ES2112843T3 - Captador de medida por resistencia para la deteccion de composiciones gaseosas y procedimiento para su obtencion. - Google Patents
Captador de medida por resistencia para la deteccion de composiciones gaseosas y procedimiento para su obtencion.Info
- Publication number
- ES2112843T3 ES2112843T3 ES90916710T ES90916710T ES2112843T3 ES 2112843 T3 ES2112843 T3 ES 2112843T3 ES 90916710 T ES90916710 T ES 90916710T ES 90916710 T ES90916710 T ES 90916710T ES 2112843 T3 ES2112843 T3 ES 2112843T3
- Authority
- ES
- Spain
- Prior art keywords
- resistance measurement
- procedure
- semiconductor layer
- gas
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 title abstract 4
- 239000000203 mixture Substances 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
- 238000001514 detection method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 2
- 230000032683 aging Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000002485 combustion reaction Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000005245 sintering Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
SONDA DE MEDICION DE RESISTENCIA PARA EL REGISTRO DE COMPOSICIONES DE GASES Y PROCEDIMIENTO PARA SU FABRICACION. SE PROPONE UNA SONDA DE MEDICION DE RESISTENCIA PARA EL REGISTRO DE COMPOSICIONES DE GASES, EN PARTICULAR GASES DE ESCAPE DE MOTORES DE COMBUSTION, QUE PRESENTA LA VENTAJA FRENTE A LOS SENSORES DE MEDICION DE RESISTENCIA CONOCIDOS DE SER CONSIDERABLEMENTE MAS RESISTENTE AL ENVEJECIMIENTO CON UN TIEMPO DE REACCION CORTO. ESTO SE CONSIGUE INSTALANDO O SINTERIZANDO LA CAPA DE RESISTENCIA CONFIGURADA COMO CAPA DE SEMICONDUCTORES EN LAS ESCOTADURAS O RANURAS DEL CUERPO PORTADOR DEL SENSOR PRECONFECCIONADO PREVISTAS A TAL FIN, Y APLICANDO POR ENCIMA UN ENGOBE POROSO, NO CONDUCTOR ELECTRICO O UNA ESTRUCTURA DE CAPA DE PROTECCION EN FORMA DE UNA REJILLA O RETICULA. MEDIANTE ESTAS MEDIDAS SE PERMITE EL PASO DE GAS HACIA LA CAPA DE SEMICONDUCTORES PERO, AL MISMO TIEMPO, PROTEGE A LA CAPA DE SEMICONDUCTORES DE LOS ATAQUES CORROSIVOS, EROSIVOS Y/O CAVITATIVOS DEL GAS DE ESCAPE.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3941837A DE3941837C2 (de) | 1989-12-19 | 1989-12-19 | Widerstandsmeßfühler zur Erfassung des Sauerstoffgehaltes in Gasgemischen und Verfahren zu seiner Herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2112843T3 true ES2112843T3 (es) | 1998-04-16 |
Family
ID=6395751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES90916710T Expired - Lifetime ES2112843T3 (es) | 1989-12-19 | 1990-11-24 | Captador de medida por resistencia para la deteccion de composiciones gaseosas y procedimiento para su obtencion. |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5334350A (es) |
| EP (1) | EP0506676B1 (es) |
| JP (1) | JP3102881B2 (es) |
| DE (2) | DE3941837C2 (es) |
| ES (1) | ES2112843T3 (es) |
| WO (1) | WO1991009301A1 (es) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE502094C2 (sv) * | 1991-08-16 | 1995-08-14 | Sandvik Ab | Metod för diamantbeläggning med mikrovågsplasma |
| DE4240812A1 (de) * | 1992-12-04 | 1994-06-09 | Bosch Gmbh Robert | Heizeranordnung für einen Meßfühler zur Bestimmung von Bestandteilen in Gasen |
| US5510013A (en) * | 1993-09-10 | 1996-04-23 | Robert Bosch Gmbh | Layer system for electrochemical probes |
| DE4333898C2 (de) * | 1993-10-05 | 1996-02-22 | Bosch Gmbh Robert | Meßfühler zur Erfassung von Gaszusammensetzungen |
