FR2605802B3 - Detecteur sensible a l'humidite et procede pour sa fabrication - Google Patents

Detecteur sensible a l'humidite et procede pour sa fabrication

Info

Publication number
FR2605802B3
FR2605802B3 FR878714696A FR8714696A FR2605802B3 FR 2605802 B3 FR2605802 B3 FR 2605802B3 FR 878714696 A FR878714696 A FR 878714696A FR 8714696 A FR8714696 A FR 8714696A FR 2605802 B3 FR2605802 B3 FR 2605802B3
Authority
FR
France
Prior art keywords
production
sensitive detector
moisture sensitive
moisture
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR878714696A
Other languages
English (en)
Other versions
FR2605802A1 (fr
Inventor
Karsten Thiessen
Christian Zehner
Horst Danzmann
Gerald Meier
Rainer Doss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LIEBKNECHT MIKROELEKTRON
Original Assignee
LIEBKNECHT MIKROELEKTRON
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LIEBKNECHT MIKROELEKTRON filed Critical LIEBKNECHT MIKROELEKTRON
Publication of FR2605802A1 publication Critical patent/FR2605802A1/fr
Application granted granted Critical
Publication of FR2605802B3 publication Critical patent/FR2605802B3/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
FR878714696A 1986-10-23 1987-10-23 Detecteur sensible a l'humidite et procede pour sa fabrication Expired FR2605802B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD29551486A DD276216A3 (de) 1986-10-23 1986-10-23 Feuchteempfindliches Sensorenelement und Verfahren zu seiner Herstellung

Publications (2)

Publication Number Publication Date
FR2605802A1 FR2605802A1 (fr) 1988-04-29
FR2605802B3 true FR2605802B3 (fr) 1989-02-03

Family

ID=5583277

Family Applications (1)

Application Number Title Priority Date Filing Date
FR878714696A Expired FR2605802B3 (fr) 1986-10-23 1987-10-23 Detecteur sensible a l'humidite et procede pour sa fabrication

Country Status (3)

Country Link
DD (1) DD276216A3 (fr)
DE (1) DE3734614C1 (fr)
FR (1) FR2605802B3 (fr)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3440372A (en) * 1966-03-31 1969-04-22 Texas Instruments Inc Aluminum oxide humidity sensor
DE2229748A1 (de) * 1971-06-23 1973-03-08 Honeywell Inc Fuehler fuer relative feuchtigkeit
DE2821267A1 (de) * 1978-05-16 1979-11-22 Siemens Ag Gassensoren und verfahren zu ihrer herstellung
DE3224920C2 (de) * 1981-07-08 1986-11-20 Sharp K.K., Osaka Feuchtigkeitsempfindliches Widerstandselement

Also Published As

Publication number Publication date
DD276216A3 (de) 1990-02-21
FR2605802A1 (fr) 1988-04-29
DE3734614C1 (en) 1988-12-22

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Legal Events

Date Code Title Description
ST Notification of lapse