FR2811761B1 - Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge - Google Patents

Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge

Info

Publication number
FR2811761B1
FR2811761B1 FR0009318A FR0009318A FR2811761B1 FR 2811761 B1 FR2811761 B1 FR 2811761B1 FR 0009318 A FR0009318 A FR 0009318A FR 0009318 A FR0009318 A FR 0009318A FR 2811761 B1 FR2811761 B1 FR 2811761B1
Authority
FR
France
Prior art keywords
infrared
high space
space resolution
operating
ellipsometer operating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0009318A
Other languages
English (en)
Other versions
FR2811761A1 (fr
Inventor
Jean Louis Stehle
Pierre Boher
Michel Luttmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PRODUCTION RECH S APPLIQUEES
Original Assignee
PRODUCTION RECH S APPLIQUEES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0009318A priority Critical patent/FR2811761B1/fr
Application filed by PRODUCTION RECH S APPLIQUEES filed Critical PRODUCTION RECH S APPLIQUEES
Priority to EP01949572A priority patent/EP1301764A1/fr
Priority to AU2001270701A priority patent/AU2001270701A1/en
Priority to PCT/FR2001/002072 priority patent/WO2002006780A1/fr
Priority to JP2002512641A priority patent/JP2004504591A/ja
Priority to KR1020037000770A priority patent/KR100846474B1/ko
Priority to US10/333,416 priority patent/US6819423B2/en
Priority to KR10-2003-7000771A priority patent/KR20030026322A/ko
Priority to JP2002512640A priority patent/JP2004504590A/ja
Priority to PCT/FR2001/002305 priority patent/WO2002006779A2/fr
Priority to AU2001276456A priority patent/AU2001276456A1/en
Priority to EP01954108A priority patent/EP1301763A2/fr
Priority to US10/333,415 priority patent/US7230701B2/en
Publication of FR2811761A1 publication Critical patent/FR2811761A1/fr
Application granted granted Critical
Publication of FR2811761B1 publication Critical patent/FR2811761B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light
    • G01J4/04—Polarimeters using electric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
FR0009318A 2000-07-17 2000-07-17 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge Expired - Fee Related FR2811761B1 (fr)

Priority Applications (13)

Application Number Priority Date Filing Date Title
FR0009318A FR2811761B1 (fr) 2000-07-17 2000-07-17 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
AU2001270701A AU2001270701A1 (en) 2000-07-17 2001-06-28 High spatial resolution infrared ellipsometer
PCT/FR2001/002072 WO2002006780A1 (fr) 2000-07-17 2001-06-28 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
JP2002512641A JP2004504591A (ja) 2000-07-17 2001-06-28 高度な空間分解能の赤外線エリプソメータ
KR1020037000770A KR100846474B1 (ko) 2000-07-17 2001-06-28 고 공간 분해능 적외선 타원편광계
US10/333,416 US6819423B2 (en) 2000-07-17 2001-06-28 High spatial resolution infrared ellipsometer
EP01949572A EP1301764A1 (fr) 2000-07-17 2001-06-28 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
JP2002512640A JP2004504590A (ja) 2000-07-17 2001-07-16 コンパクトな分光エリプソメータ
PCT/FR2001/002305 WO2002006779A2 (fr) 2000-07-17 2001-07-16 Ellipsometre spectroscopique compact
KR10-2003-7000771A KR20030026322A (ko) 2000-07-17 2001-07-16 소형 입체 타원편광계
AU2001276456A AU2001276456A1 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer
EP01954108A EP1301763A2 (fr) 2000-07-17 2001-07-16 Ellipsometre spectroscopique compact
US10/333,415 US7230701B2 (en) 2000-07-17 2001-07-16 Compact spectroscopic ellipsometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0009318A FR2811761B1 (fr) 2000-07-17 2000-07-17 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge

Publications (2)

Publication Number Publication Date
FR2811761A1 FR2811761A1 (fr) 2002-01-18
FR2811761B1 true FR2811761B1 (fr) 2002-10-11

Family

ID=8852567

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0009318A Expired - Fee Related FR2811761B1 (fr) 2000-07-17 2000-07-17 Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge

Country Status (7)

Country Link
US (2) US6819423B2 (fr)
EP (2) EP1301764A1 (fr)
JP (2) JP2004504591A (fr)
KR (2) KR100846474B1 (fr)
AU (2) AU2001270701A1 (fr)
FR (1) FR2811761B1 (fr)
WO (2) WO2002006780A1 (fr)

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DE102011078418A1 (de) * 2011-06-30 2013-01-03 Friedrich-Alexander-Universität Erlangen-Nürnberg Vorrichtung und Verfahren zur Reflexions-Ellipsometrie im Millimeterwellenbereich
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US9377394B2 (en) 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) * 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
US9442016B2 (en) 2014-06-06 2016-09-13 J.A. Woollam Co., Inc Reflective focusing optics
US10018815B1 (en) 2014-06-06 2018-07-10 J.A. Woolam Co., Inc. Beam focusing and reflective optics
US9921395B1 (en) 2015-06-09 2018-03-20 J.A. Woollam Co., Inc. Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area
US10338362B1 (en) 2014-06-06 2019-07-02 J.A. Woollam Co., Inc. Beam focusing and reflecting optics with enhanced detector system
KR102313345B1 (ko) 2014-10-02 2021-10-15 삼성전자주식회사 광대역 광원 및 이를 구비하는 광학 검사장치
KR102016452B1 (ko) * 2017-12-27 2019-08-30 한양대학교 에리카산학협력단 타원해석기
KR102029824B1 (ko) * 2018-04-11 2019-10-08 조선대학교산학협력단 타원계측기 기반의 다채널 광 계측기
RU2688961C1 (ru) * 2018-07-06 2019-05-23 Федеральное государственное унитарное предприятие "Центральный аэрогидродинамический институт имени профессора Н.Е. Жуковского" (ФГУП "ЦАГИ") Устройство для измерения двунаправленного коэффициента яркости инфракрасного излучения материалов
US11035790B2 (en) * 2018-12-31 2021-06-15 Industrial Cooperation Foundation Chonbuk National University Inspection apparatus and inspection method
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WO2025173647A1 (fr) * 2024-02-16 2025-08-21 富士フイルム株式会社 Dispositif de mesure d'image de polarisation

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Also Published As

Publication number Publication date
AU2001276456A1 (en) 2002-01-30
US6819423B2 (en) 2004-11-16
US7230701B2 (en) 2007-06-12
FR2811761A1 (fr) 2002-01-18
JP2004504591A (ja) 2004-02-12
KR100846474B1 (ko) 2008-07-17
US20040070760A1 (en) 2004-04-15
KR20030022292A (ko) 2003-03-15
JP2004504590A (ja) 2004-02-12
KR20030026322A (ko) 2003-03-31
WO2002006779A2 (fr) 2002-01-24
AU2001270701A1 (en) 2002-01-30
EP1301764A1 (fr) 2003-04-16
WO2002006779A3 (fr) 2002-03-28
WO2002006780A1 (fr) 2002-01-24
EP1301763A2 (fr) 2003-04-16
US20040027571A1 (en) 2004-02-12

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Effective date: 20160331