FR1492706A - Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs - Google Patents

Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs

Info

Publication number
FR1492706A
FR1492706A FR76540A FR76540A FR1492706A FR 1492706 A FR1492706 A FR 1492706A FR 76540 A FR76540 A FR 76540A FR 76540 A FR76540 A FR 76540A FR 1492706 A FR1492706 A FR 1492706A
Authority
FR
France
Prior art keywords
sorting
measuring
semiconductor wafer
isolated elements
isolated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR76540A
Other languages
English (en)
Inventor
Walter Klossika
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefunken Patentverwertungs GmbH
Original Assignee
Telefunken Patentverwertungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19651514872 priority Critical patent/DE1514872C/de
Priority to GB37898/66A priority patent/GB1153008A/en
Application filed by Telefunken Patentverwertungs GmbH filed Critical Telefunken Patentverwertungs GmbH
Priority to FR76540A priority patent/FR1492706A/fr
Application granted granted Critical
Publication of FR1492706A publication Critical patent/FR1492706A/fr
Priority to US788677A priority patent/US3503500A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0611—Sorting devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316—Testing of analog circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S209/00—Classifying, separating, and assorting solids
    • Y10S209/905—Feeder conveyor holding item by suction

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR76540A 1965-09-18 1966-09-15 Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs Expired FR1492706A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE19651514872 DE1514872C (de) 1965-09-18 1965-09-18 Verfahren zum Messen und Sortieren der Einzelelemente einer Halbleiterscheibe
GB37898/66A GB1153008A (en) 1965-09-18 1966-08-24 Method of and apparatus for Measuring and Sorting the Individual Elements in a Semiconductor Wafer
FR76540A FR1492706A (fr) 1965-09-18 1966-09-15 Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs
US788677A US3503500A (en) 1965-09-18 1968-12-09 Sorting apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DET0029430 1965-09-18
FR76540A FR1492706A (fr) 1965-09-18 1966-09-15 Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs

Publications (1)

Publication Number Publication Date
FR1492706A true FR1492706A (fr) 1967-08-18

Family

ID=67543960

Family Applications (1)

Application Number Title Priority Date Filing Date
FR76540A Expired FR1492706A (fr) 1965-09-18 1966-09-15 Procédé de mesure et de tri des éléments isolés d'une plaquette de semi-conducteurs

Country Status (3)

Country Link
US (1) US3503500A (fr)
FR (1) FR1492706A (fr)
GB (1) GB1153008A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001086703A3 (fr) * 2000-05-08 2002-10-03 Micro Component Technology Inc Procede et installation de triage de dispositifs semi-conducteurs

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3623603A (en) * 1967-08-31 1971-11-30 Western Electric Co Magnetic identification and separation of small parts
US3584741A (en) * 1969-06-30 1971-06-15 Ibm Batch sorting apparatus
US3664499A (en) * 1970-11-06 1972-05-23 Fairchild Camera Instr Co High speed automatic sequential tester-handler
US3730342A (en) * 1971-02-24 1973-05-01 Western Electric Co Microscopically inspecting and sorting articles
US3759383A (en) * 1971-08-02 1973-09-18 K Inoue Apparatus for making abrasive articles
US3720309A (en) * 1971-12-07 1973-03-13 Teledyne Inc Method and apparatus for sorting semiconductor dice
US3811182A (en) * 1972-03-31 1974-05-21 Ibm Object handling fixture, system, and process
US3894633A (en) * 1974-10-24 1975-07-15 Western Electric Co Method and apparatus for sorting articles

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185927A (en) * 1961-01-31 1965-05-25 Kulicke & Soffa Mfg Co Probe instrument for inspecting semiconductor wafers including means for marking defective zones
US3344351A (en) * 1963-06-03 1967-09-26 Gen Instrument Corp Testing apparatus for a sequence of transistors and the like having a condition responsive marker
US3410401A (en) * 1965-05-27 1968-11-12 Ibm Substrate rework control circuit for a chip positioning machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001086703A3 (fr) * 2000-05-08 2002-10-03 Micro Component Technology Inc Procede et installation de triage de dispositifs semi-conducteurs
US6521853B1 (en) 2000-05-08 2003-02-18 Micro Component Technology, Inc. Method and apparatus for sorting semiconductor devices

Also Published As

Publication number Publication date
DE1514872B2 (de) 1972-07-27
GB1153008A (en) 1969-05-21
US3503500A (en) 1970-03-31
DE1514872A1 (de) 1970-01-15

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