ES552715A0 - Un microscopio de exploracion por efecto tunel. - Google Patents

Un microscopio de exploracion por efecto tunel.

Info

Publication number
ES552715A0
ES552715A0 ES552715A ES552715A ES552715A0 ES 552715 A0 ES552715 A0 ES 552715A0 ES 552715 A ES552715 A ES 552715A ES 552715 A ES552715 A ES 552715A ES 552715 A0 ES552715 A0 ES 552715A0
Authority
ES
Spain
Prior art keywords
tunnel effect
scan microscope
effect scan
microscope
tunnel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
ES552715A
Other languages
English (en)
Other versions
ES8707021A1 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of ES552715A0 publication Critical patent/ES552715A0/es
Publication of ES8707021A1 publication Critical patent/ES8707021A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
ES552715A 1985-03-07 1986-03-06 Un microscopio de exploracion por efecto tunel. Expired ES8707021A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85102554A EP0194323B1 (en) 1985-03-07 1985-03-07 Scanning tunneling microscope

Publications (2)

Publication Number Publication Date
ES552715A0 true ES552715A0 (es) 1987-07-01
ES8707021A1 ES8707021A1 (es) 1987-07-01

Family

ID=8193351

Family Applications (2)

Application Number Title Priority Date Filing Date
ES552715A Expired ES8707021A1 (es) 1985-03-07 1986-03-06 Un microscopio de exploracion por efecto tunel.
ES557154A Expired ES8802105A1 (es) 1985-03-07 1986-10-30 Metodo de fabricacion de una punta emisora de electrones para un microscopio de exploracion por efecto tunel.

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES557154A Expired ES8802105A1 (es) 1985-03-07 1986-10-30 Metodo de fabricacion de una punta emisora de electrones para un microscopio de exploracion por efecto tunel.

Country Status (6)

Country Link
US (1) US4668865A (es)
EP (1) EP0194323B1 (es)
JP (1) JPH0690005B2 (es)
CA (1) CA1252918A (es)
DE (1) DE3572030D1 (es)
ES (2) ES8707021A1 (es)

