ES2146287T3 - Calibracion de sondas de capacitancia. - Google Patents

Calibracion de sondas de capacitancia.

Info

Publication number
ES2146287T3
ES2146287T3 ES95202101T ES95202101T ES2146287T3 ES 2146287 T3 ES2146287 T3 ES 2146287T3 ES 95202101 T ES95202101 T ES 95202101T ES 95202101 T ES95202101 T ES 95202101T ES 2146287 T3 ES2146287 T3 ES 2146287T3
Authority
ES
Spain
Prior art keywords
capacitance
calibration
take
probe
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95202101T
Other languages
English (en)
Inventor
David Roberts Mcmurtry
David Kenneth Thomas
David Charles Bound
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Application granted granted Critical
Publication of ES2146287T3 publication Critical patent/ES2146287T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
    • G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

UNA SONDA DE CAPACITANCIA (26) SE UTILIZA EN UNA MAQUINA DE MEDICION DE COORDENADAS O EN UNA HERRAMIENTA PARA DETERMINAR LA DISTANCIA ENTRE LA SONDA Y UNA SUPERFICIE DE UNA PIEZA DE TRABAJO (30). PARA CALIBRARLA, SE ACERCA Y SE SEPARA DE LA SUPERFICIE, Y SE TOMA UNA SERIE DE LECTURAS DE LA CAPACITANCIA CONTRA LA DISTANCIA MOVIDA. ESTAS PUEDEN UTILIZARSE ENTONCES PARA DETERMINAR LOS VALORES DE CALIBRACION, POR EJEMPLO, UTILIZANDO UN ALGORITMO DE "MEJOR AJUSTE" CON UNA ECUACION RELATIVA A LA CAPACITANCIA A LA DISTANCIA MOVIDA. PUEDEN OBTENERSE VALORES DE CALIBRACION DIFERENTES PARA PUNTOS DIFERENTES DE LA SUPERFICIE, PARA TENER EN CUENTA LA FORMA LOCAL DIFERENTE DE CADA PUNTO.
ES95202101T 1990-10-03 1991-10-02 Calibracion de sondas de capacitancia. Expired - Lifetime ES2146287T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB909021447A GB9021447D0 (en) 1990-10-03 1990-10-03 Capacitance probes

Publications (1)

Publication Number Publication Date
ES2146287T3 true ES2146287T3 (es) 2000-08-01

Family

ID=10683129

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95202101T Expired - Lifetime ES2146287T3 (es) 1990-10-03 1991-10-02 Calibracion de sondas de capacitancia.

Country Status (7)

Country Link
US (1) US5583443A (es)
EP (2) EP0503037B1 (es)
JP (1) JP3267608B2 (es)
DE (2) DE69132243T2 (es)
ES (1) ES2146287T3 (es)
GB (1) GB9021447D0 (es)
WO (1) WO1992006350A1 (es)

