FR2642479B1 - Pompe a vide du type roots, multietagee - Google Patents

Pompe a vide du type roots, multietagee

Info

Publication number
FR2642479B1
FR2642479B1 FR8901349A FR8901349A FR2642479B1 FR 2642479 B1 FR2642479 B1 FR 2642479B1 FR 8901349 A FR8901349 A FR 8901349A FR 8901349 A FR8901349 A FR 8901349A FR 2642479 B1 FR2642479 B1 FR 2642479B1
Authority
FR
France
Prior art keywords
vacuum pump
roots vacuum
stage roots
stage
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8901349A
Other languages
English (en)
Other versions
FR2642479A1 (fr
Inventor
Guittet Dominique
Taberlet Eric
Vuillermoz Jean-Francois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR8901349A priority Critical patent/FR2642479B1/fr
Publication of FR2642479A1 publication Critical patent/FR2642479A1/fr
Application granted granted Critical
Publication of FR2642479B1 publication Critical patent/FR2642479B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
FR8901349A 1989-02-02 1989-02-02 Pompe a vide du type roots, multietagee Expired - Fee Related FR2642479B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8901349A FR2642479B1 (fr) 1989-02-02 1989-02-02 Pompe a vide du type roots, multietagee

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8901349A FR2642479B1 (fr) 1989-02-02 1989-02-02 Pompe a vide du type roots, multietagee

Publications (2)

Publication Number Publication Date
FR2642479A1 FR2642479A1 (fr) 1990-08-03
FR2642479B1 true FR2642479B1 (fr) 1994-03-18

Family

ID=9378408

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8901349A Expired - Fee Related FR2642479B1 (fr) 1989-02-02 1989-02-02 Pompe a vide du type roots, multietagee

Country Status (1)

Country Link
FR (1) FR2642479B1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0448750B1 (fr) * 1990-03-27 1996-05-01 Leybold Aktiengesellschaft Pompe à vide multiétagée avec compression à sec et procédé pour sa mise en oeuvre
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
DE4233142A1 (de) * 1992-10-02 1994-04-07 Leybold Ag Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
EP2466141A4 (fr) * 2009-08-14 2014-03-05 Ulvac Inc Pompe désamorcée
DE202011104491U1 (de) 2011-08-17 2012-11-20 Oerlikon Leybold Vacuum Gmbh Wälzkolbenpumpe
CN102444564B (zh) * 2011-11-21 2014-12-24 浙江飞越机电有限公司 一体式真空泵
FR3106630B1 (fr) * 2020-01-24 2022-01-28 Pfeiffer Vacuum Technology AG Pompe à vide sèche

Also Published As

Publication number Publication date
FR2642479A1 (fr) 1990-08-03

Similar Documents

Publication Publication Date Title
FR2633674B1 (fr) Pompe turbomoleculaire a vide
FR2597552B1 (fr) Pompe a vide moleculaire, notamment du type turbomoleculaire
DE68914320D1 (de) Zusammengestellte Vakuumpumpe.
DE68904275D1 (de) Mehrstufige roots-vakuumpumpe mit rueckkuehlungsstroemung.
DE68904020D1 (de) Mehrstufiger zentrifugalverdichter.
FR2644853B1 (fr) Pompe peristaltique miniature
DE59005764D1 (de) Rotor für eine Wälzkolbenvakuumpumpe.
DE69308527D1 (de) Mehrstufige Vakuumpumpe
NO873878D0 (no) Utmatningspumpe.
FR2603212B1 (fr) Pulverisateur du type a aspiration.
DE69112160D1 (de) Mehrstufige Vakuumpumpe.
DE68903355D1 (de) Vakuumpumpen.
DE69004566D1 (de) Vakuumpumpeneinheit.
DE3768593D1 (de) Hochvakuumpumpe.
DE3885899D1 (de) Pumpenstufe für eine Hochvakuumpumpe.
FR2642479B1 (fr) Pompe a vide du type roots, multietagee
DE68906929D1 (de) Turbomolekularpumpe.
DE58907121D1 (de) Zwei- oder mehrstufige Hochvakuumpumpe.
KR870009135A (ko) 스크롤 진공펌프
FR2629877B1 (fr) Pompe moleculaire a vide
FR2723767B1 (fr) Pompe a vide turbomoleculaire
FR2659395B1 (fr) Pompe a vide a suspension magnetique.
FR2661954B1 (fr) Pompe a vide alternative.
DE69109424D1 (de) Turbovakuumpumpe.
DE59101715D1 (de) Stator für eine Turbomolekularvakuumpumpe.

Legal Events

Date Code Title Description
ST Notification of lapse