ES2158633T3 - Sistema y metodo para enfriar que emplea nieve carbonica cargada. - Google Patents
Sistema y metodo para enfriar que emplea nieve carbonica cargada.Info
- Publication number
- ES2158633T3 ES2158633T3 ES98106701T ES98106701T ES2158633T3 ES 2158633 T3 ES2158633 T3 ES 2158633T3 ES 98106701 T ES98106701 T ES 98106701T ES 98106701 T ES98106701 T ES 98106701T ES 2158633 T3 ES2158633 T3 ES 2158633T3
- Authority
- ES
- Spain
- Prior art keywords
- carbon dioxide
- snow
- cooling
- current
- matter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title abstract 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title 1
- 229910052799 carbon Inorganic materials 0.000 title 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 12
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 6
- 239000001569 carbon dioxide Substances 0.000 abstract 6
- 238000004326 stimulated echo acquisition mode for imaging Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/008—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant being carbon dioxide
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D3/00—Devices using other cold materials; Devices using cold-storage bodies
- F25D3/12—Devices using other cold materials; Devices using cold-storage bodies using solidified gases, e.g. carbon-dioxide snow
- F25D3/127—Stationary devices with conveyors carrying articles to be cooled through the cooling space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L25/00—Construction or details of pipe joints not provided for in, or of interest apart from, groups F16L13/00 - F16L23/00
- F16L25/01—Construction or details of pipe joints not provided for in, or of interest apart from, groups F16L13/00 - F16L23/00 specially adapted for realising electrical conduction between the two pipe ends of the joint or between parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Devices For Medical Bathing And Washing (AREA)
Abstract
LA INVENCION SE REFIERE A UN METODO Y UN SISTEMA QUE ACTUA ENFRIANDO MATERIA MEDIANTE LA UTILIZACION DE UNA CORRIENTE DE NIEVE/VAPOR DE DIOXIDO DE CARBONO. LA MATERIA ES SOPORTADA EN YUXTAPOSICION CON UN ORIFICIO DE SALIDA PARA LA NIEVE/VAPOR DE DIOXIDO DE CARBONO Y CON UN CONDUCTOR QUE PRESENTA UN ESTADO DE POTENCIAL DE REFERENCIA. PARA LLEVAR A CABO EL METODO, SE SOMETE UNA CORRIENTE DE DIOXIDO DE CARBONO LIQUIDO A UNA EXPANSION DE PRESION, PARA PRODUCIR UNA CORRIENTE DE NIEVE Y VAPOR DE DIOXIDO DE CARBONO. DICHA CORRIENTE ENTRA EN CONTACTO A CONTINUACION CON UNA SUPERFICIE CONDUCTORA Y ADQUIERE UNA CARGA, COMO RESULTADO DEL AJUSTE FRICCIONAL CON LA SUPERFICIE CONDUCTORA. A CONTINUACION, LA NIEVE/VAPOR DE DIOXIDO DE CARBONO ES DIRIGIDA HACIA LA MATERIA A ENFRIAR Y HACIA EL CONDUCTOR QUE PRESENTA UN POTENCIAL DE REFERENCIA. EL ESTADO DE POTENCIAL DE REFERENCIA ATRAE A LA NIEVE DE DIOXIDO DE CARBONO Y CONTRIBUYE AL CONTACTO DE LA MISMA CON LA MATERIA QUE SE ESTA ENFRIANDO.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US891761 | 1997-07-14 | ||
| US08/891,761 US5765394A (en) | 1997-07-14 | 1997-07-14 | System and method for cooling which employs charged carbon dioxide snow |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ES2158633T3 true ES2158633T3 (es) | 2001-09-01 |
| ES2158633T5 ES2158633T5 (es) | 2007-09-16 |
Family
ID=25398781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES98106701T Expired - Lifetime ES2158633T5 (es) | 1997-07-14 | 1998-04-13 | Sistema y metodo para enfriar que emplea nieve carbonica cargada. |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US5765394A (es) |
| EP (1) | EP0891944B2 (es) |
| KR (1) | KR100337970B1 (es) |
| CN (1) | CN1163712C (es) |
| AR (1) | AR012395A1 (es) |
| BR (1) | BR9801036A (es) |
| DE (1) | DE69800982T2 (es) |
| ES (1) | ES2158633T5 (es) |
| ID (1) | ID20574A (es) |
| MY (1) | MY132899A (es) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6151913A (en) * | 1999-04-23 | 2000-11-28 | Praxair Technology, Inc. | Method and apparatus for agglomerating fine snow particles |
| US6334330B2 (en) | 1999-07-26 | 2002-01-01 | Praxair, Inc. | Impingement cooler |
| US6374633B1 (en) * | 2000-10-20 | 2002-04-23 | Tomco2 Equipment Co. | Pelletizing system |
| US6557367B1 (en) | 2002-03-28 | 2003-05-06 | Praxair Technology, Inc. | Impingement cooler with improved coolant recycle |
| WO2006065838A2 (en) * | 2004-12-13 | 2006-06-22 | Cool Clean Technologies, Inc. | Device for applying cryogenic composition and method of using same |
