ES2118041A1 - Placa homogeneizadora de temperatura para microdispositivos termicamente aislados. - Google Patents

Placa homogeneizadora de temperatura para microdispositivos termicamente aislados.

Info

Publication number
ES2118041A1
ES2118041A1 ES09601571A ES9601571A ES2118041A1 ES 2118041 A1 ES2118041 A1 ES 2118041A1 ES 09601571 A ES09601571 A ES 09601571A ES 9601571 A ES9601571 A ES 9601571A ES 2118041 A1 ES2118041 A1 ES 2118041A1
Authority
ES
Spain
Prior art keywords
thermally insulated
devices
homogenizing plate
temperature
temperature homogenizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES09601571A
Other languages
English (en)
Other versions
ES2118041B1 (es
Inventor
Andreas Gotz
Ballart Carles Cane
Tortades Isabel Gracia
D Ocon Emilio Lora-Tamayo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES9601571A priority Critical patent/ES2118041B1/es
Publication of ES2118041A1 publication Critical patent/ES2118041A1/es
Application granted granted Critical
Publication of ES2118041B1 publication Critical patent/ES2118041B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

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  • Measuring Temperature Or Quantity Of Heat (AREA)

Abstract

EL OBJETO DE LA PRESENTE INVENCION ES EL DESARROLLO DE UNA MICROESTRUCTURA TERMICAMENTE AISLADA CON ZONAS DE TEMPERATURA MUY HOMOGENEA Y CONTROLADA. DICHAS ESTRUCTURAS SON LA BASE DE DISTINTOS TIPOS DE SENSORES MICROELECTRONICOS YA EXISTENTES, EN LOS QUE UN CIERTO MATERIAL O ELEMENTO SENSIBLE SE DEPOSITA SOBRE UNA ESTRUCTURA TERMICA QUE DEBE TRABAJAR A UNA TEMPERATURA CONOCIDA. ES APLICABLE A SISTEMAS DE MEDIDA MICROELECTRONICA BASADOS EN MICROSENSORES DE SILICIO.
ES9601571A 1996-07-12 1996-07-12 Placa homogeneizadora de temperatura para microdispositivos termicamente aislados. Expired - Fee Related ES2118041B1 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9601571A ES2118041B1 (es) 1996-07-12 1996-07-12 Placa homogeneizadora de temperatura para microdispositivos termicamente aislados.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9601571A ES2118041B1 (es) 1996-07-12 1996-07-12 Placa homogeneizadora de temperatura para microdispositivos termicamente aislados.

Publications (2)

Publication Number Publication Date
ES2118041A1 true ES2118041A1 (es) 1998-09-01
ES2118041B1 ES2118041B1 (es) 1999-04-16

Family

ID=8295492

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9601571A Expired - Fee Related ES2118041B1 (es) 1996-07-12 1996-07-12 Placa homogeneizadora de temperatura para microdispositivos termicamente aislados.

Country Status (1)

Country Link
ES (1) ES2118041B1 (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110040678A (zh) * 2019-04-18 2019-07-23 中国科学院上海微系统与信息技术研究所 微传感器及其制备方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104817054B (zh) * 2015-05-05 2016-08-17 广州大学 微弹簧式悬臂梁自带均热板微加热器及其制备工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0291462A2 (fr) * 1987-05-12 1988-11-17 Centre Suisse D'electronique Et De Microtechnique S.A. Micro-capteur à technologie intégrée pour la détection de la présence de certains gaz
EP0421158A1 (de) * 1989-10-02 1991-04-10 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Katalytischer Gassensor und Verfahren zum Herstellen desselben
JPH0684604A (ja) * 1991-09-19 1994-03-25 Mitsuteru Kimura マイクロヒータ
WO1994010822A1 (en) * 1992-10-26 1994-05-11 THE UNITED STATES OF AMERICA as represented by THEUNITED STATES DEPARTMENT OF COMMERCE Micro-hotplate devices and methods for their fabrication
JPH0862011A (ja) * 1994-06-13 1996-03-08 Yazaki Corp 熱伝播時間計測型フローセンサとその製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0291462A2 (fr) * 1987-05-12 1988-11-17 Centre Suisse D'electronique Et De Microtechnique S.A. Micro-capteur à technologie intégrée pour la détection de la présence de certains gaz
EP0421158A1 (de) * 1989-10-02 1991-04-10 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Katalytischer Gassensor und Verfahren zum Herstellen desselben
JPH0684604A (ja) * 1991-09-19 1994-03-25 Mitsuteru Kimura マイクロヒータ
WO1994010822A1 (en) * 1992-10-26 1994-05-11 THE UNITED STATES OF AMERICA as represented by THEUNITED STATES DEPARTMENT OF COMMERCE Micro-hotplate devices and methods for their fabrication
JPH0862011A (ja) * 1994-06-13 1996-03-08 Yazaki Corp 熱伝播時間計測型フローセンサとその製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Japanese Patent Office, Tokyo, JP & JP 6084604 A (RICOH CO. LTD.) 25.03.94 * Resumen; figura * *
PATENT ABSTRACTS OF JAPAN, Japanese Patent Office, Tokyo, JP & JP 8062011 A (YAZAKI CORP.) 08.03.96 * Resumen; figura * *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110040678A (zh) * 2019-04-18 2019-07-23 中国科学院上海微系统与信息技术研究所 微传感器及其制备方法
CN110040678B (zh) * 2019-04-18 2021-06-18 中国科学院上海微系统与信息技术研究所 微传感器及其制备方法

Also Published As

Publication number Publication date
ES2118041B1 (es) 1999-04-16

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