FR1224972A - Planeuse-polisseuse de métallogénie - Google Patents

Planeuse-polisseuse de métallogénie

Info

Publication number
FR1224972A
FR1224972A FR786246A FR786246A FR1224972A FR 1224972 A FR1224972 A FR 1224972A FR 786246 A FR786246 A FR 786246A FR 786246 A FR786246 A FR 786246A FR 1224972 A FR1224972 A FR 1224972A
Authority
FR
France
Prior art keywords
metallogeny
leveler
polisher
metallogeny leveler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR786246A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR786246A priority Critical patent/FR1224972A/fr
Application granted granted Critical
Publication of FR1224972A publication Critical patent/FR1224972A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B35/00—Machines or devices designed for superfinishing surfaces on work, i.e. by means of abrading blocks reciprocating with high frequency

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
FR786246A 1959-02-10 1959-02-10 Planeuse-polisseuse de métallogénie Expired FR1224972A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR786246A FR1224972A (fr) 1959-02-10 1959-02-10 Planeuse-polisseuse de métallogénie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR786246A FR1224972A (fr) 1959-02-10 1959-02-10 Planeuse-polisseuse de métallogénie

Publications (1)

Publication Number Publication Date
FR1224972A true FR1224972A (fr) 1960-06-28

Family

ID=8711047

Family Applications (1)

Application Number Title Priority Date Filing Date
FR786246A Expired FR1224972A (fr) 1959-02-10 1959-02-10 Planeuse-polisseuse de métallogénie

Country Status (1)

Country Link
FR (1) FR1224972A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2489959A1 (fr) * 1980-09-10 1982-03-12 Ebauches Sa Procede et dispositif de polissage d'un echantillon solide, et echantillon poli selon ce procede
EP0047720A3 (fr) * 1980-09-10 1982-03-24 Ebauches S.A. Procédé et dispositif de polissage d'un échantillon solide
EP0209764A3 (en) * 1985-07-22 1988-06-01 Alfred Biermann Method and apparatus for preparing thin slices of samples containing hard components for transmission microscopy
WO1996036459A1 (fr) * 1995-05-18 1996-11-21 Exclusive Design Company, Inc. Procede et appareil ameliore de polissage chimio-mecanique
US6488565B1 (en) 2000-08-29 2002-12-03 Applied Materials, Inc. Apparatus for chemical mechanical planarization having nested load cups

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2489959A1 (fr) * 1980-09-10 1982-03-12 Ebauches Sa Procede et dispositif de polissage d'un echantillon solide, et echantillon poli selon ce procede
EP0047720A3 (fr) * 1980-09-10 1982-03-24 Ebauches S.A. Procédé et dispositif de polissage d'un échantillon solide
EP0209764A3 (en) * 1985-07-22 1988-06-01 Alfred Biermann Method and apparatus for preparing thin slices of samples containing hard components for transmission microscopy
WO1996036459A1 (fr) * 1995-05-18 1996-11-21 Exclusive Design Company, Inc. Procede et appareil ameliore de polissage chimio-mecanique
US5759918A (en) * 1995-05-18 1998-06-02 Obsidian, Inc. Method for chemical mechanical polishing
US5851136A (en) * 1995-05-18 1998-12-22 Obsidian, Inc. Apparatus for chemical mechanical polishing
US5908530A (en) * 1995-05-18 1999-06-01 Obsidian, Inc. Apparatus for chemical mechanical polishing
US5938884A (en) * 1995-05-18 1999-08-17 Obsidian, Inc. Apparatus for chemical mechanical polishing
US6488565B1 (en) 2000-08-29 2002-12-03 Applied Materials, Inc. Apparatus for chemical mechanical planarization having nested load cups

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