ES2168792T3 - Procedimiento para regular un proceso de revestimiento. - Google Patents

Procedimiento para regular un proceso de revestimiento.

Info

Publication number
ES2168792T3
ES2168792T3 ES98945308T ES98945308T ES2168792T3 ES 2168792 T3 ES2168792 T3 ES 2168792T3 ES 98945308 T ES98945308 T ES 98945308T ES 98945308 T ES98945308 T ES 98945308T ES 2168792 T3 ES2168792 T3 ES 2168792T3
Authority
ES
Spain
Prior art keywords
coating process
regulate
procedure
regulating
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES98945308T
Other languages
English (en)
Inventor
Uwe Sarbacher
Wilbert Windeln
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steag Hamatech AG
Original Assignee
Steag Hamatech AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech AG filed Critical Steag Hamatech AG
Application granted granted Critical
Publication of ES2168792T3 publication Critical patent/ES2168792T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B2220/00—Record carriers by type
    • G11B2220/20—Disc-shaped record carriers
    • G11B2220/25—Disc-shaped record carriers characterised in that the disc is based on a specific recording technology
    • G11B2220/2537—Optical discs
    • G11B2220/2545—CDs

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Fertilizers (AREA)
  • Materials For Medical Uses (AREA)
  • Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

Procedimiento para regular un proceso de revesti miento destinado a aplicar una capa (3) sobre un substrato (1) que presenta una estructura difractora (2), en donde se determina la intensidad de un haz de luz (7) incidente sobre el substrato revestido y difractado por éste, después de su transmisión y/o reflexión, para al menos el primer orden o un orden superior, y se aprovecha esto como magnitud real para regular el espesor de capa.
ES98945308T 1997-09-10 1998-09-04 Procedimiento para regular un proceso de revestimiento. Expired - Lifetime ES2168792T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19739794A DE19739794C2 (de) 1997-09-10 1997-09-10 Verfahren zur Regelung eines Beschichtungsvorgangs

Publications (1)

Publication Number Publication Date
ES2168792T3 true ES2168792T3 (es) 2002-06-16

Family

ID=7841912

Family Applications (1)

Application Number Title Priority Date Filing Date
ES98945308T Expired - Lifetime ES2168792T3 (es) 1997-09-10 1998-09-04 Procedimiento para regular un proceso de revestimiento.

Country Status (13)

Country Link
US (1) US20020160100A1 (es)
EP (1) EP1012838B1 (es)
JP (1) JP2002510107A (es)
KR (1) KR100365196B1 (es)
CN (1) CN1269905A (es)
AT (1) ATE208947T1 (es)
CA (1) CA2303792C (es)
DE (2) DE19739794C2 (es)
DK (1) DK1012838T3 (es)
ES (1) ES2168792T3 (es)
IL (1) IL134922A0 (es)
TW (1) TW448078B (es)
WO (1) WO1999013468A1 (es)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19950559B4 (de) 1999-10-20 2006-08-17 Steag Eta-Optik Gmbh Verfahren zum Bestimmen von geometrischen Strukturen auf oder in einem Substrat sowie von Materialparametern
DE10054099B4 (de) * 2000-10-31 2005-09-01 Steag Eta-Optik Gmbh Verfahren und Vorrichtung zum Bestimmen von Defektenauf oder in einem Gegenstand
DE10148778C2 (de) * 2001-10-02 2003-10-09 Univ Braunschweig Tech Verfahren zur Bestimmung der Beschaffenheit einer Probe
CN100371492C (zh) * 2004-08-06 2008-02-27 台达电子工业股份有限公司 镀膜系统及其膜厚监控装置
NL1027448C2 (nl) * 2004-11-08 2006-05-09 Otb Groep B V Werkwijze en inrichting voor het aanbrengen van een materiaallaag op een schijfvormig substraat.
JP2006313077A (ja) * 2005-05-06 2006-11-16 Ricoh Co Ltd 光学積層体検査方法，光学積層体製造方法および光学積層体検査装置ならびに光学積層体製造装置
DE102009012756B4 (de) * 2009-03-12 2012-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Messung der optischen Eigenschaften einer bewegten Probe in einer Beschichtungsanlage
EP3485059A1 (en) * 2016-07-13 2019-05-22 Evatec AG Broadband optical monitoring
US10861755B2 (en) 2017-02-08 2020-12-08 Verity Instruments, Inc. System and method for measurement of complex structures
DE102018103171A1 (de) * 2017-11-23 2019-05-23 Tdk Electronics Ag Verfahren zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie, Verfahren zur Herstellung einer Kondensatorfolie und Einrichtung zum Bestimmen von Eigenschaften einer Beschichtung auf einer transparenten Folie
CN111682079B (zh) * 2020-06-01 2021-12-14 大连理工大学 一种中/远红外透明导电材料体系及其制备导电薄膜的方法
CN116288253B (zh) * 2023-02-09 2025-06-20 浙江大学杭州国际科创中心 半导体薄膜的加工方法、装置、系统和计算机设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU947640A1 (ru) * 1980-07-04 1982-07-30 Предприятие П/Я В-2892 Способ измерени толщины пленки на подложке
US4457794A (en) * 1982-06-25 1984-07-03 Matsushita Electric Industrial Co., Ltd. Method for manufacturing optical memory disc
JPS6175203A (ja) * 1984-09-20 1986-04-17 Oak Seisakusho:Kk 膜厚測定装置
JPS6176904A (ja) * 1984-09-21 1986-04-19 Oak Seisakusho:Kk 膜厚測定方法
EP0205039B1 (en) * 1985-06-10 1994-01-12 Energy Conversion Devices, Inc. Optical storage device and method of manufacturing
JPH01268859A (ja) * 1988-04-20 1989-10-26 Casio Comput Co Ltd 透明導電膜の形成方法および形成装置
JPH0252205A (ja) * 1988-08-17 1990-02-21 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JPH0443906A (ja) * 1990-06-11 1992-02-13 Matsushita Electric Ind Co Ltd 光学的膜厚モニタ装置
DE29502560U1 (de) * 1995-02-16 1995-03-30 "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum Vorrichtung zur Bestimmung der Schichtdicke farbiger Schichten auf transparenten Substraten
DE29506765U1 (de) * 1995-04-21 1995-06-22 "Optikzentrum NRW GmbH (OZ)" i.K., 44799 Bochum Vorrichtung zum Messen der Dicke dünner farbiger Schichten
JPH09128818A (ja) * 1995-11-02 1997-05-16 Sony Corp 露光装置

