FR2880236B1 - Excitateurs de plasmas micro-ondes - Google Patents

Excitateurs de plasmas micro-ondes

Info

Publication number
FR2880236B1
FR2880236B1 FR0453166A FR0453166A FR2880236B1 FR 2880236 B1 FR2880236 B1 FR 2880236B1 FR 0453166 A FR0453166 A FR 0453166A FR 0453166 A FR0453166 A FR 0453166A FR 2880236 B1 FR2880236 B1 FR 2880236B1
Authority
FR
France
Prior art keywords
excitators
microwave plasma
microwave
plasma
plasma excitators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0453166A
Other languages
English (en)
Other versions
FR2880236A1 (fr
Inventor
Zenon Zakrzewski
Dariusz Czykowski
Mariusz Jasinski
Michel Moisan
Daniel Guerin
Christian Larquet
Jean Christophe Rostaing
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0453166A priority Critical patent/FR2880236B1/fr
Priority to PCT/FR2005/051136 priority patent/WO2006090037A1/fr
Publication of FR2880236A1 publication Critical patent/FR2880236A1/fr
Application granted granted Critical
Publication of FR2880236B1 publication Critical patent/FR2880236B1/fr
Priority to US11/766,875 priority patent/US7799119B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
FR0453166A 2004-12-23 2004-12-23 Excitateurs de plasmas micro-ondes Expired - Fee Related FR2880236B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0453166A FR2880236B1 (fr) 2004-12-23 2004-12-23 Excitateurs de plasmas micro-ondes
PCT/FR2005/051136 WO2006090037A1 (fr) 2004-12-23 2005-12-22 Excitateurs de plasmas micro-ondes
US11/766,875 US7799119B2 (en) 2004-12-23 2007-06-22 Microwave plasma exciters

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0453166A FR2880236B1 (fr) 2004-12-23 2004-12-23 Excitateurs de plasmas micro-ondes

Publications (2)

Publication Number Publication Date
FR2880236A1 FR2880236A1 (fr) 2006-06-30
FR2880236B1 true FR2880236B1 (fr) 2007-03-30

Family

ID=34952750

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0453166A Expired - Fee Related FR2880236B1 (fr) 2004-12-23 2004-12-23 Excitateurs de plasmas micro-ondes

Country Status (3)

Country Link
US (1) US7799119B2 (fr)
FR (1) FR2880236B1 (fr)
WO (1) WO2006090037A1 (fr)

Families Citing this family (19)

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RU2468544C1 (ru) * 2011-03-21 2012-11-27 Общество с ограниченной ответственностью "Фиберус" Устройство для возбуждения и поддержания свч-разрядов в плазмохимических реакторах
TWI484871B (zh) * 2011-07-22 2015-05-11 Triple Cores Korea 大氣電漿裝置及其波導
US8773225B1 (en) * 2013-03-15 2014-07-08 Agilent Technologies, Inc. Waveguide-based apparatus for exciting and sustaining a plasma
US9623397B2 (en) 2013-08-20 2017-04-18 H Quest Partners, LP System for processing hydrocarbon fuels using surfaguide
WO2015026938A1 (fr) 2013-08-20 2015-02-26 H Quest Partners, LP Système permettant de traiter des combustibles hydrocarbonés au moyen d'un surfaguide
US9095835B2 (en) 2013-08-20 2015-08-04 H Quest Partners, LP Method for processing hydrocarbon fuels using microwave energy
US20150057479A1 (en) 2013-08-20 2015-02-26 H Quest Partners, LP Multi-stage system for processing hydrocarbon fuels
US9345121B2 (en) * 2014-03-28 2016-05-17 Agilent Technologies, Inc. Waveguide-based apparatus for exciting and sustaining a plasma
RU2601290C1 (ru) * 2015-04-13 2016-10-27 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Национальный исследовательский ядерный университет "МИФИ" (НИЯУ МИФИ) Свч-плазмотрон
EP3329748B1 (fr) * 2015-07-31 2022-02-09 Agilent Technologies, Inc. Chambres pour génération de plasma par micro-ondes et procédés associés
US9767992B1 (en) 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
US9997334B1 (en) 2017-02-09 2018-06-12 Lyten, Inc. Seedless particles with carbon allotropes
US10920035B2 (en) 2017-03-16 2021-02-16 Lyten, Inc. Tuning deformation hysteresis in tires using graphene
CN110418816B (zh) 2017-03-16 2022-05-31 利腾股份有限公司 碳和弹性体整合
US10502705B2 (en) 2018-01-04 2019-12-10 Lyten, Inc. Resonant gas sensor
US10756334B2 (en) 2017-12-22 2020-08-25 Lyten, Inc. Structured composite materials
WO2019143559A1 (fr) 2018-01-16 2019-07-25 Lyten, Inc. Barrière de pression transparente aux micro-ondes
CN112937912B (zh) * 2021-01-21 2023-08-15 南京南华航空产业有限公司 一种基于阵列式等离子体的旋成体侧向力控制实验装置
CN121709890B (zh) * 2025-12-15 2026-08-04 深圳市华达微波科技有限公司 一种小型化宽带匹配的单脊波导90度弯头

