FR2917850B1 - Machine d'exposition pour panneaux de circuit imprime - Google Patents

Machine d'exposition pour panneaux de circuit imprime

Info

Publication number
FR2917850B1
FR2917850B1 FR0758269A FR0758269A FR2917850B1 FR 2917850 B1 FR2917850 B1 FR 2917850B1 FR 0758269 A FR0758269 A FR 0758269A FR 0758269 A FR0758269 A FR 0758269A FR 2917850 B1 FR2917850 B1 FR 2917850B1
Authority
FR
France
Prior art keywords
printed circuit
circuit boards
exposure machine
exposure
machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0758269A
Other languages
English (en)
Other versions
FR2917850A1 (fr
Inventor
Franck Roland
Alain Simard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Automa Tech SA
Original Assignee
Automa Tech SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Automa Tech SA filed Critical Automa Tech SA
Priority to FR0758269A priority Critical patent/FR2917850B1/fr
Publication of FR2917850A1 publication Critical patent/FR2917850A1/fr
Application granted granted Critical
Publication of FR2917850B1 publication Critical patent/FR2917850B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2032—Simultaneous exposure of the front side and the backside

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
FR0758269A 2007-10-12 2007-10-12 Machine d'exposition pour panneaux de circuit imprime Active FR2917850B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0758269A FR2917850B1 (fr) 2007-10-12 2007-10-12 Machine d'exposition pour panneaux de circuit imprime

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0758269A FR2917850B1 (fr) 2007-10-12 2007-10-12 Machine d'exposition pour panneaux de circuit imprime

Publications (2)

Publication Number Publication Date
FR2917850A1 FR2917850A1 (fr) 2008-12-26
FR2917850B1 true FR2917850B1 (fr) 2009-10-16

Family

ID=39332520

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0758269A Active FR2917850B1 (fr) 2007-10-12 2007-10-12 Machine d'exposition pour panneaux de circuit imprime

Country Status (1)

Country Link
FR (1) FR2917850B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012108211A1 (de) * 2012-09-04 2014-03-06 Kleo Halbleitertechnik Gmbh Belichtungsanlage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07168366A (ja) * 1993-08-26 1995-07-04 Adtec Eng:Kk 露光装置
JP2001305744A (ja) * 2000-04-20 2001-11-02 Dainippon Screen Mfg Co Ltd 密着露光装置
FR2822966B1 (fr) * 2001-03-28 2003-12-12 Automa Tech Sa Chassis d'exposition a la lumiere d'un circuit imprime
FR2842617B1 (fr) * 2002-07-17 2005-01-21 Automa Tech Sa Machine d'exposition de panneaux de circuit imprime
FR2842618B1 (fr) * 2002-07-17 2005-01-21 Automa Tech Sa Machine d'exposition de panneaux de circuit imprime

Also Published As

Publication number Publication date
FR2917850A1 (fr) 2008-12-26

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