ES2184703T3 - Dsipositivo optico para hacer simetricas las radiaciones de redes bidimensionales de diodos laser. - Google Patents
Dsipositivo optico para hacer simetricas las radiaciones de redes bidimensionales de diodos laser.Info
- Publication number
- ES2184703T3 ES2184703T3 ES00912651T ES00912651T ES2184703T3 ES 2184703 T3 ES2184703 T3 ES 2184703T3 ES 00912651 T ES00912651 T ES 00912651T ES 00912651 T ES00912651 T ES 00912651T ES 2184703 T3 ES2184703 T3 ES 2184703T3
- Authority
- ES
- Spain
- Prior art keywords
- laser diodes
- different
- beams
- optical
- radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
- G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
- G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
Abstract
Conjunto óptico para equilibrar la radiación de una multitud de diodos láser dispuestos en correspondencia fija en la dirección x los unos junto a los otros y superpuestos en la dirección y perpendicular a la anterior, cuya radiación de salida respectiva, con respecto a la dirección y y a la dirección x es asimétrica, especialmente para equilibrar la radiación de las barras de diodos láser apilados unos sobre otros formando un paquete de diodos láser, con una multitud de diodos láser dispuestos los unos junto a los otros en la dirección x y superpuestos en la dirección y perpendicular a la anterior, así como con varios sistemas ópticos de microlentes cilíndricas (2a, 2b, 2c) con isoplanasia suficiente, donde cada sistema óptico de microlente cilíndrica está asignado a otro conjunto ordenado lineal de diodos láser dispuestos unos junto a los otros en la dirección x, y que está basculado alrededor del eje óptico situado en la dirección z del correspondiente conjunto ordenado lineal de diodosláser, de manera que el sistema óptico de microcilindros colima los haces de rayos de salida de los distintos diodos láser del correspondiente conjunto ordenado lineal de diodos láser en la dirección y, desviándolos con diferente intensidad según su coordenada x, con lo cual se separan los haces de rayos de salida con respecto a la dirección y, donde además, a continuación de los sistemas ópticos de microlentes cilíndricas (2a, 2b, 2c) hay dispuesto un elemento director (3) que desvía los haces de rayos (8) de los distintos diodos láser dispuestos unos junto a otros en la dirección x, en dirección x con distintos ángulos de desviación cada uno, de tal manera que los centros de gravedad de los distintos haces de rayos (8) coincidan con una separación prefijada con relación a la dirección x, y desvíe la radiación de cada uno de los conjuntos ordenados de diodos láser lineales en la dirección y, de tal manera que los centros de gravedad de los haces de los emisores individuales superpuestos delas distintas barras coincidan con una separación prefijada con respecto a la dirección y, y donde con una separación, después del elemento director (3) está dispuesto un elemento de redirección (5), que vuelve a compensar en el plano xz los diferentes ángulos de desvío de los haces de rayos (8) introducidos por el elemento director (3).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19914755 | 1999-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2184703T3 true ES2184703T3 (es) | 2003-04-16 |
Family
ID=7903174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES00912651T Expired - Lifetime ES2184703T3 (es) | 1999-03-31 | 2000-03-28 | Dsipositivo optico para hacer simetricas las radiaciones de redes bidimensionales de diodos laser. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6683727B1 (es) |
| EP (1) | EP1166165B1 (es) |
| JP (1) | JP2002541513A (es) |
| AT (1) | ATE224066T1 (es) |
| CA (1) | CA2368958A1 (es) |
| DE (2) | DE10015245C2 (es) |
| ES (1) | ES2184703T3 (es) |
| WO (1) | WO2000060399A1 (es) |
Families Citing this family (74)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10015245C2 (de) * | 1999-03-31 | 2002-01-03 | Fraunhofer Ges Forschung | Optische Anordnung zur Symmetrierung der Strahlung von zweidimensionalen Arrays von Laserdioden |
