FR1433202A - Machines à faisceaux électroniques - Google Patents

Machines à faisceaux électroniques

Info

Publication number
FR1433202A
FR1433202A FR16979A FR16979A FR1433202A FR 1433202 A FR1433202 A FR 1433202A FR 16979 A FR16979 A FR 16979A FR 16979 A FR16979 A FR 16979A FR 1433202 A FR1433202 A FR 1433202A
Authority
FR
France
Prior art keywords
electronic beam
beam machines
machines
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR16979A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELECTRON BEAM DEVICES CORP
Original Assignee
ELECTRON BEAM DEVICES CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELECTRON BEAM DEVICES CORP filed Critical ELECTRON BEAM DEVICES CORP
Priority to FR16979A priority Critical patent/FR1433202A/fr
Application granted granted Critical
Publication of FR1433202A publication Critical patent/FR1433202A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. program control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
FR16979A 1964-05-18 1965-05-13 Machines à faisceaux électroniques Expired FR1433202A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR16979A FR1433202A (fr) 1964-05-18 1965-05-13 Machines à faisceaux électroniques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36818864A 1964-05-18 1964-05-18
FR16979A FR1433202A (fr) 1964-05-18 1965-05-13 Machines à faisceaux électroniques

Publications (1)

Publication Number Publication Date
FR1433202A true FR1433202A (fr) 1966-03-25

Family

ID=26163833

Family Applications (1)

Application Number Title Priority Date Filing Date
FR16979A Expired FR1433202A (fr) 1964-05-18 1965-05-13 Machines à faisceaux électroniques

Country Status (1)

Country Link
FR (1) FR1433202A (fr)

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