ES2158626T3 - Sistema de alimentacion de silicio. - Google Patents

Sistema de alimentacion de silicio.

Info

Publication number
ES2158626T3
ES2158626T3 ES98103033T ES98103033T ES2158626T3 ES 2158626 T3 ES2158626 T3 ES 2158626T3 ES 98103033 T ES98103033 T ES 98103033T ES 98103033 T ES98103033 T ES 98103033T ES 2158626 T3 ES2158626 T3 ES 2158626T3
Authority
ES
Spain
Prior art keywords
feeding
rollers
environment
silicon
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98103033T
Other languages
English (en)
Inventor
Joseph R Norris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Solar Inc
Original Assignee
Ebara Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Solar Inc filed Critical Ebara Solar Inc
Application granted granted Critical
Publication of ES2158626T3 publication Critical patent/ES2158626T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

UN SISTEMA DE ALIMENTACION DE BOLAS DE SILICIO PARA UTILIZARSE CON UN HORNO DE FUSION DE SILICIO UTILIZAR PARA FORMAR UNA CAPA DE SILICIO. SE ACOPLA UN DEPOSITO QUE CONTIENE PARTICULAS DE ALIMENTACION AL EXTREMO SUPERIOR DE UN TUBO DE ALIMENTACION. EL EXTREMO INFERIOR DEL TUBO DE ALIMENTACION SE COLOCA JUNTO A UN PAR DE RODILLOS QUE GIRAN CONDUCIDOS POR UN MOTOR MEDIANTE UN ACOPLAMIENTO Y UN PAR DE ENGRANAJES. LOS RODILLOS SE MONTAN CON UN ANGULO CON RESPECTO A LA HORIZONTAL Y EL EXTREMO DE TOMA DE CORRIENTE DEL DE LA RUTA DE ALIMENTACION DEL RODILLO SE COLOCA SOBRE UN TUBO DE SUMINISTRO QUE LLEVA AL HORNO DE FUSION DE SILICIO. LOS ELEMENTOS ESTAN RODEADOS POR UN RECINTO QUE TIENE UNA SALIDA AL VACIO PARA PERMITIR AL RECINTO QUE SE VACIE A UN NIVEL DE VACIADO DE TRABAJO Y UNA ENTRADA DE GAS PARA PERMITIR QUE UN GAS INERTE ENTRE EN EL RECINTO. SE DETERMINA LA TASA DE ALIMENTACION MEDIANTE EL ANGULO DE LOS RODILLOS, LA VELOCIDAD DEL MOTOR Y LA FORMA DEL EXTREMO DEL FONDO DEL TUBO DE ALIMENTACION. LOS RODILLOS SON RESILIENTES PARA DAR UNA MEJOR SUPERFICIE DE FRICCION PARA EL FLUJO DE PARTICULAS Y PARA EVITAR QUE PARTICULAS DE ALIMENTACION QUE QUEDEN ATRAPADAS ATASQUEN EL MOTOR.
ES98103033T 1997-04-29 1998-02-20 Sistema de alimentacion de silicio. Expired - Lifetime ES2158626T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/841,245 US5997234A (en) 1997-04-29 1997-04-29 Silicon feed system

Publications (1)

Publication Number Publication Date
ES2158626T3 true ES2158626T3 (es) 2001-09-01

Family

ID=25284396

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98103033T Expired - Lifetime ES2158626T3 (es) 1997-04-29 1998-02-20 Sistema de alimentacion de silicio.

Country Status (12)