Also Published As

Publication number Publication date
IL134922A0 (en) 2001-05-20
KR100365196B1 (ko) 2002-12-18
JP2002510107A (ja) 2002-04-02
EP1012838B1 (de) 2001-11-14
CN1269905A (zh) 2000-10-11
TW448078B (en) 2001-08-01
DK1012838T3 (da) 2002-03-11
ATE208947T1 (de) 2001-11-15
DE19739794C2 (de) 1999-11-18
KR20010023817A (ko) 2001-03-26
EP1012838A1 (de) 2000-06-28
WO1999013468A1 (de) 1999-03-18
CA2303792C (en) 2003-01-14
US20020160100A1 (en) 2002-10-31
DE59802169D1 (de) 2001-12-20
DE19739794A1 (de) 1999-04-01
CA2303792A1 (en) 1999-03-18

Similar Documents

Publication Publication Date Title
BR9305848A (pt) Composição para revestimento de liberação substrato e processo de formação de um substrato revestido com revestimento de liberação
ES2168792T3 (es) Procedimiento para regular un proceso de revestimiento.
BR9510268A (pt) Processo e dispositivo para revestir um substrato com uma camada
BR9611292A (pt) Uma composição de revestimento de fibra de vidro ótica curável por radiação sem solvente e um método livre de solvente para a fabricação de uma composição de revestimento de fibra de vidro ótica curável por radiação livre de solvente
BR9611103A (pt) Composição de revestimento substrato e processo para a formação de um polímero acrílaco de fluoroalquila
BR9611591A (pt) Composição formadoras de películas aderente e incolor métodos para aplicar um revestimento composto a um substrato e para reparar um revestimento composto de cor mais incolor e artigo revestido
BR9510266A (pt) Processo aparelho para revestir um substrato
BR9709769A (pt) Processo para revestir um substrato
BR9510665A (pt) Processo para revestir um substrato de metal
BR8105765A (pt) Processo para manufatura de uma composicao de revestimento, e para revistimento de um substrato rigido
FI940451L (fi) Päällystyslaite, menetelmä lasin päällystämiseksi, lasin päällystykseen tarkoitettuja yhdisteitä ja koostumuksia ja päällystettyjä lasialustoja
BR9612502A (pt) Composição de revestiimento curável por radiação método para revestir um substrato substrato revestido e composto de camadas múltiplas
BR9510445A (pt) Processo e aparelho para revestir um substrato
MX164549B (es) Composicion de recubrimiento transparente, un material de substrato revestido y metodo para recubrir el mismo
BR9609609A (pt) Composição revestível adequada para aplicação a um substrato revestimento durável aderentee substratos
NO20013080D0 (no) Smuss-motstandig lag for glassoverflater
BR9808155A (pt) Substrato revestido, processo para controlar pragas em substratos hortìcolas e processo para aumentar o efeito hortìcola de substratos hortìcolas
BR9609220A (pt) Composição formadora de película aderente métodos para aplicar um revestimento composto a um substrato e para reparar um revestimento composto de cor mais incolor e artigo revestido
BR9705821A (pt) Processo para revestir um substrato
MX9101837A (es) Composicion de fluidos de correccion y metodo para producir un revestimiento correctivo en la superficie de un substrato
BR9305014A (pt) Artigo revestido, processo para revestir um substrato e composiçáo de revestimento
BR9612001A (pt) Processo para formar um revestimento de fosfato de zinco substrato de alumínio e concentrado de revestimento de conversão de fosfato de zinco
FI854124A0 (fi) Foerfarande foer klistring av ett oeverdragsmaterial pao en av slumpartat lagda fibrer sammansatt skiva.
BR8904897A (pt) Composicao de revestimento de esmalte de vidro,substrato de vidro e processo para a formacao de uma folha de vidro revestida com esmalte de vidro
DK0805839T3 (da) Overfladebehandling

Legal Events

Date Code Title Description
FG2A Definitive protection

Ref document number: 1012838

Country of ref document: ES