FR1587048A - - Google Patents

Info

Publication number
FR1587048A
FR1587048A FR1587048DA FR1587048A FR 1587048 A FR1587048 A FR 1587048A FR 1587048D A FR1587048D A FR 1587048DA FR 1587048 A FR1587048 A FR 1587048A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1587048A publication Critical patent/FR1587048A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR1587048D 1967-10-27 1968-10-24 Expired FR1587048A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0112621 1967-10-27

Publications (1)

Publication Number Publication Date
FR1587048A true FR1587048A (de) 1970-03-06

Family

ID=7531908

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1587048D Expired FR1587048A (de) 1967-10-27 1968-10-24

Country Status (5)

Country Link
CH (1) CH485328A (de)
DE (1) DE1614644A1 (de)
FR (1) FR1587048A (de)
GB (1) GB1250464A (de)
NL (1) NL6811808A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4580892A (en) * 1983-06-29 1986-04-08 Dainippon Screen Mfg. Co., Ltd. Contact printing apparatus
ATE30960T1 (de) * 1983-08-09 1987-12-15 Siemens Ag Justier- oder positioniertisch und verfahren zu dessen herstellung.
US5459546A (en) * 1992-08-28 1995-10-17 Penn; Randy J. Method and apparatus for accurate alignment of semiconductor wafers in photo printers
JP2002170765A (ja) * 2000-12-04 2002-06-14 Nikon Corp ステージ装置及び露光装置
CN113843636A (zh) * 2021-10-22 2021-12-28 王德胜 工件加工精微快速调整角度装置及其调整方法

Also Published As

Publication number Publication date
CH485328A (de) 1970-01-31
DE1614644A1 (de) 1970-02-26
GB1250464A (de) 1971-10-20
NL6811808A (de) 1969-04-29

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Legal Events

Date Code Title Description
ST Notification of lapse