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US6112423A (en) * 1999-01-15 2000-09-05 Brown & Sharpe Manufacturing Co. Apparatus and method for calibrating a probe assembly of a measuring machine
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WO2001047420A1 (en) * 1999-12-24 2001-07-05 Koninklijke Philips Electronics N.V. Electromagnetic object detector provided with an additional electrode and intended for a medical radiation apparatus
JP2001330428A (ja) * 2000-05-23 2001-11-30 Natl Inst Of Advanced Industrial Science & Technology Meti ３次元測定機の測定誤差評価方法及び３次元測定機用ゲージ
US6657780B2 (en) * 2001-02-20 2003-12-02 University Of Maryland Baltimore County Widely tunable and integrated optical system and method
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US6721675B1 (en) * 2003-01-31 2004-04-13 The Boeing Company Machine capability verification and diagnostics (CAP/DIA) system, method and computer program product
US6957154B2 (en) * 2003-02-03 2005-10-18 Qcept Technologies, Inc. Semiconductor wafer inspection system
US7308367B2 (en) * 2003-02-03 2007-12-11 Qcept Technologies, Inc. Wafer inspection system
US7103482B2 (en) * 2003-02-03 2006-09-05 Qcept Technologies, Inc. Inspection system and apparatus
US7107158B2 (en) 2003-02-03 2006-09-12 Qcept Technologies, Inc. Inspection system and apparatus
WO2005012853A1 (en) * 2003-07-25 2005-02-10 Qcept Technologies, Inc. Measurement of motions of rotating shafts using non-vibrating contact potential difference sensor
US7061245B2 (en) * 2004-02-06 2006-06-13 Snap-On Incorporated Coil-on plug capacitive sensors and passive coil-on plug diagnostic system incorporating same
JP2006297717A (ja) * 2005-04-19 2006-11-02 Sumitomo Electric Ind Ltd 樹脂製薄膜の検査方法および検査装置
US9101990B2 (en) 2006-01-23 2015-08-11 Hy-Ko Products Key duplication machine
EP1976656B1 (en) 2006-01-23 2014-10-29 Hy-Ko Products Company Key duplication machine
US7357018B2 (en) * 2006-02-10 2008-04-15 Agilent Technologies, Inc. Method for performing a measurement inside a specimen using an insertable nanoscale FET probe
JP4828316B2 (ja) 2006-06-13 2011-11-30 三菱電機株式会社 レーザ加工機用のギャップ検出装置及びレーザ加工システム並びにレーザ加工機用のギャップ検出方法
JP2008046080A (ja) * 2006-08-21 2008-02-28 Fujikura Ltd 静電容量センサ
US7659734B2 (en) * 2007-03-07 2010-02-09 Qcept Technologies, Inc. Semiconductor inspection system and apparatus utilizing a non-vibrating contact potential difference sensor and controlled illumination
US7900526B2 (en) * 2007-11-30 2011-03-08 Qcept Technologies, Inc. Defect classification utilizing data from a non-vibrating contact potential difference sensor
GB0804114D0 (en) 2008-03-05 2008-04-09 Renishaw Plc Surface sensing device
US7752000B2 (en) * 2008-05-02 2010-07-06 Qcept Technologies, Inc. Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion
GB0900878D0 (en) 2009-01-20 2009-03-04 Renishaw Plc Method for optimising a measurement cycle
CN102686348A (zh) 2009-05-01 2012-09-19 海高制品有限公司 具有槽扫描的钥匙原坯识别系统
MX2011011630A (es) 2009-05-01 2012-09-28 Hy Ko Products Sistema de identificación de llave en blanco con análisis de dientes.
JP2012137473A (ja) * 2010-12-07 2012-07-19 Kobe Steel Ltd 粗さ測定装置
WO2012099586A1 (en) * 2011-01-20 2012-07-26 Carl Zeiss Industrial Metrology, Llc Modular ceramic guideway member
RU2504730C1 (ru) * 2012-07-19 2014-01-20 Федеральное Государственное Унитарное Предприятие "Государственный научно-производственный ракетно-космический центр "ЦСКБ-Прогресс" (ФГУП "ГНПРКЦ "ЦСКБ-Прогресс") Способ контроля целостности токопроводящего покрытия на диэлектрическом материале
US10077992B2 (en) 2012-08-31 2018-09-18 United Technologies Corporation Tip clearance probe including anti-rotation feature
GB201311600D0 (en) * 2013-06-28 2013-08-14 Renishaw Plc Calibration of a contact probe
US9658047B2 (en) 2014-10-23 2017-05-23 Caterpillar Inc. Component measurement system having wavelength filtering
US9879968B2 (en) 2014-10-23 2018-01-30 Caterpillar Inc. Component measurement system having wavelength filtering
EP3051253B1 (en) * 2015-02-02 2018-08-22 Rolls-Royce North American Technologies, Inc. Multi-axis calibration block
WO2017024043A1 (en) 2015-08-03 2017-02-09 Hy-Ko Products Company High security key scanning system
WO2017072976A1 (ja) * 2015-10-30 2017-05-04 三菱電機株式会社 ワイヤ放電加工機、ワイヤ放電加工機の制御装置の制御方法及び位置決め方法
KR101875694B1 (ko) * 2016-10-17 2018-08-02 에이티아이 주식회사 레이저 커팅 장치, 파이프 센터링 장치 및 파이프 센터링 방법
CN117540679A (zh) * 2023-11-09 2024-02-09 华中科技大学 电容位移传感器敏感探头参数提取及自由度耦合计算方法

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FR2495308A1 (fr) * 1980-12-01 1982-06-04 Commissariat Energie Atomique Palpeur a pression de contact nulle pour controle de pieces
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US4814691A (en) 1985-08-09 1989-03-21 Washington Research Foundation Fringe field capacitive sensor for measuring profile of a surface
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US5189377A (en) * 1990-09-04 1993-02-23 Extrude Hone Corporation Method and apparatus for co-ordinate measuring using a capacitance probe
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US5315259A (en) * 1992-05-26 1994-05-24 Universities Research Association, Inc. Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere

Also Published As

Publication number Publication date
EP0503037A1 (en) 1992-09-16
US5583443A (en) 1996-12-10
EP0683378A3 (en) 1998-02-04
DE69132243D1 (de) 2000-07-06
JP3267608B2 (ja) 2002-03-18
GB9021447D0 (en) 1990-11-14
EP0503037B1 (en) 1996-04-24
DE69132243T2 (de) 2000-09-28
WO1992006350A1 (en) 1992-04-16
EP0683378B1 (en) 2000-05-31
DE69119057T2 (de) 1996-08-29
JPH05502948A (ja) 1993-05-20
EP0683378A2 (en) 1995-11-22
DE69119057D1 (de) 1996-05-30

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