Families Citing this family (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE33387E (en) * 1985-11-26 1990-10-16 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
EP0252745A3 (en) * 1986-07-11 1990-01-24 AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY Relative displacement control apparatus
EP0262253A1 (en) * 1986-10-03 1988-04-06 International Business Machines Corporation Micromechanical atomic force sensor head
DE3752180T2 (de) * 1986-12-24 1998-07-30 Canon Kk Aufzeichnungs- und Wiedergabegerät
US4800274A (en) * 1987-02-02 1989-01-24 The Regents Of The University Of California High resolution atomic force microscope
JPS63238503A (ja) * 1987-03-27 1988-10-04 Jeol Ltd 走査トンネル顕微鏡におけるチツプ走査装置
JPS63304103A (ja) * 1987-06-05 1988-12-12 Hitachi Ltd 走査表面顕微鏡
US5255258A (en) * 1987-09-24 1993-10-19 Canon Kabushiki Kaisha Microprobe, preparation thereof and electronic device by use of said microprobe
JP2553661B2 (ja) * 1987-09-24 1996-11-13 キヤノン株式会社 微小プローグ及びその製造方法
EP0566214B1 (en) * 1987-09-24 1999-05-26 Canon Kabushiki Kaisha Microprobe
DE3850544T2 (de) * 1987-09-24 1994-11-24 Canon K.K., Tokio/Tokyo Mikrosonde, deren Herstellung und elektronisches Gerät, das diese Mikrosonde gebraucht.
US4868396A (en) * 1987-10-13 1989-09-19 Arizona Board Of Regents, Arizona State University Cell and substrate for electrochemical STM studies
JPH06105262B2 (ja) * 1987-11-27 1994-12-21 セイコー電子工業株式会社 電気化学測定およびトンネル電流同時測定方法および装置
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JP2577423B2 (ja) * 1988-02-29 1997-01-29 工業技術院長 大ストローク走査型トンネル顕微鏡
JP2594452B2 (ja) * 1988-03-04 1997-03-26 日本電信電話株式会社 表面形状測定装置
US4841148A (en) * 1988-03-21 1989-06-20 The Board Of Trustees Of The University Of Illinois Variable temperature scanning tunneling microscope
GB8818445D0 (en) * 1988-08-03 1988-09-07 Jones B L Stm probe
JPH0275902A (ja) * 1988-09-13 1990-03-15 Seiko Instr Inc ダイヤモンド探針及びその成形方法
US5220555A (en) * 1988-09-30 1993-06-15 Canon Kabushiki Kaisha Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
JP2896794B2 (ja) * 1988-09-30 1999-05-31 キヤノン株式会社 走査型トンネル電流検出装置，走査型トンネル顕微鏡，及び記録再生装置
EP0363550B1 (en) * 1988-10-14 1994-08-03 International Business Machines Corporation Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5210714A (en) * 1988-10-14 1993-05-11 International Business Machines Corporation Distance-controlled tunneling transducer and direct access storage unit employing the transducer
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
JPH02134503A (ja) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp 走査型トンネル顕微鏡
US4943719A (en) * 1989-01-17 1990-07-24 The Board Of Trustees Of The Leland Stanford University Microminiature cantilever stylus
JP2834173B2 (ja) * 1989-02-17 1998-12-09 株式会社日立製作所 走査型トンネル音響顕微鏡
US4942299A (en) * 1989-03-01 1990-07-17 Midwest Research Institute Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy
US4941753A (en) * 1989-04-07 1990-07-17 International Business Machines Corp. Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
US4925139A (en) * 1989-04-28 1990-05-15 International Business Machines Corporation Mechanical stage support for a scanning tunneling microscope
JPH02295050A (ja) * 1989-05-09 1990-12-05 Olympus Optical Co Ltd μ―ＳＴＭを用いた回路パターン作製装置および回路パターン作製方法
JPH02311702A (ja) * 1989-05-29 1990-12-27 Olympus Optical Co Ltd 走査型トンネル顕微鏡装置
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
US5075548A (en) * 1989-07-17 1991-12-24 Olympus Optical Co., Ltd. Tunnel current probe moving mechanism having parallel cantilevers
US4992659A (en) * 1989-07-27 1991-02-12 International Business Machines Corporation Near-field lorentz force microscopy
EP0413042B1 (en) * 1989-08-16 1992-12-16 International Business Machines Corporation Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope
US5021364A (en) * 1989-10-31 1991-06-04 The Board Of Trustees Of The Leland Stanford Junior University Microcantilever with integral self-aligned sharp tetrahedral tip
US5126574A (en) * 1989-10-10 1992-06-30 The United States Of America As Represented By The Secretary Of Commerce Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication
USRE36603E (en) * 1989-10-13 2000-03-07 International Business Machines Corp. Distance-controlled tunneling transducer and direct access storage unit employing the transducer
US5021672A (en) * 1989-12-22 1991-06-04 E. I. Du Pont De Nemours And Company Etching of nanoscale structures
US5253515A (en) * 1990-03-01 1993-10-19 Olympus Optical Co., Ltd. Atomic probe microscope and cantilever unit for use in the microscope
US5055680A (en) * 1990-04-03 1991-10-08 Lk Technologies, Inc. Scanning tunneling microscope
JP2624873B2 (ja) * 1990-05-16 1997-06-25 松下電器産業株式会社 原子間力顕微鏡用探針およびその製造方法
DE69012555T2 (de) * 1990-07-25 1995-04-06 International Business Machines Corp., Armonk, N.Y. Methode zur Herstellung von mikromechanischen Sensoren für AFM/STM/MFM-Profilometrie und mikromechanischer AFM/STM/MFM-Sensorkopf.
US5163328A (en) * 1990-08-06 1992-11-17 Colin Electronics Co., Ltd. Miniature pressure sensor and pressure sensor arrays
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
US5047649A (en) * 1990-10-09 1991-09-10 International Business Machines Corporation Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
US5283437A (en) * 1990-12-21 1994-02-01 International Business Machines Corporation Pneumatically and electrostatically driven scanning tunneling microscope
EP0491973B1 (en) * 1990-12-21 1995-11-02 International Business Machines Corporation Integrated pneumatically and electrostatically controlled scanning tunneling microscope and method of making the same
JP3010318B2 (ja) * 1991-02-26 2000-02-21 キヤノン株式会社 微小プローブ、その製造方法、該プローブを用いた表面観察装置及び情報処理装置
US5235187A (en) * 1991-05-14 1993-08-10 Cornell Research Foundation Methods of fabricating integrated, aligned tunneling tip pairs
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP3148946B2 (ja) * 1991-05-30 2001-03-26 キヤノン株式会社 探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
US5606162A (en) * 1991-06-13 1997-02-25 British Technology Group Limited Microprobe for surface-scanning microscopes
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
US5319961A (en) * 1991-09-17 1994-06-14 Olympus Optical Co., Ltd. Cantilever chip for use in scanning probe microscope
JP3184619B2 (ja) * 1991-09-24 2001-07-09 キヤノン株式会社 平行平面保持機構及びそれを用いたメモリ装置及びｓｔｍ装置
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5763782A (en) * 1992-03-16 1998-06-09 British Technology Group Limited Micromechanical sensor
US5179499A (en) * 1992-04-14 1993-01-12 Cornell Research Foundation, Inc. Multi-dimensional precision micro-actuator
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US5287082A (en) * 1992-07-02 1994-02-15 Cornell Research Foundation, Inc. Submicron isolated, released resistor structure
JP3402661B2 (ja) * 1992-07-06 2003-05-06 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた情報処理装置
US5399415A (en) * 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
JP3054900B2 (ja) * 1993-03-10 2000-06-19 セイコーインスツルメンツ株式会社 微細加工装置
DE4309206C1 (de) * 1993-03-22 1994-09-15 Texas Instruments Deutschland Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
JP3192887B2 (ja) * 1994-09-21 2001-07-30 キヤノン株式会社 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
WO1996035212A1 (de) * 1995-04-29 1996-11-07 International Business Machines Corporation Mikromechanisch gefertigter schreib-/lesekopf für ladungsspeicherelemente
US5717631A (en) * 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
JP3576677B2 (ja) * 1996-01-19 2004-10-13 キヤノン株式会社 静電アクチュエータ及び、該アクチュエータを用いたプローブ、走査型プローブ顕微鏡、加工装置、記録再生装置
JP2925114B2 (ja) * 1996-07-22 1999-07-28 株式会社日立製作所 測定装置
FR2755224B1 (fr) * 1996-10-24 1998-12-04 Suisse Electronique Microtech Capteur a effet tunnel, notamment pour relever la topographie d'une surface
US6088320A (en) * 1997-02-19 2000-07-11 International Business Machines Corporation Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
US7156965B1 (en) 2001-11-09 2007-01-02 Veeco Instruments Inc. Scanning electrochemical potential microscope
DE10155930B4 (de) * 2001-11-14 2020-09-24 Nano Analytik Gmbh Feldeffekttransistor-Sensor
JP3755460B2 (ja) * 2001-12-26 2006-03-15 ソニー株式会社 静電駆動型ｍｅｍｓ素子とその製造方法、光学ｍｅｍｓ素子、光変調素子、ｇｌｖデバイス、レーザディスプレイ、及びｍｅｍｓ装置
SG101537A1 (en) * 2002-06-03 2004-01-30 Sensfab Pte Ltd Method of forming atomic force microscope tips
US20050128927A1 (en) * 2003-12-15 2005-06-16 Hewlett-Packard Development Co., L.P. Electrostatic actuator for contact probe storage device
KR100790893B1 (ko) * 2006-10-20 2008-01-03 삼성전자주식회사 볼록한 저항성 팁을 구비한 반도체 탐침 및 그 제조방법
US11435178B2 (en) * 2017-08-25 2022-09-06 Hitachi High-Tech Corporation Calibration sample, electron beam adjustment method and electron beam apparatus using same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4203128A (en) * 1976-11-08 1980-05-13 Wisconsin Alumni Research Foundation Electrostatically deformable thin silicon membranes
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
EP0071666B1 (en) * 1981-08-10 1985-02-06 International Business Machines Corporation Electric travelling support
US4506154A (en) * 1982-10-22 1985-03-19 Scire Fredric E Planar biaxial micropositioning stage

Also Published As

Publication number Publication date
DE3572030D1 (en) 1989-09-07
US4668865A (en) 1987-05-26
CA1252918A (en) 1989-04-18
JPS61206148A (ja) 1986-09-12
ES8802105A1 (es) 1988-03-16
JPH0690005B2 (ja) 1994-11-14
ES8707021A1 (es) 1987-07-01
ES557154A0 (es) 1988-03-16
EP0194323A1 (en) 1986-09-17
EP0194323B1 (en) 1989-08-02

Similar Documents

Publication Publication Date Title
DE3854620D1 (de) Tunnel-abtastmikroskop.
FI895201A0 (fi) Oevervakningsanordning foer en byggnads tekniska drift.
DE3678142D1 (de) Laserabtastmikroskop.
FI873241A7 (fi) Graafinen työasema.
DE3689417D1 (de) Lichtablenkungsvorrichtung.
FI864175A7 (fi) Laddad projektil.
DE3576309D1 (de) Grafisches design-material.
FI880972L (fi) Fenylkarbamat.
FI870638L (fi) Uppvaermningsapparat foer under tryck staoende oeverfoeringsvaetska.
FI860148A0 (fi) Saerskilt foer en roerfog avsedd taetningskropp samt foerfarande och form foer framstaellning daerav.
DE3687372D1 (de) Abtastanordnung.
DE3686131D1 (de) Faltblattanordnung.
DE68907466D1 (de) Bahnfuehrungsvorrichtung.
DE3576752D1 (de) Abtastendes ultraschallmikroskop.
FI871055A0 (fi) Taendroer foer projektil.
FI863472A7 (fi) Polymera tryckande reagenser foer sulfidmineraler.
FI865320L (fi) Antibiotiska a 40926 n-acylaminoglukuronyl -aglykoner och antibiotisk a 40926 aglykon.
DE68907211D1 (de) Markierungsanordnung.
FI871056A0 (fi) Taendroer foer projektil.
FI862185A7 (fi) Hoeghastighetsprojektil.
NO166167C (no) Fortykkeranordning.
NO865120D0 (no) Bjelker.
FI862063L (fi) Skoparm foer en graevmaskin.
FI870257A7 (fi) Bearbetningsfoerfarande foer material.
NO860442L (no) Straalebuntformende innretning.

Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 19971201