FR1406093A - Procédé par impact de dépôt d'un film mince - Google Patents

Procédé par impact de dépôt d'un film mince

Info

Publication number
FR1406093A
FR1406093A FR977864A FR977864A FR1406093A FR 1406093 A FR1406093 A FR 1406093A FR 977864 A FR977864 A FR 977864A FR 977864 A FR977864 A FR 977864A FR 1406093 A FR1406093 A FR 1406093A
Authority
FR
France
Prior art keywords
thin film
film deposition
impact method
deposition impact
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR977864A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US290794A external-priority patent/US3278407A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Priority to FR977864A priority Critical patent/FR1406093A/fr
Application granted granted Critical
Publication of FR1406093A publication Critical patent/FR1406093A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR977864A 1963-06-26 1964-06-11 Procédé par impact de dépôt d'un film mince Expired FR1406093A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR977864A FR1406093A (fr) 1963-06-26 1964-06-11 Procédé par impact de dépôt d'un film mince

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US290794A US3278407A (en) 1963-06-26 1963-06-26 Deposition of thin film by sputtering
FR977864A FR1406093A (fr) 1963-06-26 1964-06-11 Procédé par impact de dépôt d'un film mince

Publications (1)

Publication Number Publication Date
FR1406093A true FR1406093A (fr) 1965-07-16

Family

ID=26208249

Family Applications (1)

Application Number Title Priority Date Filing Date
FR977864A Expired FR1406093A (fr) 1963-06-26 1964-06-11 Procédé par impact de dépôt d'un film mince

Country Status (1)

Country Link
FR (1) FR1406093A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4124474A (en) * 1976-11-15 1978-11-07 Commissariat A L'energie Atomique Method and apparatus for controlling the deposition of films by reactive sputtering

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4124474A (en) * 1976-11-15 1978-11-07 Commissariat A L'energie Atomique Method and apparatus for controlling the deposition of films by reactive sputtering

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