FR2563883B1 - Dispositif d'amortissement des vibrations dans les systemes a vide - Google Patents

Dispositif d'amortissement des vibrations dans les systemes a vide

Info

Publication number
FR2563883B1
FR2563883B1 FR8505706A FR8505706A FR2563883B1 FR 2563883 B1 FR2563883 B1 FR 2563883B1 FR 8505706 A FR8505706 A FR 8505706A FR 8505706 A FR8505706 A FR 8505706A FR 2563883 B1 FR2563883 B1 FR 2563883B1
Authority
FR
France
Prior art keywords
vibration damping
damping device
vacuum systems
vacuum
systems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8505706A
Other languages
English (en)
Other versions
FR2563883A1 (fr
Inventor
Rudi Neuland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of FR2563883A1 publication Critical patent/FR2563883A1/fr
Application granted granted Critical
Publication of FR2563883B1 publication Critical patent/FR2563883B1/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Vibration Prevention Devices (AREA)
FR8505706A 1984-05-02 1985-04-16 Dispositif d'amortissement des vibrations dans les systemes a vide Expired FR2563883B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD26255784A DD238175A3 (de) 1984-05-02 1984-05-02 Einrichtung zur schwingungsdaempfung in vakuumsystemen

Publications (2)

Publication Number Publication Date
FR2563883A1 FR2563883A1 (fr) 1985-11-08
FR2563883B1 true FR2563883B1 (fr) 1989-12-08

Family

ID=5556655

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8505706A Expired FR2563883B1 (fr) 1984-05-02 1985-04-16 Dispositif d'amortissement des vibrations dans les systemes a vide

Country Status (6)

Country Link
JP (1) JPS6117737A (fr)
DD (1) DD238175A3 (fr)
DE (1) DE3508575A1 (fr)
FR (1) FR2563883B1 (fr)
GB (1) GB2159891B (fr)
SU (1) SU1502889A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0526746Y2 (fr) * 1987-07-14 1993-07-07
JPH0681894A (ja) * 1992-08-31 1994-03-22 Hitachi Zosen Corp 真空容器の緩衝装置
DE20202893U1 (de) * 2002-02-25 2003-07-03 Sachsenring Fahrzeugtechnik Gm Vorrichtung zur Lagerung einer Kolbenverdichterbaugruppe
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4363217A (en) * 1981-01-29 1982-12-14 Venuti Guy S Vibration damping apparatus
JPS57188787A (en) * 1981-05-18 1982-11-19 Toshiba Corp Vibration-proof mechanism for vacuum pump
JPS6065288A (ja) * 1983-09-21 1985-04-15 Hitachi Ltd クライオポンプ

Also Published As

Publication number Publication date
SU1502889A1 (ru) 1989-08-23
DD238175A3 (de) 1986-08-13
GB2159891B (en) 1987-07-01
JPS6117737A (ja) 1986-01-25
GB8511024D0 (en) 1985-06-12
DE3508575A1 (de) 1985-11-07
GB2159891A (en) 1985-12-11
FR2563883A1 (fr) 1985-11-08

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse