FR2829237B1 - Appareil et procedes de mesure de pression par perte de chaleur - Google Patents

Appareil et procedes de mesure de pression par perte de chaleur

Info

Publication number
FR2829237B1
FR2829237B1 FR0213295A FR0213295A FR2829237B1 FR 2829237 B1 FR2829237 B1 FR 2829237B1 FR 0213295 A FR0213295 A FR 0213295A FR 0213295 A FR0213295 A FR 0213295A FR 2829237 B1 FR2829237 B1 FR 2829237B1
Authority
FR
France
Prior art keywords
loss
methods
heat
measuring pressure
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0213295A
Other languages
English (en)
Other versions
FR2829237A1 (fr
Inventor
Daniel Granville Bills
Michael Dale Borenstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of FR2829237A1 publication Critical patent/FR2829237A1/fr
Application granted granted Critical
Publication of FR2829237B1 publication Critical patent/FR2829237B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
FR0213295A 2000-05-31 2002-10-24 Appareil et procedes de mesure de pression par perte de chaleur Expired - Fee Related FR2829237B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/583,339 US6658941B1 (en) 1997-07-21 2000-05-31 Apparatus and methods for heat loss pressure measurement

Publications (2)

Publication Number Publication Date
FR2829237A1 FR2829237A1 (fr) 2003-03-07
FR2829237B1 true FR2829237B1 (fr) 2004-11-19

Family

ID=24332699

Family Applications (2)

Application Number Title Priority Date Filing Date
FR0107066A Expired - Fee Related FR2809812B1 (fr) 2000-05-31 2001-05-30 Appareil et procedes de mesure de pression par perte de chaleur
FR0213295A Expired - Fee Related FR2829237B1 (fr) 2000-05-31 2002-10-24 Appareil et procedes de mesure de pression par perte de chaleur

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR0107066A Expired - Fee Related FR2809812B1 (fr) 2000-05-31 2001-05-30 Appareil et procedes de mesure de pression par perte de chaleur

Country Status (6)

Country Link
US (2) US6658941B1 (fr)
JP (1) JP2001343302A (fr)
KR (1) KR100809164B1 (fr)
DE (1) DE10126373A1 (fr)
FR (2) FR2809812B1 (fr)
GB (1) GB2368647B (fr)

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US6938493B2 (en) 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6658941B1 (en) * 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
JP2004138128A (ja) 2002-10-16 2004-05-13 Nissan Motor Co Ltd 自動車エンジン用摺動部材
US6969198B2 (en) 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP3891433B2 (ja) 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
EP1479946B1 (fr) 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Piston pour un moteur à combustion interne
EP1482190B1 (fr) 2003-05-27 2012-12-05 Nissan Motor Company Limited Elément de roulement
JP2004360649A (ja) 2003-06-06 2004-12-24 Nissan Motor Co Ltd エンジン用ピストンピン
JP4863152B2 (ja) 2003-07-31 2012-01-25 日産自動車株式会社 歯車
EP1666573B1 (fr) 2003-08-06 2019-05-15 Nissan Motor Company Limited Mecanisme coulissant a faible frottement et procede de reduction de frottement
JP4973971B2 (ja) 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005054617A (ja) 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
DE602004008547T2 (de) 2003-08-13 2008-05-21 Nissan Motor Co., Ltd., Yokohama Struktur zur Verbindung von einem Kolben mit einer Kurbelwelle
JP4117553B2 (ja) 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
JP4539205B2 (ja) 2003-08-21 2010-09-08 日産自動車株式会社 冷媒圧縮機
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (fr) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Boîte de vitesse comprenant une composition d`huile de transmission
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
WO2006020196A1 (fr) 2004-07-28 2006-02-23 Brooks Automation, Inc. Procedez de fonctionnement d'un capteur de pression a perte d'energie et a resistance
US7249516B2 (en) * 2004-07-28 2007-07-31 Brooks Automation, Inc. Method of operating a resistive heat-loss pressure sensor
US7313966B2 (en) * 2004-12-14 2008-01-01 Brooks Automation, Inc. Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
US7322248B1 (en) * 2006-08-29 2008-01-29 Eastman Kodak Company Pressure gauge for organic materials
JP6293588B2 (ja) * 2014-06-27 2018-03-14 東京エレクトロン株式会社 圧力センサおよび圧力センサの製造方法
US10914717B2 (en) 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
EP3690417A1 (fr) * 2019-02-01 2020-08-05 Sens4 A/S Appareil pour la mesure du vide à perte thermique ayant une compensation de température améliorée et une plage de mesure étendue
WO2021022459A1 (fr) * 2019-08-05 2021-02-11 深圳市汇顶科技股份有限公司 Circuit de détection de capteur en pont, puce et système de détection

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US1668106A (en) 1923-07-26 1928-05-01 Bbc Brown Boveri & Cie Hot-wire vacuum meter
US1778508A (en) 1925-10-20 1930-10-14 Western Electric Co Apparatus for measuring and recording pressures
US1873984A (en) 1928-09-14 1932-08-30 Sieber Fritz Indicating device
US2938387A (en) 1956-12-10 1960-05-31 Cons Vacuum Corp Automatic control circuit
DE1094341B (de) 1958-12-13 1960-12-08 Cons Electrodynamics Corp Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes
US3199356A (en) 1961-11-06 1965-08-10 Andriulis Vytautas Pressure gauge
DE1648592A1 (de) 1967-10-25 1971-04-01 Leybold Heraeus Gmbh & Co Kg Messverfahren zur Messung kleiner Differenzdruecke
US3580081A (en) 1969-09-10 1971-05-25 Veeco Instr Inc Vacuum gauge
US4106350A (en) 1977-08-29 1978-08-15 Morris Richard T Thin wire pressure sensor
US4279147A (en) 1980-01-10 1981-07-21 Djorup Robert Sonny Directional heat loss anemometer transducer
DE3131506A1 (de) 1981-08-08 1983-03-17 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter
GB2105047B (en) 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
DE3230405A1 (de) 1981-08-28 1983-03-10 Boc Ltd., London Gasdruck-messschaltung
JPS6153518A (ja) * 1984-08-24 1986-03-17 Hitachi Ltd 発熱抵抗式空気流量計
US4682503A (en) 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
US4736155A (en) * 1987-03-06 1988-04-05 Colt Industries Inc Transducer temperature control circuit and method
SU1675710A1 (ru) 1987-03-26 1991-09-07 Предприятие П/Я А-1614 Способ градуировки теплового вакуумметра
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ATE94642T1 (de) 1989-01-23 1993-10-15 Balzers Hochvakuum Gasdruck-messgeraet.
US5184500A (en) * 1990-03-20 1993-02-09 J And N Associates, Inc. Gas detector
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DE4308433A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
DE4308434A1 (de) * 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US5347869A (en) 1993-03-25 1994-09-20 Opto Tech Corporation Structure of micro-pirani sensor
US5597957A (en) 1993-12-23 1997-01-28 Heimann Optoelectronics Gmbh Microvacuum sensor having an expanded sensitivity range
US5557972A (en) * 1994-09-13 1996-09-24 Teledyne Industries, Inc. Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
US5668320A (en) * 1995-06-19 1997-09-16 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
DE19617238A1 (de) * 1996-04-30 1997-11-06 Leybold Vakuum Gmbh Schaltung zur Temperaturkompensation eines Wärmeleitungsvakuummeters
JPH10132841A (ja) * 1996-10-28 1998-05-22 Central Res Inst Of Electric Power Ind 瞬時流速及び温度同時計測センサ
US5812047A (en) * 1997-02-18 1998-09-22 Exar Corporation Offset-free resistor geometry for use in piezo-resistive pressure sensor
US6023979A (en) 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
US6658941B1 (en) * 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
CH692762A5 (de) * 1997-09-22 2002-10-15 Unaxis Balzers Ag Verfahren zur Messung des Gasdrucks in einem Gefäss sowie Vorrichtungen zur Durchführung des Verfahrens.

Also Published As

Publication number Publication date
JP2001343302A (ja) 2001-12-14
US6658941B1 (en) 2003-12-09
DE10126373A1 (de) 2001-12-06
FR2809812B1 (fr) 2004-06-11
FR2809812A1 (fr) 2001-12-07
GB0111285D0 (en) 2001-06-27
FR2829237A1 (fr) 2003-03-07
KR100809164B1 (ko) 2008-02-29
GB2368647A (en) 2002-05-08
KR20010109204A (ko) 2001-12-08
GB2368647B (en) 2003-05-14
US20040020301A1 (en) 2004-02-05
US6799468B2 (en) 2004-10-05

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Legal Events

Date Code Title Description
ST Notification of lapse
RN Application for restoration
FC Decision of inpi director general to approve request for restoration
ST Notification of lapse

Effective date: 20100129