FR2113032A5 - - Google Patents

Info

Publication number
FR2113032A5
FR2113032A5 FR7137758A FR7137758A FR2113032A5 FR 2113032 A5 FR2113032 A5 FR 2113032A5 FR 7137758 A FR7137758 A FR 7137758A FR 7137758 A FR7137758 A FR 7137758A FR 2113032 A5 FR2113032 A5 FR 2113032A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7137758A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUSS KARL KG
Original Assignee
SUSS KARL KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUSS KARL KG filed Critical SUSS KARL KG
Application granted granted Critical
Publication of FR2113032A5 publication Critical patent/FR2113032A5/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064—Devices for the automatic drive or the program control of the machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR7137758A 1970-10-14 1971-10-12 Expired FR2113032A5 (2)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2050488A DE2050488C3 (de) 1970-10-14 1970-10-14 Vorrichtung zum Anbringen einer Vielzahl äquidistanter Ritznuten auf einer Halbleiterscheibe

Publications (1)

Publication Number Publication Date
FR2113032A5 true FR2113032A5 (2) 1972-06-23

Family

ID=5785127

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7137758A Expired FR2113032A5 (2) 1970-10-14 1971-10-12

Country Status (3)

Country Link
DE (1) DE2050488C3 (2)
FR (1) FR2113032A5 (2)
NL (1) NL7114109A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111267255A (zh) * 2020-01-13 2020-06-12 梅文江 一种圆晶片切割设备

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69534098T2 (de) * 1994-01-18 2006-02-09 Dynatex International (Inc.), Santa Rosa Verfahren und vorrichtung zum anritzen und/oder brechen von halbleiterplättchen
DE4425879A1 (de) * 1994-07-09 1996-01-11 Ges Zur Foerderung Angewandter Optik Optoelektronik Quantenelektronik & Spektroskopie Ev Vorrichtung zum Ritzen von im wesentlichen einkristallinen Substraten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111267255A (zh) * 2020-01-13 2020-06-12 梅文江 一种圆晶片切割设备
CN111267255B (zh) * 2020-01-13 2021-12-24 精典电子股份有限公司 一种圆晶片切割设备

Also Published As

Publication number Publication date
DE2050488A1 (de) 1972-06-08
DE2050488B2 (de) 1975-05-22
DE2050488C3 (de) 1976-01-08
NL7114109A (2) 1972-04-18

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Legal Events

Date Code Title Description
ST Notification of lapse