FR1441504A - Procédé de polissage - Google Patents

Procédé de polissage

Info

Publication number
FR1441504A
FR1441504A FR6501A FR6501A FR1441504A FR 1441504 A FR1441504 A FR 1441504A FR 6501 A FR6501 A FR 6501A FR 6501 A FR6501 A FR 6501A FR 1441504 A FR1441504 A FR 1441504A
Authority
FR
France
Prior art keywords
polishing process
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6501A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Priority to FR6501A priority Critical patent/FR1441504A/fr
Priority to NL6502201A priority patent/NL134092C/nl
Application granted granted Critical
Publication of FR1441504A publication Critical patent/FR1441504A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H10P52/40—Chemomechanical polishing [CMP]
    • H10P52/402—Chemomechanical polishing [CMP] of semiconductor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
FR6501A 1965-01-22 1965-01-22 Procédé de polissage Expired FR1441504A (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR6501A FR1441504A (fr) 1965-01-22 1965-01-22 Procédé de polissage
NL6502201A NL134092C (nl) 1965-01-22 1965-02-22 Werkwijze voor het polijsten van materialen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR6501A FR1441504A (fr) 1965-01-22 1965-01-22 Procédé de polissage
NL6502201A NL134092C (nl) 1965-01-22 1965-02-22 Werkwijze voor het polijsten van materialen

Publications (1)

Publication Number Publication Date
FR1441504A true FR1441504A (fr) 1966-06-10

Family

ID=46757370

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6501A Expired FR1441504A (fr) 1965-01-22 1965-01-22 Procédé de polissage

Country Status (2)

Country Link
FR (1) FR1441504A (fr)
NL (1) NL134092C (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634464A1 (fr) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Méthode de polissage d'une surface de métal noble ou d'un alliage à majorité de métal noble
EP0634465A1 (fr) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Méthode de polissage d'une surface en cuivre ou en alliage à majorité de cuivre

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0634464A1 (fr) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Méthode de polissage d'une surface de métal noble ou d'un alliage à majorité de métal noble
EP0634465A1 (fr) * 1993-07-12 1995-01-18 Koninklijke Philips Electronics N.V. Méthode de polissage d'une surface en cuivre ou en alliage à majorité de cuivre
BE1007281A3 (nl) * 1993-07-12 1995-05-09 Philips Electronics Nv Werkwijze voor het polijsten van een oppervlak van koper of een in hoofdzaak koper bevattende legering, magneetkop vervaardigbaar met gebruikmaking van de werkwijze, röntgenstralingcollimerend element en röntgenstralingreflecterend element, beide voorzien van een volgens de werkwijze gepolijst oppervlak en polijstmiddel geschikt voor toepassing in de werkwijze.
BE1007280A3 (nl) * 1993-07-12 1995-05-09 Philips Electronics Nv Werkwijze voor het polijsten van een oppervlak van een edelmetaal of een in hoofdzaak edelmetaal bevattende legering, magneetkop vervaardigbaar met gebruikmaking van de werkwijze en polijstmiddel geschikt voor toepassing in de werkwijze.

Also Published As

Publication number Publication date
NL6502201A (nl) 1966-08-23
NL134092C (nl) 1972-05-15

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