ES2670703T3 - Instalación de vacío, en particular instalación de plasma, con un perfil extrudido de cámara completamente cerrado - Google Patents

Instalación de vacío, en particular instalación de plasma, con un perfil extrudido de cámara completamente cerrado Download PDF

Info

Publication number
ES2670703T3
ES2670703T3 ES15739229.1T ES15739229T ES2670703T3 ES 2670703 T3 ES2670703 T3 ES 2670703T3 ES 15739229 T ES15739229 T ES 15739229T ES 2670703 T3 ES2670703 T3 ES 2670703T3
Authority
ES
Spain
Prior art keywords
installation
extruded
vacuum
chamber
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES15739229.1T
Other languages
English (en)
Inventor
Christof-Herbert Diener
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of ES2670703T3 publication Critical patent/ES2670703T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Disinfection or sterilisation of materials or objects, in general; Accessories therefor
    • A61L2/02—Disinfection or sterilisation of materials or objects, in general; Accessories therefor using physical processes
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0462—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the processing chambers, e.g. modular processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Animal Behavior & Ethology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Plasma Technology (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Instalación de vacío (10) con una cámara de vacío (12), en la que el lado exterior de la cámara de vacío (12) que discurre paralelamente al eje longitudinal central de cámara de vacío (28) está formado de una sola pieza de un perfil extrudido de cámara (22, 70), caracterizada por que el perfil extrudido de cámara (22, 70) está formado de manera completamente cerrada transversalmente al eje longitudinal central de cámara de vacío (28) y presenta una puerta en el lado frontal reversible que se puede abrir y cerrar, presentando la cámara de vacío (12) en un lado frontal una puerta (16) pivotante que se puede abrir y cerrar, presentando el perfil extrudido de cámara (22, 70) en su lado exterior un saliente de bisagra (42, 44) que discurre paralelamente al eje longitudinal central de cámara de vacío (28) y en el que está dispuesta una bisagra (18, 20) para la unión pivotante entre puerta (16) y perfil extrudido de cámara (22, 70).

Description

imagen1
imagen2
imagen3
imagen4

Claims (1)

  1. imagen1
ES15739229.1T 2014-07-17 2015-07-13 Instalación de vacío, en particular instalación de plasma, con un perfil extrudido de cámara completamente cerrado Active ES2670703T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014213942 2014-07-17
DE102014213942.2A DE102014213942B4 (de) 2014-07-17 2014-07-17 Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil
PCT/EP2015/065968 WO2016008844A1 (de) 2014-07-17 2015-07-13 Vakuumanlage, insbesondere plasmaanlage, mit einem rundum geschlossenen kammerstrangpressprofil

Publications (1)

Publication Number Publication Date
ES2670703T3 true ES2670703T3 (es) 2018-05-31

Family

ID=53682673

Family Applications (1)

Application Number Title Priority Date Filing Date
ES15739229.1T Active ES2670703T3 (es) 2014-07-17 2015-07-13 Instalación de vacío, en particular instalación de plasma, con un perfil extrudido de cámara completamente cerrado

Country Status (7)

Country Link
US (1) US10041730B2 (es)
EP (1) EP3170196B1 (es)
CN (1) CN106537551B (es)
DE (1) DE102014213942B4 (es)
ES (1) ES2670703T3 (es)
TR (1) TR201810324T4 (es)
WO (1) WO2016008844A1 (es)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014213942B4 (de) * 2014-07-17 2016-01-28 Christof-Herbert Diener Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil
USD836212S1 (en) * 2015-08-14 2018-12-18 Christof-Herbert Diener Vacuum device
DE102018103949A1 (de) * 2018-02-21 2019-08-22 Christof-Herbert Diener Niederdruckplasmakammer, Niederdruckplasmaanlage und Verfahren zur Herstellung einer Niederdruckplasmakammer
EP3564538B1 (de) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Vakuumsystem und verfahren zur herstellung eines solchen
CN112414014A (zh) * 2020-11-13 2021-02-26 河南泓医药业有限公司 一种独一味粉（冻干）的生产装置及生产方法
US11841189B1 (en) 2022-09-15 2023-12-12 Velico Medical, Inc. Disposable for a spray drying system
US12539355B2 (en) 2022-09-15 2026-02-03 Velico Medical, Inc. Dryer for a spray drying system
US11975274B2 (en) 2022-09-15 2024-05-07 Velico Medical, Inc. Blood plasma product
US12571587B2 (en) * 2022-09-15 2026-03-10 Velico Medical, Inc. Finishing apparatus for a spray drying system
US12246266B2 (en) 2022-09-15 2025-03-11 Velico Medical, Inc. Disposable for a spray drying system
KR102849869B1 (ko) * 2022-12-13 2025-08-25 (주)플라솔 플라즈마 챔버