Country Link
US (1) US5997234A (es)
EP (1) EP0875606B1 (es)
JP (1) JPH10310488A (es)
KR (1) KR19980079779A (es)
CN (1) CN1093181C (es)
AU (1) AU718318B2 (es)
BR (1) BR9800795A (es)
CA (1) CA2229384C (es)
DE (1) DE69801132T2 (es)
ES (1) ES2158626T3 (es)
ID (1) ID20210A (es)
TW (1) TW369503B (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6090199A (en) * 1999-05-03 2000-07-18 Evergreen Solar, Inc. Continuous melt replenishment for crystal growth
US6454851B1 (en) * 2000-11-09 2002-09-24 Memc Electronic Materials, Inc. Method for preparing molten silicon melt from polycrystalline silicon charge
EP1556529B1 (en) 2002-10-18 2007-09-12 Evergreen Solar Inc. Method and apparatus for crystal growth
US6814802B2 (en) 2002-10-30 2004-11-09 Evergreen Solar, Inc. Method and apparatus for growing multiple crystalline ribbons from a single crucible
EP1711741B1 (en) * 2003-12-31 2011-03-30 Council Of Scientific & Industrial Research Device for feeding pulverised coal to furnace
DE102009028166A1 (de) * 2009-07-31 2011-02-03 Wacker Chemie Ag Verfahren zur Förderung von Siliciumgranulat in einer gekapselten Förderrinne
SI2591901T1 (sl) * 2011-11-14 2015-11-30 Ultrasion S.L. Postopek doziranja peletov iz umetne snovi
CN103132137A (zh) * 2013-02-25 2013-06-05 天津市环欧半导体材料技术有限公司 复投装置及利用具备该装置的设备生产直拉单晶的方法
KR101720920B1 (ko) * 2014-12-09 2017-03-28 미쯔이가가꾸가부시끼가이샤 프로필렌계 수지 조성물
CN105887192B (zh) * 2016-05-30 2020-05-12 上海超硅半导体有限公司 多晶硅料的筛选及装填坩埚的方法
CN106757348A (zh) * 2016-12-29 2017-05-31 天通银厦新材料有限公司 一种蓝宝石全自动化生产线
CN109433636B (zh) * 2018-12-17 2023-11-10 东华链条兴化有限公司 一种链板正反面认面装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2515455A (en) * 1947-06-11 1950-07-18 Martin H Lipton Uniform fuel feed for smoke generators
US3259225A (en) * 1960-02-16 1966-07-05 Henry C Lehde Marshalling apparatus
US3297130A (en) * 1964-01-13 1967-01-10 American Flange & Mfg Method and apparatus for orienting articles
AU415239B2 (en) * 1965-09-02 1971-07-20 The Colonial Sugar Refining Company Limited Method and apparatus for aligning bcd ibs
US3610391A (en) * 1970-03-20 1971-10-05 Btu Eng Corp Furnace conveyor system
US3827582A (en) * 1971-12-13 1974-08-06 G Lederer Stacking device
US4040513A (en) * 1972-11-20 1977-08-09 Lewals, Inc. Disc advancing and metering device
DE2259300C2 (de) * 1972-12-04 1984-01-05 Degussa Ag, 6000 Frankfurt Fördervorrichtung zum Transport von Förderbändern, Drahtgliedergurten oder Förderkästen in einem Wärmebehandlungsofen
FI58464C (fi) * 1979-10-30 1981-02-10 Rettig Strengberg Ab Oy Doseringsanordning foer drageformigt material saosom soetsaker eller motsvarande
US4391560A (en) * 1981-10-14 1983-07-05 Van Dam Machine Corporation Of America Lid infeed for spinning rod restacker
CA1261715A (en) * 1984-07-06 1989-09-26 General Signal Corporation Apparatus and process for growing monocrystals of semiconductor materials from shallow crucibles by czochralski technique
JPH01122988A (ja) * 1987-11-06 1989-05-16 Kawasaki Steel Corp 単結晶を成長させる方法および単結晶製造装置
FI901413A7 (fi) * 1989-03-30 1990-10-01 Nippon Kokan Kk Laite piiyksittäiskiteiden valmistamiseksi
US5178077A (en) * 1990-01-07 1993-01-12 Norris David P Apparatus and method for the removal of higher and lower volatility organic contaminants from soil
JPH03252386A (ja) * 1990-03-02 1991-11-11 Nkk Corp 単結晶製造装置
JP3060489B2 (ja) * 1990-06-15 2000-07-10 アイシン精機株式会社 機械駆動式遠心過給機
US5242667A (en) * 1991-07-26 1993-09-07 Ferrofluidics Corporation Solid pellet feeder for controlled melt replenishment in continuous crystal growing process
US5499709A (en) * 1994-04-15 1996-03-19 Alvey, Inc. Conveyor with separator/aligner

Also Published As

Publication number Publication date
EP0875606A1 (en) 1998-11-04
KR19980079779A (ko) 1998-11-25
DE69801132D1 (de) 2001-08-23
CA2229384A1 (en) 1998-10-29
US5997234A (en) 1999-12-07
CA2229384C (en) 2006-04-11
EP0875606B1 (en) 2001-07-18
AU5536698A (en) 1998-11-19
CN1197854A (zh) 1998-11-04
JPH10310488A (ja) 1998-11-24
DE69801132T2 (de) 2001-11-15
CN1093181C (zh) 2002-10-23
ID20210A (id) 1998-10-29
AU718318B2 (en) 2000-04-13
BR9800795A (pt) 1999-09-28
TW369503B (en) 1999-09-11

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