ES2195986T3 - Matriz de microobturadores electrostaticos con elevado factor de cobertura. - Google Patents

Matriz de microobturadores electrostaticos con elevado factor de cobertura.

Info

Publication number
ES2195986T3
ES2195986T3 ES01830085T ES01830085T ES2195986T3 ES 2195986 T3 ES2195986 T3 ES 2195986T3 ES 01830085 T ES01830085 T ES 01830085T ES 01830085 T ES01830085 T ES 01830085T ES 2195986 T3 ES2195986 T3 ES 2195986T3
Authority
ES
Spain
Prior art keywords
matrix
electrostatic
micro
shutters
microobturators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES01830085T
Other languages
English (en)
Inventor
Marco Pizzi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Application granted granted Critical
Publication of ES2195986T3 publication Critical patent/ES2195986T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/353—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being a shutter, baffle, beam dump or opaque element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3566—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details involving bending a beam, e.g. with cantilever
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)

Abstract

Matriz de microobturadores electrostáticos que presenta un alto factor de cobertura de grupo, que incluye una pluralidad de microobturadores de control electrostático (2), dispuestos en una matriz de filas y una o más columnas, en la que cada microobturador comprende: en la que dichos microobturadores (2) están dispuestos en filas, una sobre otra, con los substratos de los microobturadores (2) de cada fila mutuamente coplanarios y paralelos con los substratos de los microobturadores de las filas adyacentes.
ES01830085T 2000-02-16 2001-02-09 Matriz de microobturadores electrostaticos con elevado factor de cobertura. Expired - Lifetime ES2195986T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO20000152 IT1319845B1 (it) 2000-02-16 2000-02-16 Matrice di micro-otturatori elettrostatici ad elevato fattore diriempimento.

Publications (1)

Publication Number Publication Date
ES2195986T3 true ES2195986T3 (es) 2003-12-16

Family

ID=11457436

Family Applications (1)

Application Number Title Priority Date Filing Date
ES01830085T Expired - Lifetime ES2195986T3 (es) 2000-02-16 2001-02-09 Matriz de microobturadores electrostaticos con elevado factor de cobertura.

Country Status (4)

Country Link
EP (1) EP1126305B1 (es)
DE (1) DE60100197T2 (es)
ES (1) ES2195986T3 (es)
IT (1) IT1319845B1 (es)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10215658A1 (de) * 2002-04-09 2003-10-30 Astrium Gmbh Optische Blenden-Anordnung mit Blenden-Array und selektiver Ansteuerung von Blenden-Elementen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3746785A (en) * 1971-11-26 1973-07-17 Bendix Corp Deflectable membrane optical modulator
EP0246547A3 (de) * 1986-05-22 1990-06-13 Siemens Aktiengesellschaft Anordnung zur optischen Bildverarbeitung
US5781331A (en) * 1997-01-24 1998-07-14 Roxburgh Ltd. Optical microshutter array

Also Published As

Publication number Publication date
DE60100197T2 (de) 2004-05-19
IT1319845B1 (it) 2003-11-03
ITTO20000152A1 (it) 2001-08-16
EP1126305A3 (en) 2002-01-23
EP1126305B1 (en) 2003-04-23
EP1126305A2 (en) 2001-08-22
DE60100197D1 (de) 2003-05-28

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