ES2181679T3 - Condensador variable con la tension. - Google Patents

Condensador variable con la tension.

Info

Publication number
ES2181679T3
ES2181679T3 ES92923202T ES92923202T ES2181679T3 ES 2181679 T3 ES2181679 T3 ES 2181679T3 ES 92923202 T ES92923202 T ES 92923202T ES 92923202 T ES92923202 T ES 92923202T ES 2181679 T3 ES2181679 T3 ES 2181679T3
Authority
ES
Spain
Prior art keywords
layer
electrode
high resistivity
voltage
insulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92923202T
Other languages
English (en)
Inventor
Kenneth D Cornett
E S Ramakrishnan
Gary H Shapiro
Raymond M Caldwell
Wei-Yean Howng
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of ES2181679T3 publication Critical patent/ES2181679T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/01—Manufacture or treatment
    • H10D1/045—Manufacture or treatment of capacitors having potential barriers, e.g. varactors
    • H10D1/047—Manufacture or treatment of capacitors having potential barriers, e.g. varactors of conductor-insulator-semiconductor capacitors, e.g. trench capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

UN CAPACITOR (10) DE VARIABLE VOLTAJE TIENE COMO SUSTRATO BASE UNA MICROPLAQUETA DE SILICONA CON UNA CAPA DE MATERIAL SEMICONDUCTOR DE RESISTIVIDAD ALTA SOBRE LA PARTE SUPERIOR DE LA SUPERFICIE. UNA CAPA (16) AISLANTE DE UN OXIDO DE METAL QUE TIENE UNA CONSTANTE DIELECTRICA MAYOR QUE LA CONSTANTE DIELECTRICA DE LOS SEMICONDUCTORES (12), TAL COMO TITANATO DE CIRCONIO, SE FORMA SOBRE LA PARTE MAS ALTA DE LA CAPA DE RESISTIVIDAD ALTA, Y UN ELECTRODO (18) METALICO SE FORMA SOBRE LA CAPA (16) AISLANTE. CUANDO EL ELECTRODO SE ACTIVA, SE FORMA UNA CAPA (20) DE AGOTAMIENTO EN LA CAPA DE RESISTIVIDAD ALTA. MEDIANTE LA VARIACION DEL VOLTAJE APLICADO SOBRE EL ELECTRODO SE ALTERA LA CAPACITANCIA DEL DISPOSITIVO.
ES92923202T 1991-10-15 1992-10-15 Condensador variable con la tension. Expired - Lifetime ES2181679T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/776,111 US5173835A (en) 1991-10-15 1991-10-15 Voltage variable capacitor

Publications (1)

Publication Number Publication Date
ES2181679T3 true ES2181679T3 (es) 2003-03-01

Family

ID=25106486

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92923202T Expired - Lifetime ES2181679T3 (es) 1991-10-15 1992-10-15 Condensador variable con la tension.

Country Status (7)

Country Link
US (1) US5173835A (es)
EP (1) EP0608376B1 (es)
JP (1) JP2853332B2 (es)
KR (2) KR940703070A (es)
DE (1) DE69232740T2 (es)
ES (1) ES2181679T3 (es)
WO (1) WO1993008578A1 (es)

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Also Published As

Publication number Publication date
US5173835A (en) 1992-12-22
KR940703070A (ko) 1994-09-17
JP2853332B2 (ja) 1999-02-03
KR0134980B1 (ko) 1998-05-15
JPH07500457A (ja) 1995-01-12
DE69232740T2 (de) 2002-12-05
EP0608376A1 (en) 1994-08-03
DE69232740D1 (de) 2002-09-26
EP0608376B1 (en) 2002-08-21
EP0608376A4 (en) 1994-12-07
WO1993008578A1 (en) 1993-04-29

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