FR1442181A - Procédé photolithographique - Google Patents

Procédé photolithographique

Info

Publication number
FR1442181A
FR1442181A FR27545A FR27545A FR1442181A FR 1442181 A FR1442181 A FR 1442181A FR 27545 A FR27545 A FR 27545A FR 27545 A FR27545 A FR 27545A FR 1442181 A FR1442181 A FR 1442181A
Authority
FR
France
Prior art keywords
photolithographic process
photolithographic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR27545A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lanteris Space LLC
Original Assignee
Philco Ford Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US388200A external-priority patent/US3415648A/en
Application filed by Philco Ford Corp filed Critical Philco Ford Corp
Priority to FR27545A priority Critical patent/FR1442181A/fr
Application granted granted Critical
Publication of FR1442181A publication Critical patent/FR1442181A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/04—Chromates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
FR27545A 1964-08-07 1965-08-06 Procédé photolithographique Expired FR1442181A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR27545A FR1442181A (fr) 1964-08-07 1965-08-06 Procédé photolithographique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US388200A US3415648A (en) 1964-08-07 1964-08-07 Pva etch masking process
FR27545A FR1442181A (fr) 1964-08-07 1965-08-06 Procédé photolithographique

Publications (1)

Publication Number Publication Date
FR1442181A true FR1442181A (fr) 1966-06-10

Family

ID=26165296

Family Applications (1)

Application Number Title Priority Date Filing Date
FR27545A Expired FR1442181A (fr) 1964-08-07 1965-08-06 Procédé photolithographique

Country Status (1)

Country Link
FR (1) FR1442181A (fr)

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