FR1553985A - - Google Patents

Info

Publication number
FR1553985A
FR1553985A FR1553985DA FR1553985A FR 1553985 A FR1553985 A FR 1553985A FR 1553985D A FR1553985D A FR 1553985DA FR 1553985 A FR1553985 A FR 1553985A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1553985A publication Critical patent/FR1553985A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/05—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/05—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path
    • G01J5/051—Means for preventing contamination of the components of the optical system; Means for preventing obstruction of the radiation path using a gas purge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0815—Light concentrators, collectors or condensers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
FR1553985D 1966-12-30 1967-12-22 Expired FR1553985A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEM0072257 1966-12-30

Publications (1)

Publication Number Publication Date
FR1553985A true FR1553985A (de) 1969-01-17

Family

ID=7314398

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1553985D Expired FR1553985A (de) 1966-12-30 1967-12-22

Country Status (3)

Country Link
CH (1) CH459602A (de)
DE (1) DE1573280A1 (de)
FR (1) FR1553985A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999000531A1 (en) * 1997-06-30 1999-01-07 Applied Materials, Inc. Method and apparatus for reducing deposition of contaminants
WO2000009975A1 (de) * 1998-08-11 2000-02-24 Siemens Aktiengesellschaft Messeinrichtung zum berührungslosen messen von eigenschaften eines bewegten metallbandes
WO2003064984A1 (en) * 2002-01-25 2003-08-07 Ircon, Inc. Air purge system for optical sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62203071A (ja) * 1986-03-03 1987-09-07 Agency Of Ind Science & Technol 赤外センサ装置
DE102009031855B4 (de) * 2009-07-03 2014-09-18 Isedd Gmbh Vorrichtung zur Reinhaltung der Detektionsfläche einer Messvorrichtung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999000531A1 (en) * 1997-06-30 1999-01-07 Applied Materials, Inc. Method and apparatus for reducing deposition of contaminants
US6280790B1 (en) 1997-06-30 2001-08-28 Applied Materials, Inc. Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system
WO2000009975A1 (de) * 1998-08-11 2000-02-24 Siemens Aktiengesellschaft Messeinrichtung zum berührungslosen messen von eigenschaften eines bewegten metallbandes
WO2003064984A1 (en) * 2002-01-25 2003-08-07 Ircon, Inc. Air purge system for optical sensor
US6890080B2 (en) 2002-01-25 2005-05-10 Ircon, Inc. Air purge system for optical sensor

Also Published As

Publication number Publication date
DE1573280A1 (de) 1970-08-13
CH459602A (de) 1968-07-15

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Legal Events

Date Code Title Description
ST Notification of lapse