FR2730352A1 - Dispositif d'extension d'une impulsion laser - Google Patents

Dispositif d'extension d'une impulsion laser

Info

Publication number
FR2730352A1
FR2730352A1 FR9601261A FR9601261A FR2730352A1 FR 2730352 A1 FR2730352 A1 FR 2730352A1 FR 9601261 A FR9601261 A FR 9601261A FR 9601261 A FR9601261 A FR 9601261A FR 2730352 A1 FR2730352 A1 FR 2730352A1
Authority
FR
France
Prior art keywords
reflector
laser pulse
extension device
pulse extension
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR9601261A
Other languages
English (en)
Other versions
FR2730352B1 (fr
Inventor
Shay Ghilai
Natalie Levinsohn
Dov Zahavi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oramir Semiconductor Equipment Ltd
Original Assignee
Oramir Semiconductor Equipment Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oramir Semiconductor Equipment Ltd filed Critical Oramir Semiconductor Equipment Ltd
Publication of FR2730352A1 publication Critical patent/FR2730352A1/fr
Application granted granted Critical
Publication of FR2730352B1 publication Critical patent/FR2730352B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S372/00—Coherent light generators
    • Y10S372/70—Optical delay

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Ink Jet Recording Methods And Recording Media Thereof (AREA)
  • Optical Communication System (AREA)

Abstract

La présente invention concerne un dispositif pour étendre la durée d'une impulsion lumineuse, comprenant deux réflecteurs sphériques (11, 12), un réflecteur spécial (15) formé d'éléments transparents et réfléchissants, et une plaque de translation (16) pour fournir la translation désirée, verticalement, pour chaque passage d'une partie du faisceau lumineux, de sorte que la partie du faisceau lumineux, arrivant sur le réflecteur à 90 deg. par rapport à l'axe optique, traverse librement le réflecteur, tandis qu'une partie du faisceau passe au moins une fois entre les réflecteurs sphériques, avant de sortir dans la même direction, avec un retard prédéterminé.
FR9601261A 1995-02-06 1996-02-02 Dispositif d'extension d'une impulsion laser Expired - Fee Related FR2730352B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL11254695A IL112546A (en) 1995-02-06 1995-02-06 Laser pulse extender

Publications (2)

Publication Number Publication Date
FR2730352A1 true FR2730352A1 (fr) 1996-08-09
FR2730352B1 FR2730352B1 (fr) 1998-09-04

Family

ID=11067067

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9601261A Expired - Fee Related FR2730352B1 (fr) 1995-02-06 1996-02-02 Dispositif d'extension d'une impulsion laser

Country Status (9)

Country Link
US (1) US5661748A (fr)
JP (1) JPH08248349A (fr)
KR (1) KR100237938B1 (fr)
DE (1) DE19604064A1 (fr)
FR (1) FR2730352B1 (fr)
GB (1) GB2297630B (fr)
IL (1) IL112546A (fr)
NL (1) NL1002250C2 (fr)
TW (1) TW293960B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100483981B1 (ko) * 1996-02-22 2005-11-11 가부시키가이샤 니콘 펄스폭신장광학계및이러한광학계를갖춘노광장치
DE19931751A1 (de) * 1999-07-08 2001-01-11 Zeiss Carl Fa Vorrichtung zur Reduzierung der Peakleistung einer Pulslaser-Lichtquelle
US6693939B2 (en) * 2001-01-29 2004-02-17 Cymer, Inc. Laser lithography light source with beam delivery
US6490299B1 (en) 2000-07-20 2002-12-03 Troitski Method and laser system for generating laser radiation of specific temporal shape for production of high quality laser-induced damage images
US7230964B2 (en) * 2001-04-09 2007-06-12 Cymer, Inc. Lithography laser with beam delivery and beam pointing control
US6928093B2 (en) * 2002-05-07 2005-08-09 Cymer, Inc. Long delay and high TIS pulse stretcher
US7184204B2 (en) * 2003-07-01 2007-02-27 Lambda Physik Ag Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
DE602004025376D1 (de) * 2003-11-13 2010-03-18 Cymer Inc Laserausgangs-lichtimpuls-strecker
JP4416481B2 (ja) * 2003-11-18 2010-02-17 ギガフォトン株式会社 光学的パルス伸長器および露光用放電励起ガスレーザ装置
US7321468B2 (en) * 2003-12-15 2008-01-22 Carl Zeiss Laser Optics Gmbh Method and optical arrangement for beam guiding of a light beam with beam delay
US7486707B2 (en) * 2003-12-15 2009-02-03 Carl Zeiss Laser Optics Gmbh Optical delay module for lenghtening the propagation path of a light beam and pulse multiplication or elongation module
US7035012B2 (en) * 2004-03-01 2006-04-25 Coherent, Inc. Optical pulse duration extender
US7432517B2 (en) * 2004-11-19 2008-10-07 Asml Netherlands B.V. Pulse modifier, lithographic apparatus, and device manufacturing method
US20060216037A1 (en) * 2005-03-23 2006-09-28 Wiessner Alexander O Double-pass imaging pulse-stretcher
US8803027B2 (en) * 2006-06-05 2014-08-12 Cymer, Llc Device and method to create a low divergence, high power laser beam for material processing applications
US20070278193A1 (en) * 2006-06-05 2007-12-06 Cymer, Inc. Device and method to create a low divergence, high power laser beam for material processing applications
US7804866B1 (en) * 2006-09-26 2010-09-28 Kla-Tencor Technologies Corporation Pulse stretcher
JP4534210B2 (ja) * 2007-05-29 2010-09-01 株式会社ニコン 光遅延装置、照明光学装置、露光装置及び方法、並びに半導体素子製造方法
DE202009001152U1 (de) 2008-07-23 2009-04-09 Coherent Gmbh XeCI-Laser mit Pulsverlängerung
CN102653032B (zh) * 2012-04-20 2014-12-10 华中科技大学 一种激光多点聚焦加工系统
JP6353196B2 (ja) * 2013-05-15 2018-07-04 株式会社エンプラス 光レセプタクルおよび光モジュール

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148318A (en) * 1987-05-29 1992-09-15 Mitsubishi Denki K.K. Optical pulse waveform shaper
US5309456A (en) * 1992-10-30 1994-05-03 The United States Of America As Represented By The United States Department Of Energy Pulse stretcher

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5243465A (en) * 1992-05-12 1993-09-07 Tencor Instruments Area-division beamsplitter with broad spectral bandwidth

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5148318A (en) * 1987-05-29 1992-09-15 Mitsubishi Denki K.K. Optical pulse waveform shaper
US5309456A (en) * 1992-10-30 1994-05-03 The United States Of America As Represented By The United States Department Of Energy Pulse stretcher

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
STEPHEN G. ANDERSON: "Diode-pumped amplifier delivers high gain", LASER FOCUS WORLD., vol. 29, no. 9, September 1993 (1993-09-01), TULSA US, pages 15 - 16, XP000391961 *

Also Published As

Publication number Publication date
JPH08248349A (ja) 1996-09-27
KR100237938B1 (ko) 2000-02-01
IL112546A (en) 1999-04-11
US5661748A (en) 1997-08-26
FR2730352B1 (fr) 1998-09-04
TW293960B (fr) 1996-12-21
GB2297630B (en) 1998-09-16
GB2297630A (en) 1996-08-07
NL1002250A1 (nl) 1996-08-06
DE19604064A1 (de) 1996-08-08
KR960032814A (ko) 1996-09-17
GB9601607D0 (en) 1996-03-27
NL1002250C2 (nl) 1997-12-10

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Legal Events

Date Code Title Description
ST Notification of lapse