| DE19948889C1 (de) * | 1999-10-11 | 2001-06-07 | Unique M O D E Ag | Vorrichtung zur Symmetrierung der Strahlung von linearen optischen Emittern und Verwendung der Vorrichtung |
| CN100384032C (zh) * | 2000-11-30 | 2008-04-23 | 中国科学院上海光学精密机械研究所 | 含有准直模块激光二极管线列阵的激光装置 |
| DE10062453B4 (de) * | 2000-12-14 | 2007-07-19 | My Optical Systems Gmbh | Verfahren und Vorrichtung zur Überlagerung von Strahlenbündeln |
| DE10118788A1 (de) | 2001-04-18 | 2002-10-24 | Lissotschenko Vitalij | Anordnung zur Kollimierung des von einer Laserlichtquelle ausgehenden Lichts sowie Strahltransformationsvorrichtung für eine derartige Anordnung |
| JP2002329935A (ja) * | 2001-05-07 | 2002-11-15 | Toshiba Corp | レーザ光源装置、レーザ装置、レーザ出射方法およびレーザ光源装置の製造方法 |
| FR2832813B1 (fr) * | 2001-11-27 | 2004-02-27 | Ecole Polytech | Systeme de juxtaposition de faisceaux d'un reseau de diodes lasers |
| US7978981B2 (en) * | 2002-02-22 | 2011-07-12 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Structure and apparatus for a very short haul, free space, and fiber optic interconnect and data link |
| US7010194B2 (en) | 2002-10-07 | 2006-03-07 | Coherent, Inc. | Method and apparatus for coupling radiation from a stack of diode-laser bars into a single-core optical fiber |
| EP1460469A1 (en) * | 2003-03-17 | 2004-09-22 | Heptagon Oy | Optical arrangement and linear laser emitting device |
| US6993059B2 (en) * | 2003-06-11 | 2006-01-31 | Coherent, Inc. | Apparatus for reducing spacing of beams delivered by stacked diode-laser bars |
| US7006549B2 (en) | 2003-06-11 | 2006-02-28 | Coherent, Inc. | Apparatus for reducing spacing of beams delivered by stacked diode-laser bars |
| DE10327735A1 (de) * | 2003-06-18 | 2005-01-05 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co.Kg | Abbildungsvorrichtung für die Abbildung des Lichtes einer Halbleiterlasereinheit mit einer Mehrzahl von Emittern in einer Arbeitsebene sowie Beleuchtungsvorrichtung mit einer derartigen Abbildungsvorrichtung |
| DE102004040608B4 (de) * | 2004-08-21 | 2006-09-07 | Dilas Diodenlaser Gmbh | Diodenlaser mit einer optischen Einrichtung zur Erhöhung der Strahldichte eines aus ihm austretenden Ausgangslaserstrahls |
| US7420996B2 (en) * | 2005-11-22 | 2008-09-02 | Nlight Photonics Corporation | Modular diode laser assembly |
| US20070115617A1 (en) * | 2005-11-22 | 2007-05-24 | Nlight Photonics Corporation | Modular assembly utilizing laser diode subassemblies with winged mounting blocks |
| US20070217471A1 (en) * | 2006-03-20 | 2007-09-20 | Nlight Photonics Corporation | Laser diode stack utilizing a non-conductive submount |
| US20070116071A1 (en) * | 2005-11-22 | 2007-05-24 | Nlight Photonics Corporation | Modular diode laser assembly |
| US20070217467A1 (en) * | 2006-03-20 | 2007-09-20 | Nlight Photonics Corporation | Laser diode package utilizing a laser diode stack |
| US20070116077A1 (en) * | 2005-11-22 | 2007-05-24 | Nlight Photonics Corporation | Vertically displaced stack of multi-mode single emitter laser diodes |
| US7586963B2 (en) * | 2005-11-22 | 2009-09-08 | Nlight Photonics Corporation | Modular diode laser assembly |
| US7436868B2 (en) * | 2005-11-22 | 2008-10-14 | Nlight Photonics Corporation | Modular diode laser assembly |
| US7443895B2 (en) * | 2005-11-22 | 2008-10-28 | Nlight Photonics Corporation | Modular diode laser assembly |
| US20070217468A1 (en) * | 2006-03-20 | 2007-09-20 | Nlight Photonics Corporation | Laser diode package utilizing a laser diode stack |
| US7881355B2 (en) * | 2005-12-15 | 2011-02-01 | Mind Melters, Inc. | System and method for generating intense laser light from laser diode arrays |
| US20070217470A1 (en) * | 2006-03-20 | 2007-09-20 | Nlight Photonics Corporation | Laser diode stack end-pumped solid state laser |
| US20070217469A1 (en) * | 2006-03-20 | 2007-09-20 | Nlight Photonics Corporation | Laser diode stack side-pumped solid state laser |
| US7515346B2 (en) | 2006-07-18 | 2009-04-07 | Coherent, Inc. | High power and high brightness diode-laser array for material processing applications |
