FR2425480A1 - Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique - Google Patents

Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique

Info

Publication number
FR2425480A1
FR2425480A1 FR7912100A FR7912100A FR2425480A1 FR 2425480 A1 FR2425480 A1 FR 2425480A1 FR 7912100 A FR7912100 A FR 7912100A FR 7912100 A FR7912100 A FR 7912100A FR 2425480 A1 FR2425480 A1 FR 2425480A1
Authority
FR
France
Prior art keywords
discharge
regulating
spraying equipment
pressure
cathodic spraying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7912100A
Other languages
English (en)
Other versions
FR2425480B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2425480A1 publication Critical patent/FR2425480A1/fr
Application granted granted Critical
Publication of FR2425480B1 publication Critical patent/FR2425480B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Control Of Fluid Pressure (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Electrostatic Spraying Apparatus (AREA)

Abstract

PROCEDE ET DISPOSITIF DE REGULATION DE LA DECHARGE DANS UN EQUIPEMENT DE PULVERISATION CATHODIQUE COMPORTANT DES REGULATEURS DE COURANT, DE TENSION ET DE PRESSION DE DECHARGE. LA TENSION EST MAINTENUE CONSTANTE. LE COURANT INSTANTANE DE DECHARGE EST COMPARE A UNE VALEUR DE CONSIGNE. LA DIFFERENCE ET LA PRESSION INSTANTANEE SONT APPLIQUEES AU REGULATEUR DE PRESSION 13, DE FACON QU'EN CAS D'ECART DU COURANT DE DECHARGE, LA PRESSION DE PULVERISATION SOIT PORTEE A DES VALEURS TELLES QUE LE COURANT DE DECHARGE EST SENSIBLEMENT EGAL A LA VALEUR PREDETERMINEE.
FR7912100A 1978-05-13 1979-05-11 Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique Granted FR2425480A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2821119A DE2821119C2 (de) 1978-05-13 1978-05-13 Verfahren und Anordnung zur Regelung des Entladungsvorganges in einer Katodenzerstäubungsanlage

Publications (2)

Publication Number Publication Date
FR2425480A1 true FR2425480A1 (fr) 1979-12-07
FR2425480B1 FR2425480B1 (fr) 1984-07-06

Family

ID=6039367

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7912100A Granted FR2425480A1 (fr) 1978-05-13 1979-05-11 Procede et dispositif de regulation de la decharge dans un equipement de pulverisation cathodique

Country Status (7)

Country Link
US (1) US4283260A (fr)
AT (1) AT359798B (fr)
DE (1) DE2821119C2 (fr)
FR (1) FR2425480A1 (fr)
GB (1) GB2021294B (fr)
IT (1) IT1112450B (fr)
NL (1) NL7902718A (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152973A (en) * 1980-04-30 1981-11-26 Tokuda Seisakusho Ltd Sputter etching device
DE3047113A1 (de) 1980-12-13 1982-07-29 Leybold-Heraeus GmbH, 5000 Köln Katodenanordnung und regelverfahren fuer katodenzerstaeubungsanlagen mit einem magnetsystem zur erhoehung der zerstaeubungsrate
US4336119A (en) * 1981-01-29 1982-06-22 Ppg Industries, Inc. Method of and apparatus for control of reactive sputtering deposition
US4396478A (en) * 1981-06-15 1983-08-02 Aizenshtein Anatoly G Method of control of chemico-thermal treatment of workpieces in glow discharge and a device for carrying out the method
JPS58161775A (ja) * 1982-03-19 1983-09-26 Anelva Corp 放電装置
JPS58167767A (ja) * 1982-03-26 1983-10-04 Clarion Co Ltd 薄膜形成方法
US4428811A (en) 1983-04-04 1984-01-31 Borg-Warner Corporation Rapid rate reactive sputtering of a group IVb metal
US4496448A (en) * 1983-10-13 1985-01-29 At&T Bell Laboratories Method for fabricating devices with DC bias-controlled reactive ion etching
US4610775A (en) * 1985-07-26 1986-09-09 Westinghouse Electric Corp. Method and apparatus for clearing short-circuited, high-voltage cathodes in a sputtering chamber
DE3709177A1 (de) * 1987-03-20 1988-09-29 Leybold Ag Verfahren und vorrichtung zur regelung der reaktiven schichtabscheidung auf substraten mittels magnetronkatoden
US4818357A (en) * 1987-05-06 1989-04-04 Brown University Research Foundation Method and apparatus for sputter deposition of a semiconductor homojunction and semiconductor homojunction products created by same
DE3719616A1 (de) * 1987-06-12 1988-12-29 Leybold Ag Verfahren und vorrichtung zur beschichtung eines substrats
DE8801079U1 (de) * 1988-01-29 1989-06-01 INTERATOM GmbH, 5060 Bergisch Gladbach Beschichtungskammer mit Einrichtung zur Regelung der Zusammensetzung einer Gasatmosphäre
DE3926877A1 (de) * 1989-08-16 1991-02-21 Leybold Ag Verfahren zum beschichten eines dielektrischen substrats mit kupfer
DE4106513C2 (de) 1991-03-01 2002-06-13 Unaxis Deutschland Holding Verfahren zur Regelung eines reaktiven Sputterprozesses und Vorrichtung zur Durchführung des Verfahrens
US5602350A (en) * 1995-05-15 1997-02-11 The Penn State Research Foundation Method for compacting compactable materials and improved lubricant for same
JP3429957B2 (ja) * 1996-08-28 2003-07-28 松下電器産業株式会社 スパッタリング方法及び装置
US6572738B1 (en) * 1999-05-25 2003-06-03 Unaxis Balzers Aktiengesellschaft Vacuum treatment system and process for manufacturing workpieces
CN101921987A (zh) * 2009-06-10 2010-12-22 鸿富锦精密工业（深圳）有限公司 溅镀镀膜装置
TWI503434B (zh) * 2009-06-15 2015-10-11 Hon Hai Prec Ind Co Ltd 濺鍍鍍膜裝置
CN103958723B (zh) 2011-11-30 2017-04-05 应用材料公司 闭环控制

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
FR2273408A1 (en) * 1974-05-29 1975-12-26 Cit Alcatel Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber
FR2371009A1 (fr) * 1976-11-15 1978-06-09 Commissariat Energie Atomique Procede de controle du depot de couches par pulverisation reactive et dispositif de mise en oeuvre
DE2715591A1 (de) * 1977-04-07 1978-10-19 Bosch Gmbh Robert Vorrichtung zur regelung einer zerstaeubungsanlage
FR2404052A1 (fr) * 1977-09-26 1979-04-20 Ppg Industries Inc Procede de controle d'un depot par pulverisation cathodique d'un film d'oxyde metallique, notamment d'oxyde d'indium

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1055132B (de) * 1953-07-11 1959-04-16 Siemens Ag Verfahren und Einrichtung zur Herstellung von Selengleichrichterplatten
US4024291A (en) * 1975-06-17 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Control of vapor deposition
US4043889A (en) * 1976-01-02 1977-08-23 Sperry Rand Corporation Method of and apparatus for the radio frequency sputtering of a thin film
US4201645A (en) * 1978-06-26 1980-05-06 Robert J. Ferran Closed-loop sputtering system and method of operating same
JP2934672B2 (ja) * 1989-07-03 1999-08-16 直之 大纒 静電容量型検出装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2232832A1 (en) * 1973-06-06 1975-01-03 Radiotechnique Compelec Discharge control in cathodic sputtering - using voltage variation on auxiliary insulated electrode to adjust gas supply
FR2273408A1 (en) * 1974-05-29 1975-12-26 Cit Alcatel Impedance matching for RF cathodic diode atomiser - by adjusting press. of gas admitted to chamber
FR2371009A1 (fr) * 1976-11-15 1978-06-09 Commissariat Energie Atomique Procede de controle du depot de couches par pulverisation reactive et dispositif de mise en oeuvre
DE2715591A1 (de) * 1977-04-07 1978-10-19 Bosch Gmbh Robert Vorrichtung zur regelung einer zerstaeubungsanlage
FR2404052A1 (fr) * 1977-09-26 1979-04-20 Ppg Industries Inc Procede de controle d'un depot par pulverisation cathodique d'un film d'oxyde metallique, notamment d'oxyde d'indium

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
INTERNATIONAL JOURNAL OF ELECTRONICS, vol. 30, no. 3, 1971 *

Also Published As

Publication number Publication date
US4283260A (en) 1981-08-11
AT359798B (de) 1980-11-25
DE2821119A1 (de) 1979-11-15
GB2021294B (en) 1982-07-28
IT1112450B (it) 1986-01-13
IT7921700A0 (it) 1979-04-09
FR2425480B1 (fr) 1984-07-06
GB2021294A (en) 1979-11-28
DE2821119C2 (de) 1983-08-25
NL7902718A (nl) 1979-11-15
ATA191179A (de) 1980-04-15

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Legal Events

Date Code Title Description
ST Notification of lapse