FR1323202A - Canon à électrons - Google Patents

Canon à électrons

Info

Publication number
FR1323202A
FR1323202A FR896059A FR896059A FR1323202A FR 1323202 A FR1323202 A FR 1323202A FR 896059 A FR896059 A FR 896059A FR 896059 A FR896059 A FR 896059A FR 1323202 A FR1323202 A FR 1323202A
Authority
FR
France
Prior art keywords
electron gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR896059A
Other languages
English (en)
Inventor
David Sciaky
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US109575A external-priority patent/US3187216A/en
Priority claimed from US112084A external-priority patent/US3197669A/en
Application filed filed Critical
Priority to FR896059A priority Critical patent/FR1323202A/fr
Application granted granted Critical
Publication of FR1323202A publication Critical patent/FR1323202A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/07—Eliminating deleterious effects due to thermal effects or electric or magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR896059A 1961-05-12 1962-04-28 Canon à électrons Expired FR1323202A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR896059A FR1323202A (fr) 1961-05-12 1962-04-28 Canon à électrons

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US109575A US3187216A (en) 1961-05-12 1961-05-12 Electron gun having a releasably clamped electron emitting element
US112084A US3197669A (en) 1961-05-12 1961-05-23 Electron emitting element for electron gun
FR896059A FR1323202A (fr) 1961-05-12 1962-04-28 Canon à électrons
US380746A US3322930A (en) 1961-05-12 1964-07-07 Protective shield for electron gun

Publications (1)

Publication Number Publication Date
FR1323202A true FR1323202A (fr) 1963-04-05

Family

ID=27445422

Family Applications (1)

Application Number Title Priority Date Filing Date
FR896059A Expired FR1323202A (fr) 1961-05-12 1962-04-28 Canon à électrons

Country Status (1)

Country Link
FR (1) FR1323202A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1208830B (de) * 1963-06-12 1966-01-13 Dr Jakob Bingel Vorrichtung zur Erzeugung eines Elektronen-strahlbuendels hoher Leistung fuer Erhitzungs-zwecke

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1208830B (de) * 1963-06-12 1966-01-13 Dr Jakob Bingel Vorrichtung zur Erzeugung eines Elektronen-strahlbuendels hoher Leistung fuer Erhitzungs-zwecke

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