| DE102007011902A1 (de) | 2007-03-13 | 2008-07-24 | Daimler Ag | Laserschweißvorrichtung |
| US7733932B2 (en) * | 2008-03-28 | 2010-06-08 | Victor Faybishenko | Laser diode assemblies |
| DE102008020858B4 (de) * | 2008-04-25 | 2012-09-13 | Carl Zeiss Ag | Projektionssystem für ein optisches Anzeigegerät sowie Head-mounted Display mit einem solchen |
| US20100175685A1 (en) * | 2008-07-14 | 2010-07-15 | Robert Owen Campbell | Advanced Tracking Concentrator Employing Rotating Input Arrangement and Method |
| WO2010032224A2 (en) * | 2008-09-22 | 2010-03-25 | Asml Netherlands B.V. | Lithographic apparatus, programmable patterning device and lithographic method |
| TWI448830B (zh) | 2010-02-09 | 2014-08-11 | Asml荷蘭公司 | 微影裝置及元件製造方法 |
| NL2006256A (en) | 2010-02-23 | 2011-08-24 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
| SG183393A1 (en) | 2010-02-25 | 2012-09-27 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| KR101537289B1 (ko) | 2010-04-12 | 2015-07-16 | 에이에스엠엘 네델란즈 비.브이. | 기판 핸들링 장치 및 리소그래피 장치 |
| US8432945B2 (en) | 2010-09-30 | 2013-04-30 | Victor Faybishenko | Laser diode combiner modules |
| KR101501967B1 (ko) | 2010-12-08 | 2015-03-12 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치 및 디바이스 제조 방법 |
| KR101517457B1 (ko) | 2011-03-29 | 2015-05-04 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피에서 방사선 빔 스팟 위치의 측정 |
| KR101538414B1 (ko) | 2011-04-08 | 2015-07-22 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치, 프로그래밍 가능한 패터닝 디바이스 및 리소그래피 방법 |
| NL2008500A (en) | 2011-04-21 | 2012-10-23 | Asml Netherlands Bv | Lithographic apparatus, method for maintaining a lithographic apparatus and device manufacturing method. |
| DE102011051120B9 (de) | 2011-06-16 | 2012-08-30 | Jos. Schneider Optische Werke Gmbh | Kamera-Objektiv |
| US9690210B2 (en) | 2011-08-18 | 2017-06-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| NL2009342A (en) | 2011-10-31 | 2013-05-07 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
| JP5815887B2 (ja) | 2011-11-29 | 2015-11-17 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置、デバイス製造方法およびコンピュータプログラム |
| KR101633758B1 (ko) | 2011-11-29 | 2016-06-27 | 에이에스엠엘 네델란즈 비.브이. | 프로그래머블 패터닝 디바이스에 데이터를 제공하는 장치 및 방법, 리소그래피 장치, 및 디바이스 제조 방법 |
| JP5840303B2 (ja) | 2011-12-05 | 2016-01-06 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置及びデバイス製造方法 |
| KR101607176B1 (ko) | 2011-12-06 | 2016-03-29 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치, 세트포인트 데이터를 제공하는 장치, 디바이스 제조 방법, 세트포인트 데이터를 계산하는 방법, 및 컴퓨터 프로그램 |
| US9065237B2 (en) * | 2011-12-07 | 2015-06-23 | Jds Uniphase Corporation | High-brightness spatial-multiplexed multi-emitter pump with tilted collimated beam |
| US8891579B1 (en) | 2011-12-16 | 2014-11-18 | Nlight Photonics Corporation | Laser diode apparatus utilizing reflecting slow axis collimators |
| NL2009902A (en) | 2011-12-27 | 2013-07-01 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
| KR101633759B1 (ko) | 2012-01-12 | 2016-06-27 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치, 세트포인트 데이터를 제공하는 장치, 디바이스 제조 방법, 세트포인트 데이터를 제공하는 방법, 및 컴퓨터 프로그램 |
| US9568831B2 (en) | 2012-01-17 | 2017-02-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| JP6042457B2 (ja) | 2012-02-23 | 2016-12-14 | エーエスエムエル ネザーランズ ビー.ブイ. | デバイス、露光装置および放射誘導方法 |
| US9343868B2 (en) | 2012-08-28 | 2016-05-17 | Optical Engines Inc. | Efficient generation of intense laser light from multiple laser light sources using misaligned collimating optical elements |
| US8917997B2 (en) * | 2012-10-05 | 2014-12-23 | Applied Micro Circuits Corporation | Collimated beam channel with four lens optical surfaces |
| NL2012052A (en) | 2013-01-29 | 2014-08-04 | Asml Netherlands Bv | A radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method. |
| US10203399B2 (en) | 2013-11-12 | 2019-02-12 | Big Sky Financial Corporation | Methods and apparatus for array based LiDAR systems with reduced interference |
| US9705289B2 (en) | 2014-03-06 | 2017-07-11 | Nlight, Inc. | High brightness multijunction diode stacking |
