2003-04-30 2004-08-17 Agilent Technologies, Inc. Liquid metal micro switches using as channels and heater cavities matching patterned thick film dielectric layers on opposing thin ceramic plates
US7095645B2 (en) * 2003-06-02 2006-08-22 Ambient Systems, Inc. Nanoelectromechanical memory cells and data storage devices
US7148579B2 (en) * 2003-06-02 2006-12-12 Ambient Systems, Inc. Energy conversion systems utilizing parallel array of automatic switches and generators
US20040238907A1 (en) * 2003-06-02 2004-12-02 Pinkerton Joseph F. Nanoelectromechanical transistors and switch systems
US7199498B2 (en) * 2003-06-02 2007-04-03 Ambient Systems, Inc. Electrical assemblies using molecular-scale electrically conductive and mechanically flexible beams and methods for application of same
US6759610B1 (en) 2003-06-05 2004-07-06 Agilent Technologies, Inc. Multi-layer assembly of stacked LIMMS devices with liquid metal vias
US6833520B1 (en) * 2003-06-16 2004-12-21 Agilent Technologies, Inc. Suspended thin-film resistor
US6759611B1 (en) 2003-06-16 2004-07-06 Agilent Technologies, Inc. Fluid-based switches and methods for producing the same
US6781074B1 (en) 2003-07-30 2004-08-24 Agilent Technologies, Inc. Preventing corrosion degradation in a fluid-based switch
US6787720B1 (en) 2003-07-31 2004-09-07 Agilent Technologies, Inc. Gettering agent and method to prevent corrosion in a fluid switch
WO2005048296A2 (en) * 2003-08-13 2005-05-26 Nantero, Inc. Nanotube-based switching elements with multiple controls and circuits made from same
FR2864526B1 (fr) * 2003-12-26 2006-10-13 Commissariat Energie Atomique Dispositif d'actionnement electrostatique
JP2007531357A (ja) * 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックcmut素子及び製造方法
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
WO2005084284A2 (en) * 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
GB0413341D0 (en) * 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
US7288970B2 (en) 2004-06-18 2007-10-30 Nantero, Inc. Integrated nanotube and field effect switching device
US7164744B2 (en) 2004-06-18 2007-01-16 Nantero, Inc. Nanotube-based logic driver circuits
US7161403B2 (en) 2004-06-18 2007-01-09 Nantero, Inc. Storage elements using nanotube switching elements
WO2007024204A2 (en) 2004-07-19 2007-03-01 Ambient Systems, Inc. Nanometer-scale electrostatic and electromagnetic motors and generators
EP1789707A2 (en) 2004-07-23 2007-05-30 AFA Controls, LLC Methods of operating microvalve assemblies and related structures and related devices
CN100373516C (zh) * 2004-09-15 2008-03-05 中国科学院上海微系统与信息技术研究所 翘曲膜结构的单刀双掷射频和微波微机械开关及制作方法
KR100773005B1 (ko) 2005-02-23 2007-11-05 인터내셔널 비지네스 머신즈 코포레이션 격벽 작동형 마이크로 전기 기계 스위치
US7479654B2 (en) 2005-05-09 2009-01-20 Nantero, Inc. Memory arrays using nanotube articles with reprogrammable resistance
JP5054936B2 (ja) * 2005-06-22 2012-10-24 パナソニック株式会社 電気機械メモリ、それを用いた電気回路及び電気機械メモリの駆動方法
WO2007012028A2 (en) * 2005-07-19 2007-01-25 Pinkerton Joseph P Heat activated nanometer-scale pump
US7612424B1 (en) 2005-07-22 2009-11-03 Northwestern University Nanoelectromechanical bistable cantilever device
US7566582B2 (en) * 2005-10-25 2009-07-28 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US20070090732A1 (en) * 2005-10-25 2007-04-26 The Charles Stark Draper Laboratory, Inc. Systems, methods and devices relating to actuatably moveable machines
US7385839B2 (en) * 2005-12-01 2008-06-10 International Business Machines Corporation Memory devices using carbon nanotube (CNT) technologies
US7336527B1 (en) 2005-12-14 2008-02-26 International Business Machines Corporation Electromechanical storage device
JP4790446B2 (ja) * 2006-03-01 2011-10-12 三菱電機株式会社 動画像復号装置及び動画像符号化装置
US7701754B1 (en) 2006-09-05 2010-04-20 National Semiconductor Corporation Multi-state electromechanical memory cell
KR100827705B1 (ko) * 2006-10-23 2008-05-07 삼성전자주식회사 비 휘발성 메모리 소자 및 그의 제조방법
WO2008124084A2 (en) * 2007-04-03 2008-10-16 Pinkerton Joseph F Nanoelectromechanical systems and methods for making the same
US8031514B2 (en) 2007-04-09 2011-10-04 Northeastern University Bistable nanoswitch
JP4334581B2 (ja) * 2007-04-27 2009-09-30 株式会社東芝 静電型アクチュエータ
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
US7969772B2 (en) * 2008-11-18 2011-06-28 Seagate Technology Llc Magnetic mechanical switch
US8957485B2 (en) 2009-01-21 2015-02-17 Cavendish Kinetics, Ltd. Fabrication of MEMS based cantilever switches by employing a split layer cantilever deposition scheme
US8289674B2 (en) * 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
CN101924542B (zh) * 2009-06-11 2012-06-13 江苏丽恒电子有限公司 电容式微机电系统开关及其制造方法
EP2270813B1 (en) 2009-06-29 2016-01-06 Taiwan Semiconductor Manufacturing Co., Ltd. Non-volatile memory
US8736404B2 (en) * 2009-10-01 2014-05-27 Cavendish Kinetics Inc. Micromechanical digital capacitor with improved RF hot switching performance and reliability
CN102201411B (zh) * 2010-03-25 2013-04-03 上海丽恒光微电子科技有限公司 叠栅非易失性快闪存储单元、存储器件及其制造方法
SG186576A1 (en) 2011-06-24 2013-01-30 Agency Science Tech & Res Memory cell and method of manufacturing a memory cell
ITTO20120224A1 (it) * 2012-03-15 2013-09-16 St Microelectronics Srl Elemento di memoria elettromeccanico integrato e memoria elettronica comprendente il medesimo

