FR1544033A - Appareil d'irradiation électronique - Google Patents

Appareil d'irradiation électronique

Info

Publication number
FR1544033A
FR1544033A FR117134A FR117134A FR1544033A FR 1544033 A FR1544033 A FR 1544033A FR 117134 A FR117134 A FR 117134A FR 117134 A FR117134 A FR 117134A FR 1544033 A FR1544033 A FR 1544033A
Authority
FR
France
Prior art keywords
irradiation device
electronic irradiation
electronic
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR117134A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB3547566A external-priority patent/GB1199282A/en
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to FR117134A priority Critical patent/FR1544033A/fr
Application granted granted Critical
Publication of FR1544033A publication Critical patent/FR1544033A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR117134A 1966-08-08 1967-08-07 Appareil d'irradiation électronique Expired FR1544033A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR117134A FR1544033A (fr) 1966-08-08 1967-08-07 Appareil d'irradiation électronique

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB3546766 1966-08-08
GB3547566A GB1199282A (en) 1966-08-08 1966-08-08 Improvements in or relating to electron irradiation apparatus
FR117134A FR1544033A (fr) 1966-08-08 1967-08-07 Appareil d'irradiation électronique

Publications (1)

Publication Number Publication Date
FR1544033A true FR1544033A (fr) 1968-10-31

Family

ID=27244399

Family Applications (1)

Application Number Title Priority Date Filing Date
FR117134A Expired FR1544033A (fr) 1966-08-08 1967-08-07 Appareil d'irradiation électronique

Country Status (1)

Country Link
FR (1) FR1544033A (fr)

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