FR2705792B1 - Composant d'optique intégrée, et procédé d'élaboration d'un tel composant. - Google Patents

Composant d'optique intégrée, et procédé d'élaboration d'un tel composant.

Info

Publication number
FR2705792B1
FR2705792B1 FR9306229A FR9306229A FR2705792B1 FR 2705792 B1 FR2705792 B1 FR 2705792B1 FR 9306229 A FR9306229 A FR 9306229A FR 9306229 A FR9306229 A FR 9306229A FR 2705792 B1 FR2705792 B1 FR 2705792B1
Authority
FR
France
Prior art keywords
component
developing
integrated optical
optical component
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9306229A
Other languages
English (en)
Other versions
FR2705792A1 (fr
Inventor
Cornebois Michel
Darbon Philippe
Tregoat Denis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Alsthom Compagnie Generale dElectricite
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Alsthom Compagnie Generale dElectricite filed Critical Alcatel Alsthom Compagnie Generale dElectricite
Priority to FR9306229A priority Critical patent/FR2705792B1/fr
Publication of FR2705792A1 publication Critical patent/FR2705792A1/fr
Application granted granted Critical
Publication of FR2705792B1 publication Critical patent/FR2705792B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/255—Splicing of light guides, e.g. by fusion or bonding
    • G02B6/2552—Splicing of light guides, e.g. by fusion or bonding reshaping or reforming of light guides for coupling using thermal heating, e.g. tapering, forming of a lens on light guide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12061—Silicon
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Plasma & Fusion (AREA)
  • Optical Integrated Circuits (AREA)
FR9306229A 1993-05-25 1993-05-25 Composant d'optique intégrée, et procédé d'élaboration d'un tel composant. Expired - Fee Related FR2705792B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9306229A FR2705792B1 (fr) 1993-05-25 1993-05-25 Composant d'optique intégrée, et procédé d'élaboration d'un tel composant.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306229A FR2705792B1 (fr) 1993-05-25 1993-05-25 Composant d'optique intégrée, et procédé d'élaboration d'un tel composant.

Publications (2)

Publication Number Publication Date
FR2705792A1 FR2705792A1 (fr) 1994-12-02
FR2705792B1 true FR2705792B1 (fr) 1995-06-30

Family

ID=9447423

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9306229A Expired - Fee Related FR2705792B1 (fr) 1993-05-25 1993-05-25 Composant d'optique intégrée, et procédé d'élaboration d'un tel composant.

Country Status (1)

Country Link
FR (1) FR2705792B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108508533A (zh) * 2018-04-09 2018-09-07 清华大学 一种阵列激光诱导荧光波导芯片及制作工艺

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57135906A (en) * 1981-02-17 1982-08-21 Fujitsu Ltd Optical waveguide
CA1323194C (fr) * 1987-07-28 1993-10-19 Amaresh Mahapatra Methode de retrecissement de guides d'ondes
JPH0281005A (ja) * 1988-09-19 1990-03-22 Nec Corp 導波路型光デバイス
JPH0381740A (ja) * 1989-08-25 1991-04-08 Nippon Telegr & Teleph Corp <Ntt> 光制御回路
JP2855832B2 (ja) * 1990-09-20 1999-02-10 住友電気工業株式会社 石英系光導波路の製造方法

Also Published As

Publication number Publication date
FR2705792A1 (fr) 1994-12-02

Similar Documents

Publication Publication Date Title
FR2752623B1 (fr) Procede de fabrication d&#39;un dispositif de couplage optique collectif et dispositif obtenu par un tel procede
EP0659016A3 (fr) Procédé et dispositif de détection d&#39;une coupure vidéo.
FR2661516B1 (fr) Composant d&#39;optique integree et procede de fabrication.
FR2715391B1 (fr) Dispositif et procédé d&#39;anticollision pour un mobile.
FR2691556B1 (fr) Procédé et dispositif de démarrage d&#39;un ordinateur à un instant programmé.
EP0647967A3 (fr) Procédé de montage d&#39;un dispositif semi-conducteur.
FR2714579B1 (fr) Dispositif et procédé de ventilation pour chaussures.
FR2712395B1 (fr) Procédé et dispositif pour l&#39;exploitation d&#39;un détecteur à ultrasons.
EP0653786A3 (fr) Procédé ou fabrication d&#39;un dispositif semi-conducteur.
FR2719943B1 (fr) Procédé de fabrication d&#39;un dispositif d&#39;affichage.
EP0640301A3 (fr) Procédé et dispositif pour fixer une tirette pour curseur.
EP0635883A3 (fr) Système d&#39;inspection pour un dispositif semi-conducteur.
FR2737582B1 (fr) Composant opto-electronique integre
EP0602995A3 (fr) Procédé et appareillage pour la fabrication d&#39;un dispositif MOS.
EP0610036A3 (fr) Procédé pour la spectrométrie et dispositif à cela.
FR2712990B1 (fr) Miroir à large bande et à haute réflectivité et procédé de réalisation d&#39;un tel miroir.
FR2712396B1 (fr) Procédé de fabrication d&#39;un dispositif d&#39;optique intégrée et dispositif ainsi fabriqué.
FR2740507B1 (fr) Dispositif de securite pour echelle et echelle equipee d&#39;un tel dispositif
EP0648712A3 (fr) Procédé de pressage d&#39;un élément optique.
FR2708293B1 (fr) Dispositif de fabrication d&#39;un matelas de fibres.
FR2700761B1 (fr) Procédé de renvidage (bobinage) d&#39;un fil sur une machine textile et machine mettant en Óoeuvre un tel procédé .
FR2661515B1 (fr) Dispositif optique a composant d&#39;optique integree et procede de fabrication.
FR2705792B1 (fr) Composant d&#39;optique intégrée, et procédé d&#39;élaboration d&#39;un tel composant.
FR2693565B1 (fr) Procédé de réglage d&#39;une machine d&#39;exposition photolithographique et dispositif associé.
FR2706378B1 (fr) Procédé et dispositif de commande d&#39;un véhicule.

Legal Events

Date Code Title Description
ST Notification of lapse