| DE4339737C1 (de) * | 1993-11-22 | 1995-01-19 | Siemens Ag | Gassensor |
| JPH07253411A (ja) * | 1994-03-14 | 1995-10-03 | Ngk Insulators Ltd | 一酸化炭素センサ及び一酸化炭素濃度の検出方法 |
| GB9501461D0 (en) * | 1994-06-20 | 1995-03-15 | Capteur Sensors & Analysers | Detection of ozone |
| DE4445359A1 (de) * | 1994-12-20 | 1996-06-27 | Bosch Gmbh Robert | Sensor zum Nachweis von brennbaren Gasen |
| DE19606272C2 (de) * | 1996-02-21 | 2001-05-17 | Ust Umweltsensortechnik Gmbh | Halbleiter-Gassensor |
| FR2746183B1 (fr) * | 1996-03-14 | 1998-06-05 | Dispositif capteur chimique a semiconducteur et procede de formation d'un dispositif capteur chimique a semiconducteur | |
| US5795545A (en) * | 1996-05-20 | 1998-08-18 | Motorola Inc. | Integrated ceramic exhaust gas sensors |
| FR2765401B1 (fr) * | 1997-06-26 | 2001-01-05 | Motorola Semiconducteurs | Dispositif capteur, notamment chimique, et son procede de fabrication |
| DE19846487C5 (de) * | 1998-10-09 | 2004-12-30 | Basf Ag | Meßsonde für die Detektion der Momentankonzentrationen mehrerer Gasbestandteile eines Gases |
| DE19936924C1 (de) * | 1999-08-05 | 2001-06-13 | Georg Bernitz | Vorrichtung zur Hochtemperaturerfassung und Verfahren zur Herstellung derselben |
| US6634213B1 (en) * | 2000-02-18 | 2003-10-21 | Honeywell International Inc. | Permeable protective coating for a single-chip hydrogen sensor |
| US6365880B1 (en) * | 2000-12-19 | 2002-04-02 | Delphi Technologies, Inc. | Heater patterns for planar gas sensors |
| DE60239174D1 (de) * | 2001-05-31 | 2011-03-31 | Ngk Spark Plug Co | Feuchtigkeitssensor |
| US7112304B2 (en) * | 2003-04-11 | 2006-09-26 | Therm-O-Disc, Incorporated | Robust chemiresistor sensor |
| JP2005300470A (ja) * | 2004-04-15 | 2005-10-27 | Denso Corp | 積層型ガスセンサ素子の製造方法 |
| US20060211123A1 (en) * | 2005-03-18 | 2006-09-21 | Ker Eric L | Sensing element and method of making |
| DE102005016002A1 (de) * | 2005-04-07 | 2006-10-12 | Robert Bosch Gmbh | Sensormodul, insbesondere für eine Klimaanlage |
| EP1717566A1 (de) * | 2005-04-25 | 2006-11-02 | Mettler-Toledo AG | Thermoanalytischer Sensor |
| CA2666560A1 (fr) * | 2006-10-19 | 2008-04-24 | Societe De Chimie Inorganique Et Organique En Abrege "Sochinor" | Capteur de gaz emis par une combustion |
| DE102009026439A1 (de) * | 2009-05-25 | 2010-12-09 | Innovative Sensor Technology Ist Ag | Sensorelement und Verfahren zur Herstellung eines solchen |
| US9034787B2 (en) * | 2009-05-29 | 2015-05-19 | Corning Incorporated | Ceramic articles and methods of producing ceramic articles |
| DE102016107888A1 (de) * | 2016-04-28 | 2017-11-02 | Heraeus Sensor Technology Gmbh | Sensor zur Detektion elektrisch leitfähiger und/oder polarisierbarer Partikel, Sensorsystem, Verfahren zum Betreiben eines Sensors und Verwendung eines derartigen Sensors |
| EP3409467B1 (de) | 2017-05-30 | 2019-07-03 | Heraeus Nexensos GmbH | Heizer mit einem co-gesinterten mehrschichtenaufbau |
| KR102020988B1 (ko) * | 2017-09-28 | 2019-09-11 | 최홍천 | 응력을 감지하기 위한 커패시터형 저항 센서 |
| EP4086599B1 (en) * | 2021-05-06 | 2024-11-20 | TE Conectivity Smart Grid GmbH | Sensor assembly for a resistance temperature sensor element and resistance temperature sensor element |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518922A (en) * | 1978-07-26 | 1980-02-09 | Fuji Electric Co Ltd | Oxygen sensor |
