FR2653545B1 - Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. - Google Patents

Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee.

Info

Publication number
FR2653545B1
FR2653545B1 FR8913922A FR8913922A FR2653545B1 FR 2653545 B1 FR2653545 B1 FR 2653545B1 FR 8913922 A FR8913922 A FR 8913922A FR 8913922 A FR8913922 A FR 8913922A FR 2653545 B1 FR2653545 B1 FR 2653545B1
Authority
FR
France
Prior art keywords
temperature
blowing
relating
adjusting
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8913922A
Other languages
English (en)
Other versions
FR2653545A1 (fr
Inventor
Galian Francois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carrier SCS
Original Assignee
Carrier SCS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carrier SCS filed Critical Carrier SCS
Priority to FR8913922A priority Critical patent/FR2653545B1/fr
Priority to PCT/FR1990/000766 priority patent/WO1991006974A1/fr
Publication of FR2653545A1 publication Critical patent/FR2653545A1/fr
Application granted granted Critical
Publication of FR2653545B1 publication Critical patent/FR2653545B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00—Arrangements for thermal protection or thermal control
    • H10W40/10—Arrangements for heating
FR8913922A 1989-10-24 1989-10-24 Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee. Expired - Fee Related FR2653545B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8913922A FR2653545B1 (fr) 1989-10-24 1989-10-24 Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee.
PCT/FR1990/000766 WO1991006974A1 (fr) 1989-10-24 1990-10-24 Perfectionnements apportes aux dispostifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8913922A FR2653545B1 (fr) 1989-10-24 1989-10-24 Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee.

Publications (2)

Publication Number Publication Date
FR2653545A1 FR2653545A1 (fr) 1991-04-26
FR2653545B1 true FR2653545B1 (fr) 1992-02-14

Family

ID=9386721

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8913922A Expired - Fee Related FR2653545B1 (fr) 1989-10-24 1989-10-24 Perfectionnements apportes aux dispositifs permettant d'ajuster la temperature d'un element par soufflage d'un gaz a la temperature souhaitee.

Country Status (2)

Country Link
FR (1) FR2653545B1 (fr)
WO (1) WO1991006974A1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121920A (ja) * 1982-12-28 1984-07-14 Toshiba Corp 面状対流型ヒ−タ

Also Published As

Publication number Publication date
FR2653545A1 (fr) 1991-04-26
WO1991006974A1 (fr) 1991-05-16

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse