FR1126466A - Nouvelle source productrice d'ions d'éléments réfractaires ou non - Google Patents

Nouvelle source productrice d'ions d'éléments réfractaires ou non

Info

Publication number
FR1126466A
FR1126466A FR1126466DA FR1126466A FR 1126466 A FR1126466 A FR 1126466A FR 1126466D A FR1126466D A FR 1126466DA FR 1126466 A FR1126466 A FR 1126466A
Authority
FR
France
Prior art keywords
refractory
ions
new source
elements
refractory elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA filed Critical Centre National de la Recherche Scientifique CNRS
Application granted granted Critical
Publication of FR1126466A publication Critical patent/FR1126466A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
FR1126466D 1955-03-26 1955-03-26 Nouvelle source productrice d'ions d'éléments réfractaires ou non Expired FR1126466A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1126466T 1955-03-26

Publications (1)

Publication Number Publication Date
FR1126466A true FR1126466A (fr) 1956-11-23

Family

ID=9635026

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1126466D Expired FR1126466A (fr) 1955-03-26 1955-03-26 Nouvelle source productrice d'ions d'éléments réfractaires ou non

Country Status (2)

Country Link
FR (1) FR1126466A (fr)
GB (1) GB829783A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422253A1 (fr) * 1978-04-05 1979-11-02 Atomic Energy Authority Uk Source d'ions

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3569706A (en) * 1965-10-22 1971-03-09 Physics Technology Lab Inc Method and apparatus for generating a continuous beam of neutral atoms
DE1900569C3 (de) * 1969-01-07 1976-01-08 Varian Mat Gmbh, 2800 Bremen Festkörper-Ionenquelle
US4344019A (en) 1980-11-10 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Penning discharge ion source with self-cleaning aperture
US4847504A (en) * 1983-08-15 1989-07-11 Applied Materials, Inc. Apparatus and methods for ion implantation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2422253A1 (fr) * 1978-04-05 1979-11-02 Atomic Energy Authority Uk Source d'ions

Also Published As

Publication number Publication date
GB829783A (en) 1960-03-09

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