FR1375523A - Support de pièce pour dispositif à décharge luminescente - Google Patents

Support de pièce pour dispositif à décharge luminescente

Info

Publication number
FR1375523A
FR1375523A FR955021A FR955021A FR1375523A FR 1375523 A FR1375523 A FR 1375523A FR 955021 A FR955021 A FR 955021A FR 955021 A FR955021 A FR 955021A FR 1375523 A FR1375523 A FR 1375523A
Authority
FR
France
Prior art keywords
discharge device
glow discharge
workpiece holder
workpiece
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR955021A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US240000A external-priority patent/US3141989A/en
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Priority to FR955021A priority Critical patent/FR1375523A/fr
Application granted granted Critical
Publication of FR1375523A publication Critical patent/FR1375523A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
FR955021A 1962-11-26 1963-11-26 Support de pièce pour dispositif à décharge luminescente Expired FR1375523A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR955021A FR1375523A (fr) 1962-11-26 1963-11-26 Support de pièce pour dispositif à décharge luminescente

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US240000A US3141989A (en) 1962-11-26 1962-11-26 Workpiece support for glow discharge apparatus
FR955021A FR1375523A (fr) 1962-11-26 1963-11-26 Support de pièce pour dispositif à décharge luminescente

Publications (1)

Publication Number Publication Date
FR1375523A true FR1375523A (fr) 1964-10-16

Family

ID=26204535

Family Applications (1)

Application Number Title Priority Date Filing Date
FR955021A Expired FR1375523A (fr) 1962-11-26 1963-11-26 Support de pièce pour dispositif à décharge luminescente

Country Status (1)

Country Link
FR (1) FR1375523A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (fr) * 1978-01-31 1979-08-31 Blinov Viktor Four electrique pour le traitement et le durcissement chimico-thermique de produits a l'aide d'une decharge luminescente

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (fr) * 1978-01-31 1979-08-31 Blinov Viktor Four electrique pour le traitement et le durcissement chimico-thermique de produits a l'aide d'une decharge luminescente

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