FR2071176A5 - Plasma apparatus - Google Patents

Plasma apparatus

Info

Publication number
FR2071176A5
FR2071176A5 FR6944142A FR6944142A FR2071176A5 FR 2071176 A5 FR2071176 A5 FR 2071176A5 FR 6944142 A FR6944142 A FR 6944142A FR 6944142 A FR6944142 A FR 6944142A FR 2071176 A5 FR2071176 A5 FR 2071176A5
Authority
FR
France
Prior art keywords
electric discharge
annular anode
plasma apparatus
plasmatron
physico
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6944142A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHESNOKOV NIKOLAI
RYKALIN NIKOLAI
SAKHIEV ALEXANDR
STELMAKH GENNADY
Original Assignee
CHESNOKOV NIKOLAI
RYKALIN NIKOLAI
SAKHIEV ALEXANDR
STELMAKH GENNADY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHESNOKOV NIKOLAI, RYKALIN NIKOLAI, SAKHIEV ALEXANDR, STELMAKH GENNADY filed Critical CHESNOKOV NIKOLAI
Priority to FR6944142A priority Critical patent/FR2071176A5/fr
Application granted granted Critical
Publication of FR2071176A5 publication Critical patent/FR2071176A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3484—Convergent-divergent nozzles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/40—Details, e.g. electrodes, nozzles using applied magnetic fields, e.g. for focusing or rotating the arc

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
FR6944142A 1969-12-19 1969-12-19 Plasma apparatus Expired FR2071176A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR6944142A FR2071176A5 (en) 1969-12-19 1969-12-19 Plasma apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6944142A FR2071176A5 (en) 1969-12-19 1969-12-19 Plasma apparatus

Publications (1)

Publication Number Publication Date
FR2071176A5 true FR2071176A5 (en) 1971-09-17

Family

ID=9044874

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6944142A Expired FR2071176A5 (en) 1969-12-19 1969-12-19 Plasma apparatus

Country Status (1)

Country Link
FR (1) FR2071176A5 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414279A1 (fr) * 1978-01-09 1979-08-03 Inst Elektroswarki Patona Procede de production de plasma dans un plasmatron a arc et dispositif pour la mise en oeuvre dudit procede

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2414279A1 (fr) * 1978-01-09 1979-08-03 Inst Elektroswarki Patona Procede de production de plasma dans un plasmatron a arc et dispositif pour la mise en oeuvre dudit procede

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Legal Events

Date Code Title Description
ST Notification of lapse