FR2502185B1 - Dispositif de depot d'une couche mince - Google Patents

Dispositif de depot d'une couche mince

Info

Publication number
FR2502185B1
FR2502185B1 FR8204433A FR8204433A FR2502185B1 FR 2502185 B1 FR2502185 B1 FR 2502185B1 FR 8204433 A FR8204433 A FR 8204433A FR 8204433 A FR8204433 A FR 8204433A FR 2502185 B1 FR2502185 B1 FR 2502185B1
Authority
FR
France
Prior art keywords
depositing
thin film
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8204433A
Other languages
English (en)
Other versions
FR2502185A1 (fr
Inventor
Takamasa Sakai
Yasuhiko Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Faurecia Clarion Electronics Co Ltd
Original Assignee
Clarion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3641981U external-priority patent/JPS5922116Y2/ja
Priority claimed from JP12164381U external-priority patent/JPS5925884Y2/ja
Application filed by Clarion Co Ltd filed Critical Clarion Co Ltd
Publication of FR2502185A1 publication Critical patent/FR2502185A1/fr
Application granted granted Critical
Publication of FR2502185B1 publication Critical patent/FR2502185B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/228—Gas flow assisted PVD deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0063—Reactive sputtering characterised by means for introducing or removing gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
FR8204433A 1981-03-17 1982-03-16 Dispositif de depot d'une couche mince Expired FR2502185B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3641981U JPS5922116Y2 (ja) 1981-03-17 1981-03-17 薄膜形成装置
JP12164381U JPS5925884Y2 (ja) 1981-08-17 1981-08-17 スパツタ装置

Publications (2)

Publication Number Publication Date
FR2502185A1 FR2502185A1 (fr) 1982-09-24
FR2502185B1 true FR2502185B1 (fr) 1987-02-20

Family

ID=26375462

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8204433A Expired FR2502185B1 (fr) 1981-03-17 1982-03-16 Dispositif de depot d'une couche mince

Country Status (5)

Country Link
US (1) US4466876A (fr)
DE (1) DE3209792A1 (fr)
FR (1) FR2502185B1 (fr)
GB (1) GB2098241B (fr)
NL (1) NL8201093A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3585901D1 (de) * 1984-02-13 1992-05-27 Iii Jerome J Schmitt Verfahren und vorrichtung fuer gasstrahlniederschlag von leitfaehigen und dielektrischen duennen festfilmen und so hergestellte erzeugnisse.
CA1232228A (fr) * 1984-03-13 1988-02-02 Tatsuro Miyasato Enduit pelliculaire, et ses methodes et dispositifs de deposition
WO1986004272A1 (fr) * 1985-01-29 1986-07-31 Tibor Kenderi Appareil a jet de flamme pour vaporization de poudre
EP0595159B1 (fr) * 1992-10-26 1997-12-29 Schott Glaswerke Procédé et appareillage pour revêtir par CVD l'intérieur des substrats fortement courbés sous la forme de calotte
GB9323033D0 (en) * 1993-11-09 1994-01-05 Gen Vacuum Equip Ltd Evaporator for vacuum web coating
US5591313A (en) * 1995-06-30 1997-01-07 Tabco Technologies, Inc. Apparatus and method for localized ion sputtering
US7235160B2 (en) * 2003-08-06 2007-06-26 Energy Photovoltaics, Inc. Hollow cathode sputtering apparatus and related method
US9175383B2 (en) * 2008-01-16 2015-11-03 Applied Materials, Inc. Double-coating device with one process chamber

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1515312B1 (de) * 1965-06-14 1972-04-27 Siemens Ag Vorrichtung zur Herstellung dünner Schichten durch Kathodenzerstäubung
US3408283A (en) * 1966-09-15 1968-10-29 Kennecott Copper Corp High current duoplasmatron having an apertured anode positioned in the low pressure region
US3409529A (en) * 1967-07-07 1968-11-05 Kennecott Copper Corp High current duoplasmatron having an apertured anode comprising a metal of high magnetic permeability
US3600292A (en) * 1969-03-11 1971-08-17 Westinghouse Electric Corp Localized machining and deposition for microelectronic components by sputtering
FR2088088A1 (fr) * 1970-05-15 1972-01-07 Anvar
US4062318A (en) * 1976-11-19 1977-12-13 Rca Corporation Apparatus for chemical vapor deposition
DE2846160A1 (de) * 1978-10-24 1980-05-08 Kernforschungsanlage Juelich Wirbelschichtreaktor mit offenem reaktionsgaszutritt und verfahren zur laminar-durchflussteigerung
DD150480A1 (de) * 1979-04-02 1981-09-02 Ullrich Heisig Verfahren und einrichtung zum reaktiven zerstaeuben
SU863716A1 (ru) * 1979-08-08 1981-09-15 Московский авиационный технологический институт им.К.Э.Циолковского Устройство дл нанесени покрытий
US4307283A (en) * 1979-09-27 1981-12-22 Eaton Corporation Plasma etching apparatus II-conical-shaped projection
US4270999A (en) * 1979-09-28 1981-06-02 International Business Machines Corporation Method and apparatus for gas feed control in a dry etching process
US4353777A (en) * 1981-04-20 1982-10-12 Lfe Corporation Selective plasma polysilicon etching

Also Published As

Publication number Publication date
GB2098241A (en) 1982-11-17
US4466876A (en) 1984-08-21
FR2502185A1 (fr) 1982-09-24
GB2098241B (en) 1985-10-30
DE3209792A1 (de) 1982-11-04
NL8201093A (nl) 1982-10-18

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Legal Events

Date Code Title Description
ST Notification of lapse