FR1345475A - Procédé et dispositif de dépôt d'une pellicule mince sur un support - Google Patents

Procédé et dispositif de dépôt d'une pellicule mince sur un support

Info

Publication number
FR1345475A
FR1345475A FR922653A FR922653A FR1345475A FR 1345475 A FR1345475 A FR 1345475A FR 922653 A FR922653 A FR 922653A FR 922653 A FR922653 A FR 922653A FR 1345475 A FR1345475 A FR 1345475A
Authority
FR
France
Prior art keywords
depositing
support
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR922653A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allard Way Holdings Ltd
Original Assignee
Elliott Brothers London Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB3066/62A external-priority patent/GB969065A/en
Application filed by Elliott Brothers London Ltd filed Critical Elliott Brothers London Ltd
Priority to FR922653A priority Critical patent/FR1345475A/fr
Application granted granted Critical
Publication of FR1345475A publication Critical patent/FR1345475A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/048—Coating on selected surface areas, e.g. using masks using irradiation by energy or particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR922653A 1962-01-26 1963-01-25 Procédé et dispositif de dépôt d'une pellicule mince sur un support Expired FR1345475A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR922653A FR1345475A (fr) 1962-01-26 1963-01-25 Procédé et dispositif de dépôt d'une pellicule mince sur un support

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB3066/62A GB969065A (en) 1962-01-26 1962-01-26 Improvements in or relating to deposition of thin films
FR922653A FR1345475A (fr) 1962-01-26 1963-01-25 Procédé et dispositif de dépôt d'une pellicule mince sur un support

Publications (1)

Publication Number Publication Date
FR1345475A true FR1345475A (fr) 1963-12-06

Family

ID=26199532

Family Applications (1)

Application Number Title Priority Date Filing Date
FR922653A Expired FR1345475A (fr) 1962-01-26 1963-01-25 Procédé et dispositif de dépôt d'une pellicule mince sur un support

Country Status (1)

Country Link
FR (1) FR1345475A (fr)

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