| US9720145B2 (en) | 2014-03-06 | 2017-08-01 | Nlight, Inc. | High brightness multijunction diode stacking |
| US9360554B2 (en) | 2014-04-11 | 2016-06-07 | Facet Technology Corp. | Methods and apparatus for object detection and identification in a multiple detector lidar array |
| US10036801B2 (en) | 2015-03-05 | 2018-07-31 | Big Sky Financial Corporation | Methods and apparatus for increased precision and improved range in a multiple detector LiDAR array |
| US10761276B2 (en) | 2015-05-15 | 2020-09-01 | Nlight, Inc. | Passively aligned crossed-cylinder objective assembly |
| JP6748905B2 (ja) * | 2015-08-20 | 2020-09-02 | パナソニックIpマネジメント株式会社 | 発光装置 |
| WO2017132209A1 (en) * | 2016-01-27 | 2017-08-03 | Coherent, Inc | Aberration compensated diode-laser stack |
| KR102107159B1 (ko) | 2016-02-16 | 2020-05-07 | 엔라이트 인크. | 개선된 패키지 휘도를 위한 수동 정렬된 단일 요소 텔레스코프 |
| US9866816B2 (en) | 2016-03-03 | 2018-01-09 | 4D Intellectual Properties, Llc | Methods and apparatus for an active pulsed 4D camera for image acquisition and analysis |
| WO2017161334A1 (en) | 2016-03-18 | 2017-09-21 | Nlight, Inc. | Spectrally multiplexing diode pump modules to improve brightness |
| JP6814887B2 (ja) | 2016-12-23 | 2021-01-20 | エヌライト,インコーポレーテッド | 低コスト光ポンプレーザパッケージ |
| WO2018200587A1 (en) | 2017-04-24 | 2018-11-01 | Nlight, Inc. | Low swap two-phase cooled diode laser package |
| DE102017108936A1 (de) * | 2017-04-26 | 2018-10-31 | Trumpf Laser Gmbh | Homogenisierung von Pumplaserstrahlung |
| EP3750218B1 (en) | 2018-02-06 | 2026-01-14 | Nlight, Inc. | Diode laser apparatus with fac lens out-of-plane beam steering |
| CN111969416A (zh) * | 2020-08-28 | 2020-11-20 | 南京镭芯光电有限公司 | 半导体激光器装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4438368C3 (de) | 1994-10-27 | 2003-12-04 | Fraunhofer Ges Forschung | Anordnung zur Führung und Formung von Strahlen eines geradlinigen Laserdiodenarrays |
| DE19500513C1 (de) | 1995-01-11 | 1996-07-11 | Dilas Diodenlaser Gmbh | Optische Anordnung zur Verwendung bei einer Laserdiodenanordnung |
| CA2210192A1 (en) | 1995-01-11 | 1996-07-18 | Dilas Diodenlaser Gmbh | Optical arrangement for use in a laser diode arrangement |
| US5633695A (en) * | 1995-08-14 | 1997-05-27 | Canon Kabushiki Kaisha | Beam steering optical system and method and ophthalmic apparatus using same having spaced apart irradiation and observation paths |
| DE19645150C2 (de) * | 1996-10-28 | 2002-10-24 | Fraunhofer Ges Forschung | Optische Anordnung zur Symmetrierung der Strahlung von Laserdioden |
| DE19800590B4 (de) * | 1998-01-09 | 2005-12-01 | Jenoptik Ag | Optische Anordnung zur Symmetrierung der Strahlung eines oder mehrerer übereinander angeordneter Hochleistungsdiodenlaser |
| DE10015245C2 (de) * | 1999-03-31 | 2002-01-03 | Fraunhofer Ges Forschung | Optische Anordnung zur Symmetrierung der Strahlung von zweidimensionalen Arrays von Laserdioden |
-
2000
- 2000-03-28 DE DE10015245A patent/DE10015245C2/de not_active Expired - Fee Related
- 2000-03-28 WO PCT/EP2000/002708 patent/WO2000060399A1/de not_active Ceased
- 2000-03-28 ES ES00912651T patent/ES2184703T3/es not_active Expired - Lifetime
- 2000-03-28 EP EP00912651A patent/EP1166165B1/de not_active Expired - Lifetime
- 2000-03-28 CA CA002368958A patent/CA2368958A1/en not_active Abandoned
- 2000-03-28 JP JP2000609831A patent/JP2002541513A/ja active Pending
- 2000-03-28 US US09/926,076 patent/US6683727B1/en not_active Expired - Fee Related
- 2000-03-28 AT AT00912651T patent/ATE224066T1/de not_active IP Right Cessation
- 2000-03-28 DE DE50000497T patent/DE50000497D1/de not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002541513A (ja) | 2002-12-03 |
| EP1166165B1 (de) | 2002-09-11 |
| WO2000060399A1 (de) | 2000-10-12 |
| EP1166165A1 (de) | 2002-01-02 |
| CA2368958A1 (en) | 2000-10-12 |
| DE50000497D1 (de) | 2002-10-17 |
| DE10015245A1 (de) | 2000-10-19 |
| DE10015245C2 (de) | 2002-01-03 |
| US6683727B1 (en) | 2004-01-27 |
| ATE224066T1 (de) | 2002-09-15 |
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