FR1486265A - Procédé pour déterminer la résistivité - Google Patents

Procédé pour déterminer la résistivité

Info

Publication number
FR1486265A
FR1486265A FR68832A FR68832A FR1486265A FR 1486265 A FR1486265 A FR 1486265A FR 68832 A FR68832 A FR 68832A FR 68832 A FR68832 A FR 68832A FR 1486265 A FR1486265 A FR 1486265A
Authority
FR
France
Prior art keywords
determining resistivity
resistivity
determining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR68832A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of FR1486265A publication Critical patent/FR1486265A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/20—Measuring earth resistance; Measuring contact resistance, e.g. of earth connections, e.g. plates
    • G01R27/205—Measuring contact resistance of connections, e.g. of earth connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
FR68832A 1965-07-08 1966-07-08 Procédé pour déterminer la résistivité Expired FR1486265A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US470377A US3416078A (en) 1965-07-08 1965-07-08 Method of determining resistivity of a thin layer

Publications (1)

Publication Number Publication Date
FR1486265A true FR1486265A (fr) 1967-06-23

Family

ID=23867388

Family Applications (1)

Application Number Title Priority Date Filing Date
FR68832A Expired FR1486265A (fr) 1965-07-08 1966-07-08 Procédé pour déterminer la résistivité

Country Status (4)

Country Link
US (1) US3416078A (fr)
DE (1) DE1541797B1 (fr)
FR (1) FR1486265A (fr)
GB (1) GB1086034A (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE759342A (fr) * 1969-11-24 1971-05-24 Westinghouse Electric Corp Appareil et methode pour la determination automatique de la resistance d'etalement, la resistivite et la concentration d'impuretes dans des corps semi-conducteurs
DE2808902C3 (de) * 1978-03-02 1980-12-18 Mahle Gmbh, 7000 Stuttgart Verfahren zur zerstörungsfreien Prüfung der Primär-Silizium-Verteilung an der Oberfläche von Werkstücken aus siliziumhaltigen Aluminiumlegierungen
US4335350A (en) * 1980-05-23 1982-06-15 Chen James T C Apparatus for probing semiconductor wafers
US4767591A (en) * 1983-02-23 1988-08-30 The United States Of America As Represented By The Department Of Energy Resistance probe for energetic particle dosimetry
US4725773A (en) * 1986-06-27 1988-02-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Cross-contact chain
HU210576B (en) * 1986-08-13 1995-05-29 Budapesti Eletromos Muevek Instrument for measuring contact resistance for checking completness of the mains line connections
US5221893A (en) * 1990-04-09 1993-06-22 Kabushiki Kaisha Toshiba Method and device for diagnosis of paint film deterioration
US5691648A (en) * 1992-11-10 1997-11-25 Cheng; David Method and apparatus for measuring sheet resistance and thickness of thin films and substrates
US5657552A (en) * 1995-11-09 1997-08-19 Reineck; Rollin Device for measuring distances on globes or maps
US7372584B2 (en) * 2005-04-11 2008-05-13 Rudolph Technologies, Inc. Dual photo-acoustic and resistivity measurement system
PL2748620T3 (pl) * 2011-08-26 2017-04-28 Saint-Gobain Glass France Układy i sposób wyznaczania rezystancji stykowej warstw elektrycznie przewodzących
KR102114103B1 (ko) * 2018-11-05 2020-05-22 주식회사 아바코 산화물 반도체 박막 검사장치 및 산화물 반도체 박막 검사방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR771305A (fr) * 1934-06-27 1934-10-04 Procédé pour la vérification de la qualité des soudures et appareils pour la mise en ceuvre de ce procédé
DE1062813B (de) * 1956-10-18 1959-08-06 Telefunken Gmbh Anordnung zur fortlaufenden selbsttaetigen Messung des elektrischen Leitwerkes einesfesten, anisotropen Koerpers, insbesondere eines Halbleiterkoerpers
US2921257A (en) * 1956-12-28 1960-01-12 Libbey Owens Ford Glass Co Method of testing electrically conducting films
US3211999A (en) * 1960-04-27 1965-10-12 Western Electric Co Method and apparatus for measuring semiconductor volume resistivity by transmission loss in a resonant cavity
DE1172370B (de) * 1961-09-30 1964-06-18 Siemens Ag Einrichtung zum Messen des spezifischen elektrischen Widerstandes eines Laengen-abschnittes eines stabfoermigen Halbleiterkoerpers
CH399588A (de) * 1962-07-17 1965-09-30 Siemens Ag Verfahren zum Bestimmen des spezifischen Widerstandes einer dünnen Halbleiterschicht

Also Published As

Publication number Publication date
US3416078A (en) 1968-12-10
GB1086034A (en) 1967-10-04
DE1541797B1 (de) 1970-09-03

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