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
FR2579855A1 (fr) * 1985-03-28 1986-10-03 Centre Nat Rech Scient Dispositif pour l'excitation par ondes hyperfrequences d'un plasma dans une colonne de gaz, permettant notamment la realisation d'un laser ionique
FR2583250B1 (fr) * 1985-06-07 1989-06-30 France Etat Procede et dispositif d'excitation d'un plasma par micro-ondes a la resonance cyclotronique electronique
US4965540A (en) * 1987-12-23 1990-10-23 Hewlett-Packard Company Microwave resonant cavity
FR2628730B1 (fr) * 1988-03-16 1990-06-29 France Etat Dispositif de fabrication de preformes pour fibres optiques
GB8821672D0 (en) * 1988-09-02 1988-10-19 Emi Plc Thorn Discharge tube arrangement
US4963842A (en) * 1988-12-19 1990-10-16 Westinghouse Electric Corp. Millimeter wave fin-line gas discharge receiver protector
US5489818A (en) * 1989-05-22 1996-02-06 Olin Corporation High power compact microwave source
JPH03193880A (ja) * 1989-08-03 1991-08-23 Mikakutou Seimitsu Kogaku Kenkyusho:Kk 高圧力下でのマイクロ波プラズマｃｖｄによる高速成膜方法及びその装置
US5049843A (en) * 1990-04-12 1991-09-17 Barnes Ramon M Strip-line for propagating microwave energy
FR2678956B1 (fr) * 1991-07-12 1993-09-24 Pechiney Recherche Dispositif et procede de depot de diamant par dcpv assiste par plasma microonde.
US5468356A (en) * 1991-08-23 1995-11-21 The United States Of America As Represented By The Secretary Of The Navy Large scale purification of contaminated air
US5389153A (en) * 1993-02-19 1995-02-14 Texas Instruments Incorporated Plasma processing system using surface wave plasma generating apparatus and method
US5597624A (en) * 1995-04-24 1997-01-28 Ceram Optic Industries, Inc. Method and apparatus for coating dielectrics
US5750823A (en) * 1995-07-10 1998-05-12 R.F. Environmental Systems, Inc. Process and device for destruction of halohydrocarbons
US5698986A (en) * 1996-02-12 1997-12-16 Allen-Bradley Company, Inc. Cigarette density monitor
GB2324196B (en) * 1997-04-09 2001-10-24 Aea Technology Plc Plasma processing
FR2762748B1 (fr) * 1997-04-25 1999-06-11 Air Liquide Dispositif d'excitation d'un gaz par plasma d'onde de surface
US6204606B1 (en) * 1998-10-01 2001-03-20 The University Of Tennessee Research Corporation Slotted waveguide structure for generating plasma discharges
GB0021815D0 (en) * 2000-09-06 2000-10-18 Lofting Marcus J Plasma enhanced gas reactor

Also Published As

Publication number Publication date
US20090020009A1 (en) 2009-01-22
US7799119B2 (en) 2010-09-21
WO2006090037A1 (fr) 2006-08-31
FR2880236A1 (fr) 2006-06-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20140829