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3795986A (en) * 1971-12-13 1974-03-12 Cenco Medical Health Supply Co Modular compartment sublimator
SE450692B (sv) * 1982-12-09 1987-07-20 Rovac Technology Ab Anordning for att mojliggora undertrycksbehandling i en behandlingskammare
US4526670A (en) * 1983-05-20 1985-07-02 Lfe Corporation Automatically loadable multifaceted electrode with load lock mechanism
US5288218A (en) * 1993-02-11 1994-02-22 Mikron Industries Extrusion calibrator
AU4658296A (en) * 1995-01-20 1996-08-07 Freezedry Specialties, Inc. Freeze dryer
US5746434A (en) * 1996-07-09 1998-05-05 Lam Research Corporation Chamber interfacing O-rings and method for implementing same
US6182851B1 (en) * 1998-09-10 2001-02-06 Applied Materials Inc. Vacuum processing chambers and method for producing
US6579579B2 (en) * 2000-12-29 2003-06-17 Alcan Technology & Management Ltd. Container made of a light metal alloy and process for its manufacture
US20030045098A1 (en) * 2001-08-31 2003-03-06 Applied Materials, Inc. Method and apparatus for processing a wafer
KR100716041B1 (ko) * 2004-06-02 2007-05-09 어플라이드 머티어리얼스, 인코포레이티드 챔버를 밀봉하기 위한 방법 및 장치
US8648977B2 (en) * 2004-06-02 2014-02-11 Applied Materials, Inc. Methods and apparatus for providing a floating seal having an isolated sealing surface for chamber doors
US9222728B2 (en) * 2006-04-24 2015-12-29 Medinstill Development Llc Penetrable and resealable lyophilization device
KR100892781B1 (ko) 2007-02-12 2009-04-15 주식회사 휴먼메디텍 진공챔버용 도어
DE102007021386A1 (de) * 2007-05-04 2008-11-06 Christof-Herbert Diener Kurztaktniederdruckplasmaanlage
DE102007060515A1 (de) * 2007-12-13 2009-06-18 Christof-Herbert Diener Oberflächenbehandlungsverfahren
DE102009002337B4 (de) * 2009-04-09 2013-07-11 Christof-Herbert Diener Indikator zur Überwachung eines Plasmas
JP2013519527A (ja) * 2010-02-12 2013-05-30 ノルスク・ヒドロ・アーエスアー モジュール式押出ダイ
CN202673051U (zh) * 2012-07-07 2013-01-16 东莞百进五金塑料有限公司 产品表面喷涂真空室活动支铰密封门
US10281538B2 (en) * 2012-09-05 2019-05-07 General Electric Company Warm bore cylinder assembly
US10207850B2 (en) * 2012-10-26 2019-02-19 Primapak, Llc. Flexible package and method of making same
CN112173427B (zh) * 2012-10-26 2023-01-03 优装有限责任公司 柔性包装和其制造方法
CN108498811B (zh) * 2013-03-13 2021-05-11 史赛克公司 能够提供容器中的被灭菌手术器械是否被正确灭菌的提示的灭菌容器
DE102014213942B4 (de) * 2014-07-17 2016-01-28 Christof-Herbert Diener Vakuumanlage, insbesondere Plasmaanlage, mit einem rundum geschlossenen Kammerstrangpressprofil

Also Published As

Publication number Publication date
DE102014213942A1 (de) 2016-01-21
US20170122663A1 (en) 2017-05-04
DE102014213942B4 (de) 2016-01-28
US10041730B2 (en) 2018-08-07
WO2016008844A1 (de) 2016-01-21
CN106537551A (zh) 2017-03-22
TR201810324T4 (tr) 2018-08-27
EP3170196A1 (de) 2017-05-24
CN106537551B (zh) 2018-05-08
EP3170196B1 (de) 2018-05-02

Similar Documents

Publication Publication Date Title
MX2016005207A (es) Vehiculo y metodo para abrir y cerrar una puerta del vehiculo.
AR079139A1 (es) Puerta de electrodomestico
MX2017003044A (es) Contenedor y cierre.
BR112015027838A2 (pt) válvula com assento removível
BR102014015057A8 (pt) porta traseira com sistema cng estruturalmente integrado
MX2017016390A (es) Lavadora.
BR112015023319A2 (pt) mainel de barbatana central de remoção
MX2017013965A (es) Luminaria de acento direccional.
BR112015019393A2 (pt) dispositivo de ejeção de fluido
PA8671101A1 (es) Sistema de cortina de aire para un gabinete refrigerado
TWD164834S (zh) 眼鏡框架之部分（五）
CL2015002038A1 (es) Estructura metálica de soporte de un cielo falso.
MX2016004397A (es) Cavidad de almacenamiento en persiana para cargas con almacenamiento oculto.
BR112016017436A2 (pt) Item de bagagem de volume variado
CL2015000970S1 (es) Motocicleta que en su cara frontal presenta un foco frontal dividido en dos zonas laterales de forma heptagonal alargada con bordes superior y lateral exterior biselados, se aprecia un par de carcasas laterales frontales convexas definidas por una zona superior triangular, dispuesta hacia arriba y a ambos lados del foco frontal.
EP3680118A4 (en) REAR WINDOW AND TAILGATE WITH THE REAR WINDOW
BR112017025557A2 (pt) banda de rodagem aperfeiçoada para pneu
MX2017009184A (es) Alojamiento de luminaria ajustable dimesionalmente.
ES2616834T3 (es) Procedimiento para la producción de un envase de bolsa de lámina fina
MX2015016540A (es) Sistema de cierre para huecos de paso.
MX2018014255A (es) Sistemas y metodos para una cubierta de llave con una etiqueta integrada.
CO2017002440A2 (es) Derivado de macrólido sustituido en la posición c-4”
CL2016002233A1 (es) Prensa de rodillos
ES1164708Y (es) Pieza y conjunto de cierre frontal para el montaje de cajones
ES2552958T3 (es) Junta para lunas con función de agua de lavado