| DE2908916C2 (de) * | 1979-03-07 | 1986-09-04 | Robert Bosch Gmbh, 7000 Stuttgart | Widerstandsmeßfühler zur Erfassung des Sauerstoffgehaltes in Gasen, insbesondere in Abgasen von Verbrennungsmotoren und Verfahren zur Herstellung derselben |
| US4322980A (en) * | 1979-11-08 | 1982-04-06 | Hitachi, Ltd. | Semiconductor pressure sensor having plural pressure sensitive diaphragms and method |
| JPS5766347A (en) * | 1980-10-09 | 1982-04-22 | Hitachi Ltd | Detector for mixture gas |
| JPS57184963A (en) * | 1981-05-11 | 1982-11-13 | Toyota Motor Corp | Lean sensor |
| DE3122861A1 (de) * | 1981-06-10 | 1982-12-30 | Bosch Gmbh Robert | Vorrichtung zur messung des absolutdrucks von luft |
| JPS60173461A (ja) * | 1984-02-20 | 1985-09-06 | Nissan Motor Co Ltd | 酸素センサ |
| JPS61195338A (ja) * | 1985-02-25 | 1986-08-29 | Ngk Spark Plug Co Ltd | 空燃比センサ− |
| JPH067119B2 (ja) * | 1985-06-18 | 1994-01-26 | 日本特殊陶業株式会社 | 空燃比センサ |
| US4706493A (en) * | 1985-12-13 | 1987-11-17 | General Motors Corporation | Semiconductor gas sensor having thermally isolated site |
| US4928513A (en) * | 1986-07-29 | 1990-05-29 | Sharp Kabushiki Kaisha | Sensor |
| DE3729164C2 (de) * | 1986-09-01 | 1997-09-11 | Denso Corp | Meßfühler zur Messung der Sauerstoffkonzentration in Gasen |
| JPH0810211B2 (ja) * | 1986-09-05 | 1996-01-31 | 日本碍子株式会社 | ガスセンサ及びその製造法 |
| DE3731649A1 (de) * | 1987-09-19 | 1989-03-30 | Schott Glaswerke | Verfahren zur herstellung von offenporigen sinterkoerpern |
| US4967589A (en) * | 1987-12-23 | 1990-11-06 | Ricoh Company, Ltd. | Gas detecting device |
| JP2535372B2 (ja) * | 1988-03-09 | 1996-09-18 | 日本碍子株式会社 | セラミック・ヒ―タ及び電気化学的素子並びに酸素分析装置 |
| DE3809154C1 (es) * | 1988-03-18 | 1988-12-08 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
| DE3811713A1 (de) * | 1988-04-08 | 1989-10-19 | Bosch Gmbh Robert | Planare polarographische sonde zur bestimmung des (lambda)-wertes von gasgemischen |
| DE3834987A1 (de) * | 1988-10-14 | 1990-04-19 | Bosch Gmbh Robert | Sensorelement fuer grenzstromsensoren zur bestimmung des (lambda)-wertes von gasgemischen |
| DE4004172C2 (de) * | 1989-02-14 | 1998-06-04 | Ngk Spark Plug Co | Sauerstoffsensor zur Luft-Brennstoffgemisch-Kontrolle mit einer Schutzschicht, die eine Sauerstoff einschließende Substanz umfaßt, und Verfahren zur Herstellung des Sensors |
| DE4091344C2 (de) * | 1989-08-08 | 1997-04-10 | Nippon Denso Co | Sauerstoffsensor |
| JP2786507B2 (ja) * | 1990-03-22 | 1998-08-13 | 日本碍子株式会社 | 酸素センサ |
-
1989
- 1989-12-19 DE DE3941837A patent/DE3941837C2/de not_active Expired - Fee Related
-
1990
- 1990-11-24 ES ES90916710T patent/ES2112843T3/es not_active Expired - Lifetime
- 1990-11-24 US US07/861,810 patent/US5334350A/en not_active Expired - Fee Related
- 1990-11-24 DE DE59010805T patent/DE59010805D1/de not_active Expired - Fee Related
- 1990-11-24 WO PCT/DE1990/000909 patent/WO1991009301A1/de not_active Ceased
- 1990-11-24 EP EP90916710A patent/EP0506676B1/de not_active Expired - Lifetime
- 1990-11-24 JP JP02515315A patent/JP3102881B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP3102881B2 (ja) | 2000-10-23 |
| DE3941837C2 (de) | 1994-01-13 |
| DE59010805D1 (de) | 1998-03-12 |
| US5334350A (en) | 1994-08-02 |
| EP0506676B1 (de) | 1998-02-04 |
| JPH05502719A (ja) | 1993-05-13 |
| DE3941837A1 (de) | 1991-06-20 |
| EP0506676A1 (de) | 1992-10-07 |
| WO1991009301A1 (de) | 1991-06-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG2A | Definitive protection |
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