| US7293570B2 (en) * | 2004-12-13 | 2007-11-13 | Cool Clean Technologies, Inc. | Carbon dioxide snow apparatus |
| FR2928245B1 (fr) * | 2008-03-10 | 2011-01-07 | Air Liquide | Procede de decongelation de produits alimentaires par micro-ondes |
| SI2368845T1 (sl) * | 2010-03-01 | 2013-04-30 | Messer France S.A.S. | Naprava in postopek za pridobivanje snega iz ogljikovega dioksida |
| FR2966575B1 (fr) * | 2010-10-21 | 2012-10-26 | Air Liquide | Installation d'obtention de blocs de refrigeration composes d'une enveloppe en une matiere poreuse contenant une masse de neige carbonique enfermee et retenue dans l'enveloppe. |
| US20120272664A1 (en) * | 2011-04-27 | 2012-11-01 | Newman Michael D | Electrostatically charged cryogen fog |
| US8869544B2 (en) * | 2012-07-10 | 2014-10-28 | Andres Bernal | Apparatus and method for cooling containers |
| WO2017139079A1 (en) | 2016-02-12 | 2017-08-17 | Applied Materials, Inc. | In-situ temperature control during chemical mechanical polishing with a condensed gas |
| US11597052B2 (en) | 2018-06-27 | 2023-03-07 | Applied Materials, Inc. | Temperature control of chemical mechanical polishing |
| TWI885783B (zh) | 2019-02-20 | 2025-06-01 | 美商應用材料股份有限公司 | 化學機械拋光裝置及化學機械拋光方法 |
| TWI859239B (zh) | 2019-05-29 | 2024-10-21 | 美商應用材料股份有限公司 | 用於化學機械研磨系統的蒸氣處置站的設備及方法 |
| US11628478B2 (en) | 2019-05-29 | 2023-04-18 | Applied Materials, Inc. | Steam cleaning of CMP components |
| US11633833B2 (en) | 2019-05-29 | 2023-04-25 | Applied Materials, Inc. | Use of steam for pre-heating of CMP components |
| US11897079B2 (en) | 2019-08-13 | 2024-02-13 | Applied Materials, Inc. | Low-temperature metal CMP for minimizing dishing and corrosion, and improving pad asperity |
| TWI912098B (zh) | 2019-08-13 | 2026-01-11 | 美商應用材料股份有限公司 | 化學機械研磨系統 |
| US11920862B2 (en) * | 2019-12-19 | 2024-03-05 | Praxair Technology, Inc. | Methods and apparatuses for using dry ice containers |
| CN115103738A (zh) | 2020-06-29 | 2022-09-23 | 应用材料公司 | Cmp中的温度和浆体流动速率控制 |
| WO2022006008A1 (en) | 2020-06-29 | 2022-01-06 | Applied Materials, Inc. | Control of steam generation for chemical mechanical polishing |
| US11577358B2 (en) | 2020-06-30 | 2023-02-14 | Applied Materials, Inc. | Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing |
| CN115461193A (zh) | 2020-06-30 | 2022-12-09 | 应用材料公司 | 用于cmp温度控制的设备和方法 |
| TWI861570B (zh) | 2022-06-06 | 2024-11-11 | 美商應用材料股份有限公司 | 凝結氣體墊調節器 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3443389A (en) * | 1966-12-27 | 1969-05-13 | Air Reduction | Apparatus for the production of carbon dioxide snow |
| US3492829A (en) * | 1967-07-28 | 1970-02-03 | Air Reduction | Snow horn |
| US3786644A (en) * | 1972-06-02 | 1974-01-22 | Airco Inc | System for changing the static electrical charge on co{11 {11 ice particles |
| US5249426A (en) * | 1992-06-02 | 1993-10-05 | Alpheus Cleaning Technologies Corp. | Apparatus for making and delivering sublimable pellets |
| JP3400810B2 (ja) * | 1992-12-29 | 2003-04-28 | 日本炭酸株式会社 | スノー状ドライアイスの製造装置 |
-
1997
- 1997-07-14 US US08/891,761 patent/US5765394A/en not_active Expired - Lifetime
-
1998
- 1998-03-23 ID IDP980412A patent/ID20574A/id unknown
- 1998-04-09 CN CNB981082149A patent/CN1163712C/zh not_active Expired - Fee Related
- 1998-04-13 ES ES98106701T patent/ES2158633T5/es not_active Expired - Lifetime
- 1998-04-13 KR KR1019980013029A patent/KR100337970B1/ko not_active Expired - Fee Related
- 1998-04-13 MY MYPI98001631A patent/MY132899A/en unknown
- 1998-04-13 BR BR9801036-0A patent/BR9801036A/pt not_active IP Right Cessation
- 1998-04-13 DE DE69800982T patent/DE69800982T2/de not_active Expired - Fee Related
- 1998-04-13 EP EP98106701A patent/EP0891944B2/en not_active Expired - Lifetime
- 1998-04-13 AR ARP980101669A patent/AR012395A1/es active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| KR19990013352A (ko) | 1999-02-25 |
| BR9801036A (pt) | 1999-10-19 |
| CN1205422A (zh) | 1999-01-20 |
| KR100337970B1 (ko) | 2002-07-18 |
| US5765394A (en) | 1998-06-16 |
| DE69800982T2 (de) | 2001-11-15 |
| CN1163712C (zh) | 2004-08-25 |
| AR012395A1 (es) | 2000-10-18 |
| MY132899A (en) | 2007-10-31 |
| EP0891944B1 (en) | 2001-06-27 |
| ES2158633T5 (es) | 2007-09-16 |
| DE69800982D1 (de) | 2001-08-02 |
| EP0891944B2 (en) | 2007-01-24 |
| EP0891944A1 (en) | 1999-01-20 |
| ID20574A (id) | 1999-01-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FG2A | Definitive protection |
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