FR1184541A - Appareil pour la vaporisation de métaux et métalloïdes - Google Patents

Appareil pour la vaporisation de métaux et métalloïdes

Info

Publication number
FR1184541A
FR1184541A FR1184541DA FR1184541A FR 1184541 A FR1184541 A FR 1184541A FR 1184541D A FR1184541D A FR 1184541DA FR 1184541 A FR1184541 A FR 1184541A
Authority
FR
France
Prior art keywords
metalloids
vaporizing metals
vaporizing
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum Ltd
Original Assignee
Edwards High Vacuum Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum Ltd filed Critical Edwards High Vacuum Ltd
Application granted granted Critical
Publication of FR1184541A publication Critical patent/FR1184541A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1184541D 1957-02-15 1957-02-15 Appareil pour la vaporisation de métaux et métalloïdes Expired FR1184541A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1184541T 1957-02-15

Publications (1)

Publication Number Publication Date
FR1184541A true FR1184541A (fr) 1959-07-22

Family

ID=9663526

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1184541D Expired FR1184541A (fr) 1957-02-15 1957-02-15 Appareil pour la vaporisation de métaux et métalloïdes

Country Status (1)

Country Link
FR (1) FR1184541A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006108089A1 (fr) * 2005-04-06 2006-10-12 North Carolina State University Articles denses et profiles construits a partir d'un materiau refractaire et procedes de preparation de ces articles

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006108089A1 (fr) * 2005-04-06 2006-10-12 North Carolina State University Articles denses et profiles construits a partir d'un materiau refractaire et procedes de preparation de ces articles
US7632454B2 (en) 2005-04-06 2009-12-15 North Carolina State University Dense, shaped articles constructed of a refractory material and methods of preparing such articles
EP2368867A1 (fr) * 2005-04-06 2011-09-28 North Carolina State University Articles formés, denses, composés à partir d'un matériau réfractaire
US8414677B2 (en) 2005-04-06 2013-04-09 North Carolina State University Dense, shaped articles constructed of a refractory material and methods of preparing such articles

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