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2931954A (en) * 1956-03-14 1960-04-05 Erdco Inc Electrostatic controls and memory systems
FR2294535A1 (fr) * 1974-12-10 1976-07-09 Lewiner Jacques Perfectionnements aux dispositifs de commande du genre des relais
FR2296297A1 (fr) * 1974-12-27 1976-07-23 Thomson Csf Dispositif commutateur a commande electrique de deplacement
FR2376548A1 (fr) * 1977-01-04 1978-07-28 Thomson Csf Dispositif bistable electrostatique
FR2376549A1 (fr) * 1977-01-04 1978-07-28 Thomson Csf Systeme bistable a electrets
US4257905A (en) * 1977-09-06 1981-03-24 The United States Of America As Represented By The United States Department Of Energy Gaseous insulators for high voltage electrical equipment
GB1584914A (en) * 1978-03-02 1981-02-18 Standard Telephones Cables Ltd Semiconductor actuated switching devices
US4383195A (en) * 1980-10-24 1983-05-10 Piezo Electric Products, Inc. Piezoelectric snap actuator
DE3681927D1 (de) * 1985-01-21 1991-11-21 Nec Corp Piezoelektrische bistabile betaetigungsvorrichtung mit einem projektil das einen stoss empfaengt.
CH670914A5 (es) * 1986-09-10 1989-07-14 Landis & Gyr Ag
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
DE4205029C1 (en) * 1992-02-19 1993-02-11 Siemens Ag, 8000 Muenchen, De Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate

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GB9309327D0 (en) 1993-06-23
WO1994027308A1 (en) 1994-11-24
DE69407040T2 (de) 1998-04-16
JP3627108B2 (ja) 2005-03-09
EP0698279B1 (en) 1997-11-26
DE69407040D1 (de) 1998-01-08
ATE160645T1 (de) 1997-12-15
JPH08510350A (ja) 1996-10-29
CA2161340A1 (en) 1994-11-24
EP0698279A1 (en) 1996-02-28
US5677823A (en) 1997-10-14

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